12/9/2010	12:00:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/9/2010	12:00:45 PM	Recipe started at 12:00 PM
12/9/2010	12:00:45 PM	Helium valve closed
12/9/2010	12:00:45 PM	H2 valve closed
12/9/2010	12:00:45 PM	BCl3 valve closed
12/9/2010	12:00:45 PM	PH3 valve closed
12/9/2010	12:00:45 PM	SiCl4 pre valve closed
12/9/2010	12:00:45 PM	SiCl4 post valve closed
12/9/2010	12:00:45 PM	Main Vac valve closed
12/9/2010	12:00:45 PM	Bubbler valve closed
12/9/2010	12:00:45 PM	Bypass valve opened
12/9/2010	12:00:45 PM	Helium MFC set to  0.000000
12/9/2010	12:00:45 PM	H2 MFC set to  0.000000
12/9/2010	12:00:45 PM	BCl3 MFC set to  0.000000
12/9/2010	12:00:45 PM	PHl3 MFC set to  0.000000
12/9/2010	12:00:45 PM	SiCl4 MFC set to  0.000000
12/9/2010	12:00:45 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	12:00:45 PM	Tube furnace set to 0
12/9/2010	12:00:46 PM	Helium valve closed
12/9/2010	12:00:46 PM	H2 valve closed
12/9/2010	12:00:46 PM	BCl3 valve closed
12/9/2010	12:00:46 PM	PH3 valve closed
12/9/2010	12:00:46 PM	SiCl4 pre valve closed
12/9/2010	12:00:46 PM	SiCl4 post valve closed
12/9/2010	12:00:46 PM	Bubbler valve closed
12/9/2010	12:00:46 PM	Main Vac valve opened
12/9/2010	12:00:46 PM	Bypass valve opened
12/9/2010	12:00:46 PM	Helium MFC set to  0.000000
12/9/2010	12:00:46 PM	H2 MFC set to  0.000000
12/9/2010	12:00:46 PM	BCl3 MFC set to  0.000000
12/9/2010	12:00:46 PM	PHl3 MFC set to  0.000000
12/9/2010	12:00:46 PM	SiCl4 MFC set to  0.000000
12/9/2010	12:00:46 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	12:00:46 PM	Tube furnace set to 0
12/9/2010	12:01:16 PM	Run aborted at 12:01 PM
12/9/2010	12:01:16 PM	Helium valve closed
12/9/2010	12:01:16 PM	H2 valve closed
12/9/2010	12:01:16 PM	BCl3 valve closed
12/9/2010	12:01:16 PM	PH3 valve closed
12/9/2010	12:01:16 PM	SiCl4 pre valve closed
12/9/2010	12:01:16 PM	SiCl4 post valve closed
12/9/2010	12:01:16 PM	Bypass valve closed
12/9/2010	12:01:16 PM	Main Vac valve closed
12/9/2010	12:01:16 PM	Bubbler valve closed
12/9/2010	12:01:16 PM	Helium MFC set to  0.000000
12/9/2010	12:01:16 PM	H2 MFC set to  0.000000
12/9/2010	12:01:16 PM	BCl3 MFC set to  0.000000
12/9/2010	12:01:16 PM	PHl3 MFC set to  0.000000
12/9/2010	12:01:16 PM	SiCl4 MFC set to  0.000000
12/9/2010	12:01:16 PM	Tube furnace set to 0
12/9/2010	12:01:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/9/2010	12:01:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/9/2010	12:01:20 PM	Recipe started at 12:01 PM
12/9/2010	12:01:20 PM	Helium valve closed
12/9/2010	12:01:20 PM	H2 valve closed
12/9/2010	12:01:20 PM	BCl3 valve closed
12/9/2010	12:01:20 PM	PH3 valve closed
12/9/2010	12:01:20 PM	SiCl4 pre valve closed
12/9/2010	12:01:20 PM	SiCl4 post valve closed
12/9/2010	12:01:20 PM	Main Vac valve closed
12/9/2010	12:01:20 PM	Bubbler valve closed
12/9/2010	12:01:20 PM	Bypass valve opened
12/9/2010	12:01:20 PM	Helium MFC set to  0.000000
12/9/2010	12:01:20 PM	H2 MFC set to  0.000000
12/9/2010	12:01:20 PM	BCl3 MFC set to  0.000000
12/9/2010	12:01:20 PM	PHl3 MFC set to  0.000000
12/9/2010	12:01:20 PM	SiCl4 MFC set to  0.000000
12/9/2010	12:01:20 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	12:01:20 PM	Tube furnace set to 0
12/9/2010	12:01:21 PM	Helium valve closed
12/9/2010	12:01:21 PM	H2 valve closed
12/9/2010	12:01:21 PM	BCl3 valve closed
12/9/2010	12:01:21 PM	PH3 valve closed
12/9/2010	12:01:21 PM	SiCl4 pre valve closed
12/9/2010	12:01:21 PM	SiCl4 post valve closed
12/9/2010	12:01:21 PM	Bubbler valve closed
12/9/2010	12:01:21 PM	Main Vac valve opened
12/9/2010	12:01:21 PM	Bypass valve opened
12/9/2010	12:01:21 PM	Helium MFC set to  0.000000
12/9/2010	12:01:21 PM	H2 MFC set to  0.000000
12/9/2010	12:01:21 PM	BCl3 MFC set to  0.000000
12/9/2010	12:01:21 PM	PHl3 MFC set to  0.000000
12/9/2010	12:01:21 PM	SiCl4 MFC set to  0.000000
12/9/2010	12:01:21 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	12:01:21 PM	Tube furnace set to 0
12/9/2010	12:01:21 PM	Run finished at 12:01 PM
12/9/2010	12:01:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/9/2010	12:02:04 PM	Tube furnace set to 100
12/9/2010	12:02:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/9/2010	12:02:43 PM	Recipe started at 12:02 PM
12/9/2010	12:02:44 PM	Helium valve closed
12/9/2010	12:02:44 PM	H2 valve closed
12/9/2010	12:02:44 PM	BCl3 valve closed
12/9/2010	12:02:44 PM	PH3 valve closed
12/9/2010	12:02:44 PM	SiCl4 pre valve closed
12/9/2010	12:02:44 PM	SiCl4 post valve closed
12/9/2010	12:02:44 PM	Main Vac valve closed
12/9/2010	12:02:44 PM	Bubbler valve closed
12/9/2010	12:02:44 PM	Bypass valve opened
12/9/2010	12:02:44 PM	Helium MFC set to  0.000000
12/9/2010	12:02:44 PM	H2 MFC set to  0.000000
12/9/2010	12:02:44 PM	BCl3 MFC set to  0.000000
12/9/2010	12:02:44 PM	PHl3 MFC set to  0.000000
12/9/2010	12:02:44 PM	SiCl4 MFC set to  0.000000
12/9/2010	12:02:44 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	12:02:44 PM	Tube furnace set to 0
12/9/2010	12:02:44 PM	Helium valve closed
12/9/2010	12:02:44 PM	H2 valve closed
12/9/2010	12:02:44 PM	BCl3 valve closed
12/9/2010	12:02:44 PM	PH3 valve closed
12/9/2010	12:02:44 PM	SiCl4 pre valve closed
12/9/2010	12:02:44 PM	SiCl4 post valve closed
12/9/2010	12:02:44 PM	Bubbler valve closed
12/9/2010	12:02:44 PM	Main Vac valve opened
12/9/2010	12:02:44 PM	Bypass valve opened
12/9/2010	12:02:44 PM	Helium MFC set to  0.000000
12/9/2010	12:02:44 PM	H2 MFC set to  0.000000
12/9/2010	12:02:44 PM	BCl3 MFC set to  0.000000
12/9/2010	12:02:44 PM	PHl3 MFC set to  0.000000
12/9/2010	12:02:44 PM	SiCl4 MFC set to  0.000000
12/9/2010	12:02:44 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	12:02:44 PM	Tube furnace set to 0
12/9/2010	12:03:44 PM	H2 valve closed
12/9/2010	12:03:44 PM	BCl3 valve closed
12/9/2010	12:03:44 PM	PH3 valve closed
12/9/2010	12:03:44 PM	SiCl4 pre valve closed
12/9/2010	12:03:44 PM	SiCl4 post valve closed
12/9/2010	12:03:44 PM	Bubbler valve closed
12/9/2010	12:03:44 PM	Helium valve opened
12/9/2010	12:03:44 PM	Main Vac valve opened
12/9/2010	12:03:44 PM	Bypass valve opened
12/9/2010	12:03:44 PM	Helium MFC set to  100.000000
12/9/2010	12:03:44 PM	H2 MFC set to  0.000000
12/9/2010	12:03:44 PM	BCl3 MFC set to  0.000000
12/9/2010	12:03:44 PM	PHl3 MFC set to  0.000000
12/9/2010	12:03:44 PM	SiCl4 MFC set to  0.000000
12/9/2010	12:03:44 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	12:03:44 PM	Tube furnace set to 0
12/9/2010	12:04:44 PM	Helium valve closed
12/9/2010	12:04:44 PM	H2 valve closed
12/9/2010	12:04:44 PM	BCl3 valve closed
12/9/2010	12:04:44 PM	PH3 valve closed
12/9/2010	12:04:44 PM	SiCl4 pre valve closed
12/9/2010	12:04:44 PM	SiCl4 post valve closed
12/9/2010	12:04:44 PM	Bubbler valve closed
12/9/2010	12:04:44 PM	Main Vac valve opened
12/9/2010	12:04:44 PM	Bypass valve opened
12/9/2010	12:04:44 PM	Helium MFC set to  0.000000
12/9/2010	12:04:44 PM	H2 MFC set to  0.000000
12/9/2010	12:04:44 PM	BCl3 MFC set to  0.000000
12/9/2010	12:04:44 PM	PHl3 MFC set to  0.000000
12/9/2010	12:04:44 PM	SiCl4 MFC set to  0.000000
12/9/2010	12:04:44 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	12:04:45 PM	Tube furnace set to 0
12/9/2010	12:05:45 PM	H2 valve closed
12/9/2010	12:05:45 PM	BCl3 valve closed
12/9/2010	12:05:45 PM	PH3 valve closed
12/9/2010	12:05:45 PM	SiCl4 pre valve closed
12/9/2010	12:05:45 PM	SiCl4 post valve closed
12/9/2010	12:05:45 PM	Bubbler valve closed
12/9/2010	12:05:45 PM	Helium valve opened
12/9/2010	12:05:45 PM	Main Vac valve opened
12/9/2010	12:05:45 PM	Bypass valve opened
12/9/2010	12:05:45 PM	Helium MFC set to  100.000000
12/9/2010	12:05:45 PM	H2 MFC set to  0.000000
12/9/2010	12:05:45 PM	BCl3 MFC set to  0.000000
12/9/2010	12:05:45 PM	PHl3 MFC set to  0.000000
12/9/2010	12:05:45 PM	SiCl4 MFC set to  0.000000
12/9/2010	12:05:45 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	12:05:45 PM	Tube furnace set to 0
12/9/2010	12:06:45 PM	Helium valve closed
12/9/2010	12:06:45 PM	H2 valve closed
12/9/2010	12:06:45 PM	BCl3 valve closed
12/9/2010	12:06:45 PM	PH3 valve closed
12/9/2010	12:06:45 PM	SiCl4 pre valve closed
12/9/2010	12:06:45 PM	SiCl4 post valve closed
12/9/2010	12:06:45 PM	Bubbler valve closed
12/9/2010	12:06:45 PM	Main Vac valve opened
12/9/2010	12:06:45 PM	Bypass valve opened
12/9/2010	12:06:45 PM	Helium MFC set to  0.000000
12/9/2010	12:06:45 PM	H2 MFC set to  0.000000
12/9/2010	12:06:45 PM	BCl3 MFC set to  0.000000
12/9/2010	12:06:45 PM	PHl3 MFC set to  0.000000
12/9/2010	12:06:45 PM	SiCl4 MFC set to  0.000000
12/9/2010	12:06:45 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	12:06:45 PM	Tube furnace set to 0
12/9/2010	12:07:45 PM	H2 valve closed
12/9/2010	12:07:45 PM	BCl3 valve closed
12/9/2010	12:07:45 PM	PH3 valve closed
12/9/2010	12:07:45 PM	SiCl4 pre valve closed
12/9/2010	12:07:45 PM	SiCl4 post valve closed
12/9/2010	12:07:45 PM	Bubbler valve closed
12/9/2010	12:07:45 PM	Helium valve opened
12/9/2010	12:07:45 PM	Main Vac valve opened
12/9/2010	12:07:45 PM	Bypass valve opened
12/9/2010	12:07:45 PM	Helium MFC set to  100.000000
12/9/2010	12:07:45 PM	H2 MFC set to  0.000000
12/9/2010	12:07:45 PM	BCl3 MFC set to  0.000000
12/9/2010	12:07:45 PM	PHl3 MFC set to  0.000000
12/9/2010	12:07:45 PM	SiCl4 MFC set to  0.000000
12/9/2010	12:07:45 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	12:07:45 PM	Tube furnace set to 0
12/9/2010	12:08:45 PM	Helium valve closed
12/9/2010	12:08:45 PM	H2 valve closed
12/9/2010	12:08:45 PM	BCl3 valve closed
12/9/2010	12:08:45 PM	PH3 valve closed
12/9/2010	12:08:45 PM	SiCl4 pre valve closed
12/9/2010	12:08:45 PM	SiCl4 post valve closed
12/9/2010	12:08:45 PM	Bubbler valve closed
12/9/2010	12:08:45 PM	Main Vac valve opened
12/9/2010	12:08:45 PM	Bypass valve opened
12/9/2010	12:08:45 PM	Helium MFC set to  0.000000
12/9/2010	12:08:45 PM	H2 MFC set to  0.000000
12/9/2010	12:08:45 PM	BCl3 MFC set to  0.000000
12/9/2010	12:08:45 PM	PHl3 MFC set to  0.000000
12/9/2010	12:08:45 PM	SiCl4 MFC set to  0.000000
12/9/2010	12:08:45 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	12:08:45 PM	Tube furnace set to 0
12/9/2010	12:09:45 PM	H2 valve closed
12/9/2010	12:09:45 PM	BCl3 valve closed
12/9/2010	12:09:45 PM	PH3 valve closed
12/9/2010	12:09:45 PM	SiCl4 pre valve closed
12/9/2010	12:09:45 PM	SiCl4 post valve closed
12/9/2010	12:09:45 PM	Bubbler valve closed
12/9/2010	12:09:45 PM	Helium valve opened
12/9/2010	12:09:45 PM	Main Vac valve opened
12/9/2010	12:09:45 PM	Bypass valve opened
12/9/2010	12:09:45 PM	Helium MFC set to  100.000000
12/9/2010	12:09:45 PM	H2 MFC set to  0.000000
12/9/2010	12:09:45 PM	BCl3 MFC set to  0.000000
12/9/2010	12:09:45 PM	PHl3 MFC set to  0.000000
12/9/2010	12:09:45 PM	SiCl4 MFC set to  0.000000
12/9/2010	12:09:45 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	12:09:45 PM	Tube furnace set to 0
12/9/2010	12:10:46 PM	Helium valve closed
12/9/2010	12:10:46 PM	H2 valve closed
12/9/2010	12:10:46 PM	BCl3 valve closed
12/9/2010	12:10:46 PM	PH3 valve closed
12/9/2010	12:10:46 PM	SiCl4 pre valve closed
12/9/2010	12:10:46 PM	SiCl4 post valve closed
12/9/2010	12:10:46 PM	Bubbler valve closed
12/9/2010	12:10:46 PM	Main Vac valve opened
12/9/2010	12:10:46 PM	Bypass valve opened
12/9/2010	12:10:46 PM	Helium MFC set to  0.000000
12/9/2010	12:10:46 PM	H2 MFC set to  0.000000
12/9/2010	12:10:46 PM	BCl3 MFC set to  0.000000
12/9/2010	12:10:46 PM	PHl3 MFC set to  0.000000
12/9/2010	12:10:46 PM	SiCl4 MFC set to  0.000000
12/9/2010	12:10:46 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	12:10:46 PM	Tube furnace set to 0
12/9/2010	12:11:46 PM	H2 valve closed
12/9/2010	12:11:46 PM	BCl3 valve closed
12/9/2010	12:11:46 PM	PH3 valve closed
12/9/2010	12:11:46 PM	SiCl4 pre valve closed
12/9/2010	12:11:46 PM	SiCl4 post valve closed
12/9/2010	12:11:46 PM	Bubbler valve closed
12/9/2010	12:11:46 PM	Helium valve opened
12/9/2010	12:11:46 PM	Main Vac valve opened
12/9/2010	12:11:46 PM	Bypass valve opened
12/9/2010	12:11:46 PM	Helium MFC set to  100.000000
12/9/2010	12:11:46 PM	H2 MFC set to  0.000000
12/9/2010	12:11:46 PM	BCl3 MFC set to  0.000000
12/9/2010	12:11:46 PM	PHl3 MFC set to  0.000000
12/9/2010	12:11:46 PM	SiCl4 MFC set to  0.000000
12/9/2010	12:11:46 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	12:11:46 PM	Tube furnace set to 0
12/9/2010	12:12:46 PM	Helium valve closed
12/9/2010	12:12:46 PM	H2 valve closed
12/9/2010	12:12:46 PM	BCl3 valve closed
12/9/2010	12:12:46 PM	PH3 valve closed
12/9/2010	12:12:46 PM	SiCl4 pre valve closed
12/9/2010	12:12:46 PM	SiCl4 post valve closed
12/9/2010	12:12:46 PM	Bubbler valve closed
12/9/2010	12:12:46 PM	Main Vac valve opened
12/9/2010	12:12:46 PM	Bypass valve opened
12/9/2010	12:12:46 PM	Helium MFC set to  0.000000
12/9/2010	12:12:46 PM	H2 MFC set to  0.000000
12/9/2010	12:12:46 PM	BCl3 MFC set to  0.000000
12/9/2010	12:12:46 PM	PHl3 MFC set to  0.000000
12/9/2010	12:12:46 PM	SiCl4 MFC set to  0.000000
12/9/2010	12:12:46 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	12:12:46 PM	Tube furnace set to 0
12/9/2010	12:13:46 PM	H2 valve closed
12/9/2010	12:13:46 PM	BCl3 valve closed
12/9/2010	12:13:46 PM	PH3 valve closed
12/9/2010	12:13:46 PM	SiCl4 pre valve closed
12/9/2010	12:13:46 PM	SiCl4 post valve closed
12/9/2010	12:13:46 PM	Bubbler valve closed
12/9/2010	12:13:46 PM	Helium valve opened
12/9/2010	12:13:46 PM	Main Vac valve opened
12/9/2010	12:13:46 PM	Bypass valve opened
12/9/2010	12:13:46 PM	Helium MFC set to  100.000000
12/9/2010	12:13:46 PM	H2 MFC set to  0.000000
12/9/2010	12:13:46 PM	BCl3 MFC set to  0.000000
12/9/2010	12:13:46 PM	PHl3 MFC set to  0.000000
12/9/2010	12:13:46 PM	SiCl4 MFC set to  0.000000
12/9/2010	12:13:46 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	12:13:46 PM	Tube furnace set to 0
12/9/2010	12:14:46 PM	Helium valve closed
12/9/2010	12:14:46 PM	H2 valve closed
12/9/2010	12:14:46 PM	BCl3 valve closed
12/9/2010	12:14:46 PM	PH3 valve closed
12/9/2010	12:14:46 PM	SiCl4 pre valve closed
12/9/2010	12:14:46 PM	SiCl4 post valve closed
12/9/2010	12:14:46 PM	Bubbler valve closed
12/9/2010	12:14:46 PM	Main Vac valve opened
12/9/2010	12:14:46 PM	Bypass valve opened
12/9/2010	12:14:46 PM	Helium MFC set to  0.000000
12/9/2010	12:14:46 PM	H2 MFC set to  0.000000
12/9/2010	12:14:46 PM	BCl3 MFC set to  0.000000
12/9/2010	12:14:46 PM	PHl3 MFC set to  0.000000
12/9/2010	12:14:46 PM	SiCl4 MFC set to  0.000000
12/9/2010	12:14:46 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	12:14:46 PM	Tube furnace set to 0
12/9/2010	12:15:46 PM	H2 valve closed
12/9/2010	12:15:46 PM	BCl3 valve closed
12/9/2010	12:15:46 PM	PH3 valve closed
12/9/2010	12:15:46 PM	SiCl4 pre valve closed
12/9/2010	12:15:47 PM	SiCl4 post valve closed
12/9/2010	12:15:47 PM	Bubbler valve closed
12/9/2010	12:15:47 PM	Helium valve opened
12/9/2010	12:15:47 PM	Main Vac valve opened
12/9/2010	12:15:47 PM	Bypass valve opened
12/9/2010	12:15:47 PM	Helium MFC set to  100.000000
12/9/2010	12:15:47 PM	H2 MFC set to  0.000000
12/9/2010	12:15:47 PM	BCl3 MFC set to  0.000000
12/9/2010	12:15:47 PM	PHl3 MFC set to  0.000000
12/9/2010	12:15:47 PM	SiCl4 MFC set to  0.000000
12/9/2010	12:15:47 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	12:15:47 PM	Tube furnace set to 0
12/9/2010	12:16:47 PM	Helium valve closed
12/9/2010	12:16:47 PM	H2 valve closed
12/9/2010	12:16:47 PM	BCl3 valve closed
12/9/2010	12:16:47 PM	PH3 valve closed
12/9/2010	12:16:47 PM	SiCl4 pre valve closed
12/9/2010	12:16:47 PM	SiCl4 post valve closed
12/9/2010	12:16:47 PM	Bubbler valve closed
12/9/2010	12:16:47 PM	Main Vac valve opened
12/9/2010	12:16:47 PM	Bypass valve opened
12/9/2010	12:16:47 PM	Helium MFC set to  0.000000
12/9/2010	12:16:47 PM	H2 MFC set to  0.000000
12/9/2010	12:16:47 PM	BCl3 MFC set to  0.000000
12/9/2010	12:16:47 PM	PHl3 MFC set to  0.000000
12/9/2010	12:16:47 PM	SiCl4 MFC set to  0.000000
12/9/2010	12:16:47 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	12:16:47 PM	Tube furnace set to 0
12/9/2010	12:17:47 PM	H2 valve closed
12/9/2010	12:17:47 PM	BCl3 valve closed
12/9/2010	12:17:47 PM	PH3 valve closed
12/9/2010	12:17:47 PM	SiCl4 pre valve closed
12/9/2010	12:17:47 PM	SiCl4 post valve closed
12/9/2010	12:17:47 PM	Bubbler valve closed
12/9/2010	12:17:47 PM	Helium valve opened
12/9/2010	12:17:47 PM	Main Vac valve opened
12/9/2010	12:17:47 PM	Bypass valve opened
12/9/2010	12:17:47 PM	Helium MFC set to  100.000000
12/9/2010	12:17:47 PM	H2 MFC set to  0.000000
12/9/2010	12:17:47 PM	BCl3 MFC set to  0.000000
12/9/2010	12:17:47 PM	PHl3 MFC set to  0.000000
12/9/2010	12:17:47 PM	SiCl4 MFC set to  0.000000
12/9/2010	12:17:47 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	12:17:47 PM	Tube furnace set to 0
12/9/2010	12:18:47 PM	Helium valve closed
12/9/2010	12:18:47 PM	H2 valve closed
12/9/2010	12:18:47 PM	BCl3 valve closed
12/9/2010	12:18:47 PM	PH3 valve closed
12/9/2010	12:18:47 PM	SiCl4 pre valve closed
12/9/2010	12:18:47 PM	SiCl4 post valve closed
12/9/2010	12:18:47 PM	Bubbler valve closed
12/9/2010	12:18:47 PM	Main Vac valve opened
12/9/2010	12:18:47 PM	Bypass valve opened
12/9/2010	12:18:47 PM	Helium MFC set to  0.000000
12/9/2010	12:18:47 PM	H2 MFC set to  0.000000
12/9/2010	12:18:47 PM	BCl3 MFC set to  0.000000
12/9/2010	12:18:47 PM	PHl3 MFC set to  0.000000
12/9/2010	12:18:47 PM	SiCl4 MFC set to  0.000000
12/9/2010	12:18:47 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	12:18:47 PM	Tube furnace set to 0
12/9/2010	12:19:47 PM	H2 valve closed
12/9/2010	12:19:47 PM	BCl3 valve closed
12/9/2010	12:19:47 PM	PH3 valve closed
12/9/2010	12:19:47 PM	SiCl4 pre valve closed
12/9/2010	12:19:47 PM	SiCl4 post valve closed
12/9/2010	12:19:47 PM	Bubbler valve closed
12/9/2010	12:19:47 PM	Helium valve opened
12/9/2010	12:19:47 PM	Main Vac valve opened
12/9/2010	12:19:47 PM	Bypass valve opened
12/9/2010	12:19:47 PM	Helium MFC set to  100.000000
12/9/2010	12:19:47 PM	H2 MFC set to  0.000000
12/9/2010	12:19:47 PM	BCl3 MFC set to  0.000000
12/9/2010	12:19:47 PM	PHl3 MFC set to  0.000000
12/9/2010	12:19:47 PM	SiCl4 MFC set to  0.000000
12/9/2010	12:19:47 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	12:19:47 PM	Tube furnace set to 0
12/9/2010	12:20:47 PM	Helium valve closed
12/9/2010	12:20:47 PM	H2 valve closed
12/9/2010	12:20:47 PM	BCl3 valve closed
12/9/2010	12:20:47 PM	PH3 valve closed
12/9/2010	12:20:47 PM	SiCl4 pre valve closed
12/9/2010	12:20:47 PM	SiCl4 post valve closed
12/9/2010	12:20:47 PM	Bubbler valve closed
12/9/2010	12:20:47 PM	Main Vac valve opened
12/9/2010	12:20:47 PM	Bypass valve opened
12/9/2010	12:20:47 PM	Helium MFC set to  0.000000
12/9/2010	12:20:47 PM	H2 MFC set to  0.000000
12/9/2010	12:20:47 PM	BCl3 MFC set to  0.000000
12/9/2010	12:20:47 PM	PHl3 MFC set to  0.000000
12/9/2010	12:20:47 PM	SiCl4 MFC set to  0.000000
12/9/2010	12:20:47 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	12:20:48 PM	Tube furnace set to 0
12/9/2010	12:21:48 PM	H2 valve closed
12/9/2010	12:21:48 PM	BCl3 valve closed
12/9/2010	12:21:48 PM	PH3 valve closed
12/9/2010	12:21:48 PM	SiCl4 pre valve closed
12/9/2010	12:21:48 PM	SiCl4 post valve closed
12/9/2010	12:21:48 PM	Bubbler valve closed
12/9/2010	12:21:48 PM	Helium valve opened
12/9/2010	12:21:48 PM	Main Vac valve opened
12/9/2010	12:21:48 PM	Bypass valve opened
12/9/2010	12:21:48 PM	Helium MFC set to  100.000000
12/9/2010	12:21:48 PM	H2 MFC set to  0.000000
12/9/2010	12:21:48 PM	BCl3 MFC set to  0.000000
12/9/2010	12:21:48 PM	PHl3 MFC set to  0.000000
12/9/2010	12:21:48 PM	SiCl4 MFC set to  0.000000
12/9/2010	12:21:48 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	12:21:48 PM	Tube furnace set to 0
12/9/2010	12:22:48 PM	Helium valve closed
12/9/2010	12:22:48 PM	H2 valve closed
12/9/2010	12:22:48 PM	BCl3 valve closed
12/9/2010	12:22:48 PM	PH3 valve closed
12/9/2010	12:22:48 PM	SiCl4 pre valve closed
12/9/2010	12:22:48 PM	SiCl4 post valve closed
12/9/2010	12:22:48 PM	Bubbler valve closed
12/9/2010	12:22:48 PM	Main Vac valve opened
12/9/2010	12:22:48 PM	Bypass valve opened
12/9/2010	12:22:48 PM	Helium MFC set to  0.000000
12/9/2010	12:22:48 PM	H2 MFC set to  0.000000
12/9/2010	12:22:48 PM	BCl3 MFC set to  0.000000
12/9/2010	12:22:48 PM	PHl3 MFC set to  0.000000
12/9/2010	12:22:48 PM	SiCl4 MFC set to  0.000000
12/9/2010	12:22:48 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	12:22:48 PM	Tube furnace set to 0
12/9/2010	12:22:49 PM	Run finished at 12:22 PM
12/9/2010	12:22:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/9/2010	1:01:00 PM	Recipe started at 1:00 PM
12/9/2010	1:01:00 PM	Helium valve closed
12/9/2010	1:01:00 PM	BCl3 valve closed
12/9/2010	1:01:00 PM	PH3 valve closed
12/9/2010	1:01:00 PM	SiCl4 pre valve closed
12/9/2010	1:01:00 PM	SiCl4 post valve closed
12/9/2010	1:01:00 PM	Main Vac valve closed
12/9/2010	1:01:00 PM	Bypass valve closed
12/9/2010	1:01:00 PM	Bubbler valve closed
12/9/2010	1:01:00 PM	H2 valve opened
12/9/2010	1:01:00 PM	Helium MFC set to  0.000000
12/9/2010	1:01:00 PM	H2 MFC set to  500.000000
12/9/2010	1:01:00 PM	BCl3 MFC set to  0.000000
12/9/2010	1:01:00 PM	PHl3 MFC set to  0.000000
12/9/2010	1:01:00 PM	SiCl4 MFC set to  0.000000
12/9/2010	1:01:00 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	1:01:00 PM	Tube furnace set to 0
12/9/2010	1:02:24 PM	Helium valve closed
12/9/2010	1:02:24 PM	BCl3 valve closed
12/9/2010	1:02:24 PM	PH3 valve closed
12/9/2010	1:02:24 PM	SiCl4 pre valve closed
12/9/2010	1:02:24 PM	SiCl4 post valve closed
12/9/2010	1:02:24 PM	Main Vac valve closed
12/9/2010	1:02:24 PM	Bypass valve closed
12/9/2010	1:02:24 PM	H2 valve opened
12/9/2010	1:02:24 PM	Bubbler valve opened
12/9/2010	1:02:24 PM	Helium MFC set to  0.000000
12/9/2010	1:02:24 PM	H2 MFC set to  500.000000
12/9/2010	1:02:24 PM	BCl3 MFC set to  0.000000
12/9/2010	1:02:24 PM	PHl3 MFC set to  0.000000
12/9/2010	1:02:24 PM	SiCl4 MFC set to  0.000000
12/9/2010	1:02:24 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	1:02:24 PM	Tube furnace set to 1000
12/9/2010	1:22:24 PM	Helium valve closed
12/9/2010	1:22:24 PM	BCl3 valve closed
12/9/2010	1:22:24 PM	Main Vac valve closed
12/9/2010	1:22:24 PM	Bypass valve closed
12/9/2010	1:22:24 PM	H2 valve opened
12/9/2010	1:22:24 PM	PH3 valve opened
12/9/2010	1:22:24 PM	SiCl4 pre valve opened
12/9/2010	1:22:24 PM	SiCl4 post valve opened
12/9/2010	1:22:24 PM	Bubbler valve opened
12/9/2010	1:22:24 PM	Helium MFC set to  0.000000
12/9/2010	1:22:24 PM	H2 MFC set to  500.000000
12/9/2010	1:22:24 PM	BCl3 MFC set to  0.000000
12/9/2010	1:22:24 PM	PHl3 MFC set to  1.000000
12/9/2010	1:22:24 PM	SiCl4 MFC set to  50.000000
12/9/2010	1:22:24 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	1:22:24 PM	Tube furnace set to 1000
12/9/2010	1:52:24 PM	H2 valve closed
12/9/2010	1:52:24 PM	BCl3 valve closed
12/9/2010	1:52:24 PM	PH3 valve closed
12/9/2010	1:52:24 PM	SiCl4 pre valve closed
12/9/2010	1:52:24 PM	SiCl4 post valve closed
12/9/2010	1:52:24 PM	Main Vac valve closed
12/9/2010	1:52:24 PM	Bypass valve closed
12/9/2010	1:52:24 PM	Helium valve opened
12/9/2010	1:52:24 PM	Bubbler valve opened
12/9/2010	1:52:24 PM	Helium MFC set to  500.000000
12/9/2010	1:52:24 PM	H2 MFC set to  0.000000
12/9/2010	1:52:24 PM	BCl3 MFC set to  0.000000
12/9/2010	1:52:24 PM	PHl3 MFC set to  0.000000
12/9/2010	1:52:24 PM	SiCl4 MFC set to  0.000000
12/9/2010	1:52:24 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	1:52:24 PM	Tube furnace set to 0
12/9/2010	2:12:24 PM	Helium valve closed
12/9/2010	2:12:24 PM	H2 valve closed
12/9/2010	2:12:24 PM	BCl3 valve closed
12/9/2010	2:12:24 PM	PH3 valve closed
12/9/2010	2:12:24 PM	SiCl4 pre valve closed
12/9/2010	2:12:24 PM	SiCl4 post valve closed
12/9/2010	2:12:24 PM	Main Vac valve closed
12/9/2010	2:12:24 PM	Bypass valve closed
12/9/2010	2:12:24 PM	Bubbler valve closed
12/9/2010	2:12:24 PM	Helium MFC set to  0.000000
12/9/2010	2:12:24 PM	H2 MFC set to  0.000000
12/9/2010	2:12:24 PM	BCl3 MFC set to  0.000000
12/9/2010	2:12:24 PM	PHl3 MFC set to  0.000000
12/9/2010	2:12:24 PM	SiCl4 MFC set to  0.000000
12/9/2010	2:12:24 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	2:12:24 PM	Tube furnace set to 0
12/9/2010	2:12:25 PM	Run finished at 2:12 PM
12/9/2010	2:34:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/9/2010	2:34:49 PM	Recipe started at 2:34 PM
12/9/2010	2:34:49 PM	Helium valve closed
12/9/2010	2:34:49 PM	H2 valve closed
12/9/2010	2:34:49 PM	BCl3 valve closed
12/9/2010	2:34:49 PM	PH3 valve closed
12/9/2010	2:34:49 PM	SiCl4 pre valve closed
12/9/2010	2:34:49 PM	SiCl4 post valve closed
12/9/2010	2:34:49 PM	Main Vac valve closed
12/9/2010	2:34:49 PM	Bubbler valve closed
12/9/2010	2:34:49 PM	Bypass valve opened
12/9/2010	2:34:49 PM	Helium MFC set to  0.000000
12/9/2010	2:34:49 PM	H2 MFC set to  0.000000
12/9/2010	2:34:49 PM	BCl3 MFC set to  0.000000
12/9/2010	2:34:49 PM	PHl3 MFC set to  0.000000
12/9/2010	2:34:49 PM	SiCl4 MFC set to  0.000000
12/9/2010	2:34:49 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	2:34:49 PM	Tube furnace set to 0
12/9/2010	2:35:46 PM	Helium valve closed
12/9/2010	2:35:46 PM	H2 valve closed
12/9/2010	2:35:46 PM	BCl3 valve closed
12/9/2010	2:35:46 PM	PH3 valve closed
12/9/2010	2:35:46 PM	SiCl4 pre valve closed
12/9/2010	2:35:46 PM	SiCl4 post valve closed
12/9/2010	2:35:46 PM	Bubbler valve closed
12/9/2010	2:35:46 PM	Main Vac valve opened
12/9/2010	2:35:46 PM	Bypass valve opened
12/9/2010	2:35:46 PM	Helium MFC set to  0.000000
12/9/2010	2:35:46 PM	H2 MFC set to  0.000000
12/9/2010	2:35:46 PM	BCl3 MFC set to  0.000000
12/9/2010	2:35:46 PM	PHl3 MFC set to  0.000000
12/9/2010	2:35:46 PM	SiCl4 MFC set to  0.000000
12/9/2010	2:35:46 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	2:35:47 PM	Tube furnace set to 0
12/9/2010	2:35:47 PM	Run finished at 2:35 PM
12/9/2010	2:35:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/9/2010	2:37:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/9/2010	2:37:21 PM	Recipe started at 2:37 PM
12/9/2010	2:37:21 PM	Helium valve closed
12/9/2010	2:37:21 PM	H2 valve closed
12/9/2010	2:37:21 PM	BCl3 valve closed
12/9/2010	2:37:21 PM	PH3 valve closed
12/9/2010	2:37:21 PM	SiCl4 pre valve closed
12/9/2010	2:37:21 PM	SiCl4 post valve closed
12/9/2010	2:37:21 PM	Main Vac valve closed
12/9/2010	2:37:21 PM	Bubbler valve closed
12/9/2010	2:37:21 PM	Bypass valve opened
12/9/2010	2:37:21 PM	Helium MFC set to  0.000000
12/9/2010	2:37:21 PM	H2 MFC set to  0.000000
12/9/2010	2:37:21 PM	BCl3 MFC set to  0.000000
12/9/2010	2:37:21 PM	PHl3 MFC set to  0.000000
12/9/2010	2:37:21 PM	SiCl4 MFC set to  0.000000
12/9/2010	2:37:21 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	2:37:21 PM	Tube furnace set to 0
12/9/2010	2:37:21 PM	Helium valve closed
12/9/2010	2:37:21 PM	H2 valve closed
12/9/2010	2:37:21 PM	BCl3 valve closed
12/9/2010	2:37:21 PM	PH3 valve closed
12/9/2010	2:37:21 PM	SiCl4 pre valve closed
12/9/2010	2:37:21 PM	SiCl4 post valve closed
12/9/2010	2:37:21 PM	Bubbler valve closed
12/9/2010	2:37:21 PM	Main Vac valve opened
12/9/2010	2:37:21 PM	Bypass valve opened
12/9/2010	2:37:21 PM	Helium MFC set to  0.000000
12/9/2010	2:37:21 PM	H2 MFC set to  0.000000
12/9/2010	2:37:21 PM	BCl3 MFC set to  0.000000
12/9/2010	2:37:21 PM	PHl3 MFC set to  0.000000
12/9/2010	2:37:21 PM	SiCl4 MFC set to  0.000000
12/9/2010	2:37:21 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	2:37:21 PM	Tube furnace set to 0
12/9/2010	2:38:21 PM	H2 valve closed
12/9/2010	2:38:21 PM	BCl3 valve closed
12/9/2010	2:38:21 PM	PH3 valve closed
12/9/2010	2:38:21 PM	SiCl4 pre valve closed
12/9/2010	2:38:21 PM	SiCl4 post valve closed
12/9/2010	2:38:21 PM	Bubbler valve closed
12/9/2010	2:38:21 PM	Helium valve opened
12/9/2010	2:38:21 PM	Main Vac valve opened
12/9/2010	2:38:21 PM	Bypass valve opened
12/9/2010	2:38:21 PM	Helium MFC set to  100.000000
12/9/2010	2:38:21 PM	H2 MFC set to  0.000000
12/9/2010	2:38:21 PM	BCl3 MFC set to  0.000000
12/9/2010	2:38:21 PM	PHl3 MFC set to  0.000000
12/9/2010	2:38:21 PM	SiCl4 MFC set to  0.000000
12/9/2010	2:38:21 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	2:38:21 PM	Tube furnace set to 0
12/9/2010	2:39:22 PM	Helium valve closed
12/9/2010	2:39:22 PM	H2 valve closed
12/9/2010	2:39:22 PM	BCl3 valve closed
12/9/2010	2:39:22 PM	PH3 valve closed
12/9/2010	2:39:22 PM	SiCl4 pre valve closed
12/9/2010	2:39:22 PM	SiCl4 post valve closed
12/9/2010	2:39:22 PM	Bubbler valve closed
12/9/2010	2:39:22 PM	Main Vac valve opened
12/9/2010	2:39:22 PM	Bypass valve opened
12/9/2010	2:39:22 PM	Helium MFC set to  0.000000
12/9/2010	2:39:22 PM	H2 MFC set to  0.000000
12/9/2010	2:39:22 PM	BCl3 MFC set to  0.000000
12/9/2010	2:39:22 PM	PHl3 MFC set to  0.000000
12/9/2010	2:39:22 PM	SiCl4 MFC set to  0.000000
12/9/2010	2:39:22 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	2:39:22 PM	Tube furnace set to 0
12/9/2010	2:40:22 PM	H2 valve closed
12/9/2010	2:40:22 PM	BCl3 valve closed
12/9/2010	2:40:22 PM	PH3 valve closed
12/9/2010	2:40:22 PM	SiCl4 pre valve closed
12/9/2010	2:40:22 PM	SiCl4 post valve closed
12/9/2010	2:40:22 PM	Bubbler valve closed
12/9/2010	2:40:22 PM	Helium valve opened
12/9/2010	2:40:22 PM	Main Vac valve opened
12/9/2010	2:40:22 PM	Bypass valve opened
12/9/2010	2:40:22 PM	Helium MFC set to  100.000000
12/9/2010	2:40:22 PM	H2 MFC set to  0.000000
12/9/2010	2:40:22 PM	BCl3 MFC set to  0.000000
12/9/2010	2:40:22 PM	PHl3 MFC set to  0.000000
12/9/2010	2:40:22 PM	SiCl4 MFC set to  0.000000
12/9/2010	2:40:22 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	2:40:22 PM	Tube furnace set to 0
12/9/2010	2:41:22 PM	Helium valve closed
12/9/2010	2:41:22 PM	H2 valve closed
12/9/2010	2:41:22 PM	BCl3 valve closed
12/9/2010	2:41:22 PM	PH3 valve closed
12/9/2010	2:41:22 PM	SiCl4 pre valve closed
12/9/2010	2:41:22 PM	SiCl4 post valve closed
12/9/2010	2:41:22 PM	Bubbler valve closed
12/9/2010	2:41:22 PM	Main Vac valve opened
12/9/2010	2:41:22 PM	Bypass valve opened
12/9/2010	2:41:22 PM	Helium MFC set to  0.000000
12/9/2010	2:41:22 PM	H2 MFC set to  0.000000
12/9/2010	2:41:22 PM	BCl3 MFC set to  0.000000
12/9/2010	2:41:22 PM	PHl3 MFC set to  0.000000
12/9/2010	2:41:22 PM	SiCl4 MFC set to  0.000000
12/9/2010	2:41:22 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	2:41:22 PM	Tube furnace set to 0
12/9/2010	2:42:22 PM	H2 valve closed
12/9/2010	2:42:22 PM	BCl3 valve closed
12/9/2010	2:42:22 PM	PH3 valve closed
12/9/2010	2:42:22 PM	SiCl4 pre valve closed
12/9/2010	2:42:22 PM	SiCl4 post valve closed
12/9/2010	2:42:22 PM	Bubbler valve closed
12/9/2010	2:42:22 PM	Helium valve opened
12/9/2010	2:42:22 PM	Main Vac valve opened
12/9/2010	2:42:22 PM	Bypass valve opened
12/9/2010	2:42:22 PM	Helium MFC set to  100.000000
12/9/2010	2:42:22 PM	H2 MFC set to  0.000000
12/9/2010	2:42:22 PM	BCl3 MFC set to  0.000000
12/9/2010	2:42:22 PM	PHl3 MFC set to  0.000000
12/9/2010	2:42:22 PM	SiCl4 MFC set to  0.000000
12/9/2010	2:42:22 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	2:42:22 PM	Tube furnace set to 0
12/9/2010	2:43:22 PM	Helium valve closed
12/9/2010	2:43:22 PM	H2 valve closed
12/9/2010	2:43:22 PM	BCl3 valve closed
12/9/2010	2:43:22 PM	PH3 valve closed
12/9/2010	2:43:22 PM	SiCl4 pre valve closed
12/9/2010	2:43:22 PM	SiCl4 post valve closed
12/9/2010	2:43:22 PM	Bubbler valve closed
12/9/2010	2:43:22 PM	Main Vac valve opened
12/9/2010	2:43:22 PM	Bypass valve opened
12/9/2010	2:43:22 PM	Helium MFC set to  0.000000
12/9/2010	2:43:22 PM	H2 MFC set to  0.000000
12/9/2010	2:43:22 PM	BCl3 MFC set to  0.000000
12/9/2010	2:43:22 PM	PHl3 MFC set to  0.000000
12/9/2010	2:43:22 PM	SiCl4 MFC set to  0.000000
12/9/2010	2:43:22 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	2:43:22 PM	Tube furnace set to 0
12/9/2010	2:44:22 PM	H2 valve closed
12/9/2010	2:44:22 PM	BCl3 valve closed
12/9/2010	2:44:22 PM	PH3 valve closed
12/9/2010	2:44:22 PM	SiCl4 pre valve closed
12/9/2010	2:44:22 PM	SiCl4 post valve closed
12/9/2010	2:44:23 PM	Bubbler valve closed
12/9/2010	2:44:23 PM	Helium valve opened
12/9/2010	2:44:23 PM	Main Vac valve opened
12/9/2010	2:44:23 PM	Bypass valve opened
12/9/2010	2:44:23 PM	Helium MFC set to  100.000000
12/9/2010	2:44:23 PM	H2 MFC set to  0.000000
12/9/2010	2:44:23 PM	BCl3 MFC set to  0.000000
12/9/2010	2:44:23 PM	PHl3 MFC set to  0.000000
12/9/2010	2:44:23 PM	SiCl4 MFC set to  0.000000
12/9/2010	2:44:23 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	2:44:23 PM	Tube furnace set to 0
12/9/2010	2:45:23 PM	Helium valve closed
12/9/2010	2:45:23 PM	H2 valve closed
12/9/2010	2:45:23 PM	BCl3 valve closed
12/9/2010	2:45:23 PM	PH3 valve closed
12/9/2010	2:45:23 PM	SiCl4 pre valve closed
12/9/2010	2:45:23 PM	SiCl4 post valve closed
12/9/2010	2:45:23 PM	Bubbler valve closed
12/9/2010	2:45:23 PM	Main Vac valve opened
12/9/2010	2:45:23 PM	Bypass valve opened
12/9/2010	2:45:23 PM	Helium MFC set to  0.000000
12/9/2010	2:45:23 PM	H2 MFC set to  0.000000
12/9/2010	2:45:23 PM	BCl3 MFC set to  0.000000
12/9/2010	2:45:23 PM	PHl3 MFC set to  0.000000
12/9/2010	2:45:23 PM	SiCl4 MFC set to  0.000000
12/9/2010	2:45:23 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	2:45:23 PM	Tube furnace set to 0
12/9/2010	2:46:23 PM	H2 valve closed
12/9/2010	2:46:23 PM	BCl3 valve closed
12/9/2010	2:46:23 PM	PH3 valve closed
12/9/2010	2:46:23 PM	SiCl4 pre valve closed
12/9/2010	2:46:23 PM	SiCl4 post valve closed
12/9/2010	2:46:23 PM	Bubbler valve closed
12/9/2010	2:46:23 PM	Helium valve opened
12/9/2010	2:46:23 PM	Main Vac valve opened
12/9/2010	2:46:23 PM	Bypass valve opened
12/9/2010	2:46:23 PM	Helium MFC set to  100.000000
12/9/2010	2:46:23 PM	H2 MFC set to  0.000000
12/9/2010	2:46:23 PM	BCl3 MFC set to  0.000000
12/9/2010	2:46:23 PM	PHl3 MFC set to  0.000000
12/9/2010	2:46:23 PM	SiCl4 MFC set to  0.000000
12/9/2010	2:46:23 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	2:46:23 PM	Tube furnace set to 0
12/9/2010	2:47:23 PM	Helium valve closed
12/9/2010	2:47:23 PM	H2 valve closed
12/9/2010	2:47:23 PM	BCl3 valve closed
12/9/2010	2:47:23 PM	PH3 valve closed
12/9/2010	2:47:23 PM	SiCl4 pre valve closed
12/9/2010	2:47:23 PM	SiCl4 post valve closed
12/9/2010	2:47:23 PM	Bubbler valve closed
12/9/2010	2:47:23 PM	Main Vac valve opened
12/9/2010	2:47:23 PM	Bypass valve opened
12/9/2010	2:47:23 PM	Helium MFC set to  0.000000
12/9/2010	2:47:23 PM	H2 MFC set to  0.000000
12/9/2010	2:47:23 PM	BCl3 MFC set to  0.000000
12/9/2010	2:47:23 PM	PHl3 MFC set to  0.000000
12/9/2010	2:47:23 PM	SiCl4 MFC set to  0.000000
12/9/2010	2:47:23 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	2:47:23 PM	Tube furnace set to 0
12/9/2010	2:48:23 PM	H2 valve closed
12/9/2010	2:48:23 PM	BCl3 valve closed
12/9/2010	2:48:23 PM	PH3 valve closed
12/9/2010	2:48:23 PM	SiCl4 pre valve closed
12/9/2010	2:48:23 PM	SiCl4 post valve closed
12/9/2010	2:48:23 PM	Bubbler valve closed
12/9/2010	2:48:23 PM	Helium valve opened
12/9/2010	2:48:23 PM	Main Vac valve opened
12/9/2010	2:48:23 PM	Bypass valve opened
12/9/2010	2:48:23 PM	Helium MFC set to  100.000000
12/9/2010	2:48:23 PM	H2 MFC set to  0.000000
12/9/2010	2:48:23 PM	BCl3 MFC set to  0.000000
12/9/2010	2:48:23 PM	PHl3 MFC set to  0.000000
12/9/2010	2:48:23 PM	SiCl4 MFC set to  0.000000
12/9/2010	2:48:23 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	2:48:23 PM	Tube furnace set to 0
12/9/2010	2:49:23 PM	Helium valve closed
12/9/2010	2:49:23 PM	H2 valve closed
12/9/2010	2:49:23 PM	BCl3 valve closed
12/9/2010	2:49:23 PM	PH3 valve closed
12/9/2010	2:49:23 PM	SiCl4 pre valve closed
12/9/2010	2:49:23 PM	SiCl4 post valve closed
12/9/2010	2:49:23 PM	Bubbler valve closed
12/9/2010	2:49:23 PM	Main Vac valve opened
12/9/2010	2:49:23 PM	Bypass valve opened
12/9/2010	2:49:23 PM	Helium MFC set to  0.000000
12/9/2010	2:49:23 PM	H2 MFC set to  0.000000
12/9/2010	2:49:23 PM	BCl3 MFC set to  0.000000
12/9/2010	2:49:23 PM	PHl3 MFC set to  0.000000
12/9/2010	2:49:23 PM	SiCl4 MFC set to  0.000000
12/9/2010	2:49:23 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	2:49:24 PM	Tube furnace set to 0
12/9/2010	2:50:24 PM	H2 valve closed
12/9/2010	2:50:24 PM	BCl3 valve closed
12/9/2010	2:50:24 PM	PH3 valve closed
12/9/2010	2:50:24 PM	SiCl4 pre valve closed
12/9/2010	2:50:24 PM	SiCl4 post valve closed
12/9/2010	2:50:24 PM	Bubbler valve closed
12/9/2010	2:50:24 PM	Helium valve opened
12/9/2010	2:50:24 PM	Main Vac valve opened
12/9/2010	2:50:24 PM	Bypass valve opened
12/9/2010	2:50:24 PM	Helium MFC set to  100.000000
12/9/2010	2:50:24 PM	H2 MFC set to  0.000000
12/9/2010	2:50:24 PM	BCl3 MFC set to  0.000000
12/9/2010	2:50:24 PM	PHl3 MFC set to  0.000000
12/9/2010	2:50:24 PM	SiCl4 MFC set to  0.000000
12/9/2010	2:50:24 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	2:50:24 PM	Tube furnace set to 0
12/9/2010	2:51:24 PM	Helium valve closed
12/9/2010	2:51:24 PM	H2 valve closed
12/9/2010	2:51:24 PM	BCl3 valve closed
12/9/2010	2:51:24 PM	PH3 valve closed
12/9/2010	2:51:24 PM	SiCl4 pre valve closed
12/9/2010	2:51:24 PM	SiCl4 post valve closed
12/9/2010	2:51:24 PM	Bubbler valve closed
12/9/2010	2:51:24 PM	Main Vac valve opened
12/9/2010	2:51:24 PM	Bypass valve opened
12/9/2010	2:51:24 PM	Helium MFC set to  0.000000
12/9/2010	2:51:24 PM	H2 MFC set to  0.000000
12/9/2010	2:51:24 PM	BCl3 MFC set to  0.000000
12/9/2010	2:51:24 PM	PHl3 MFC set to  0.000000
12/9/2010	2:51:24 PM	SiCl4 MFC set to  0.000000
12/9/2010	2:51:24 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	2:51:24 PM	Tube furnace set to 0
12/9/2010	2:52:24 PM	H2 valve closed
12/9/2010	2:52:24 PM	BCl3 valve closed
12/9/2010	2:52:24 PM	PH3 valve closed
12/9/2010	2:52:24 PM	SiCl4 pre valve closed
12/9/2010	2:52:24 PM	SiCl4 post valve closed
12/9/2010	2:52:24 PM	Bubbler valve closed
12/9/2010	2:52:24 PM	Helium valve opened
12/9/2010	2:52:24 PM	Main Vac valve opened
12/9/2010	2:52:24 PM	Bypass valve opened
12/9/2010	2:52:24 PM	Helium MFC set to  100.000000
12/9/2010	2:52:24 PM	H2 MFC set to  0.000000
12/9/2010	2:52:24 PM	BCl3 MFC set to  0.000000
12/9/2010	2:52:24 PM	PHl3 MFC set to  0.000000
12/9/2010	2:52:24 PM	SiCl4 MFC set to  0.000000
12/9/2010	2:52:24 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	2:52:24 PM	Tube furnace set to 0
12/9/2010	2:53:24 PM	Helium valve closed
12/9/2010	2:53:24 PM	H2 valve closed
12/9/2010	2:53:24 PM	BCl3 valve closed
12/9/2010	2:53:24 PM	PH3 valve closed
12/9/2010	2:53:24 PM	SiCl4 pre valve closed
12/9/2010	2:53:24 PM	SiCl4 post valve closed
12/9/2010	2:53:24 PM	Bubbler valve closed
12/9/2010	2:53:24 PM	Main Vac valve opened
12/9/2010	2:53:24 PM	Bypass valve opened
12/9/2010	2:53:24 PM	Helium MFC set to  0.000000
12/9/2010	2:53:24 PM	H2 MFC set to  0.000000
12/9/2010	2:53:24 PM	BCl3 MFC set to  0.000000
12/9/2010	2:53:24 PM	PHl3 MFC set to  0.000000
12/9/2010	2:53:24 PM	SiCl4 MFC set to  0.000000
12/9/2010	2:53:24 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	2:53:24 PM	Tube furnace set to 0
12/9/2010	2:54:24 PM	H2 valve closed
12/9/2010	2:54:24 PM	BCl3 valve closed
12/9/2010	2:54:24 PM	PH3 valve closed
12/9/2010	2:54:24 PM	SiCl4 pre valve closed
12/9/2010	2:54:24 PM	SiCl4 post valve closed
12/9/2010	2:54:24 PM	Bubbler valve closed
12/9/2010	2:54:24 PM	Helium valve opened
12/9/2010	2:54:24 PM	Main Vac valve opened
12/9/2010	2:54:24 PM	Bypass valve opened
12/9/2010	2:54:24 PM	Helium MFC set to  100.000000
12/9/2010	2:54:24 PM	H2 MFC set to  0.000000
12/9/2010	2:54:24 PM	BCl3 MFC set to  0.000000
12/9/2010	2:54:24 PM	PHl3 MFC set to  0.000000
12/9/2010	2:54:24 PM	SiCl4 MFC set to  0.000000
12/9/2010	2:54:24 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	2:54:25 PM	Tube furnace set to 0
12/9/2010	2:55:25 PM	Helium valve closed
12/9/2010	2:55:25 PM	H2 valve closed
12/9/2010	2:55:25 PM	BCl3 valve closed
12/9/2010	2:55:25 PM	PH3 valve closed
12/9/2010	2:55:25 PM	SiCl4 pre valve closed
12/9/2010	2:55:25 PM	SiCl4 post valve closed
12/9/2010	2:55:25 PM	Bubbler valve closed
12/9/2010	2:55:25 PM	Main Vac valve opened
12/9/2010	2:55:25 PM	Bypass valve opened
12/9/2010	2:55:25 PM	Helium MFC set to  0.000000
12/9/2010	2:55:25 PM	H2 MFC set to  0.000000
12/9/2010	2:55:25 PM	BCl3 MFC set to  0.000000
12/9/2010	2:55:25 PM	PHl3 MFC set to  0.000000
12/9/2010	2:55:25 PM	SiCl4 MFC set to  0.000000
12/9/2010	2:55:25 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	2:55:25 PM	Tube furnace set to 0
12/9/2010	2:56:25 PM	H2 valve closed
12/9/2010	2:56:25 PM	BCl3 valve closed
12/9/2010	2:56:25 PM	PH3 valve closed
12/9/2010	2:56:25 PM	SiCl4 pre valve closed
12/9/2010	2:56:25 PM	SiCl4 post valve closed
12/9/2010	2:56:25 PM	Bubbler valve closed
12/9/2010	2:56:25 PM	Helium valve opened
12/9/2010	2:56:25 PM	Main Vac valve opened
12/9/2010	2:56:25 PM	Bypass valve opened
12/9/2010	2:56:25 PM	Helium MFC set to  100.000000
12/9/2010	2:56:25 PM	H2 MFC set to  0.000000
12/9/2010	2:56:25 PM	BCl3 MFC set to  0.000000
12/9/2010	2:56:25 PM	PHl3 MFC set to  0.000000
12/9/2010	2:56:25 PM	SiCl4 MFC set to  0.000000
12/9/2010	2:56:25 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	2:56:25 PM	Tube furnace set to 0
12/9/2010	2:57:25 PM	Helium valve closed
12/9/2010	2:57:25 PM	H2 valve closed
12/9/2010	2:57:25 PM	BCl3 valve closed
12/9/2010	2:57:25 PM	PH3 valve closed
12/9/2010	2:57:25 PM	SiCl4 pre valve closed
12/9/2010	2:57:25 PM	SiCl4 post valve closed
12/9/2010	2:57:25 PM	Bubbler valve closed
12/9/2010	2:57:25 PM	Main Vac valve opened
12/9/2010	2:57:25 PM	Bypass valve opened
12/9/2010	2:57:25 PM	Helium MFC set to  0.000000
12/9/2010	2:57:25 PM	H2 MFC set to  0.000000
12/9/2010	2:57:25 PM	BCl3 MFC set to  0.000000
12/9/2010	2:57:25 PM	PHl3 MFC set to  0.000000
12/9/2010	2:57:25 PM	SiCl4 MFC set to  0.000000
12/9/2010	2:57:25 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	2:57:25 PM	Tube furnace set to 0
12/9/2010	2:57:26 PM	Run finished at 2:57 PM
12/9/2010	2:57:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/9/2010	3:05:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/9/2010	3:05:13 PM	Recipe started at 3:05 PM
12/9/2010	3:05:13 PM	Helium valve closed
12/9/2010	3:05:13 PM	H2 valve closed
12/9/2010	3:05:13 PM	BCl3 valve closed
12/9/2010	3:05:13 PM	PH3 valve closed
12/9/2010	3:05:13 PM	SiCl4 pre valve closed
12/9/2010	3:05:13 PM	SiCl4 post valve closed
12/9/2010	3:05:13 PM	Main Vac valve closed
12/9/2010	3:05:13 PM	Bubbler valve closed
12/9/2010	3:05:13 PM	Bypass valve opened
12/9/2010	3:05:13 PM	Helium MFC set to  0.000000
12/9/2010	3:05:13 PM	H2 MFC set to  0.000000
12/9/2010	3:05:13 PM	BCl3 MFC set to  0.000000
12/9/2010	3:05:13 PM	PHl3 MFC set to  0.000000
12/9/2010	3:05:13 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:05:13 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:05:13 PM	Tube furnace set to 0
12/9/2010	3:05:13 PM	Helium valve closed
12/9/2010	3:05:13 PM	H2 valve closed
12/9/2010	3:05:13 PM	BCl3 valve closed
12/9/2010	3:05:13 PM	PH3 valve closed
12/9/2010	3:05:13 PM	SiCl4 pre valve closed
12/9/2010	3:05:13 PM	SiCl4 post valve closed
12/9/2010	3:05:13 PM	Bubbler valve closed
12/9/2010	3:05:13 PM	Main Vac valve opened
12/9/2010	3:05:13 PM	Bypass valve opened
12/9/2010	3:05:13 PM	Helium MFC set to  0.000000
12/9/2010	3:05:13 PM	H2 MFC set to  0.000000
12/9/2010	3:05:13 PM	BCl3 MFC set to  0.000000
12/9/2010	3:05:13 PM	PHl3 MFC set to  0.000000
12/9/2010	3:05:13 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:05:13 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:05:13 PM	Tube furnace set to 0
12/9/2010	3:06:13 PM	H2 valve closed
12/9/2010	3:06:13 PM	BCl3 valve closed
12/9/2010	3:06:13 PM	PH3 valve closed
12/9/2010	3:06:13 PM	SiCl4 pre valve closed
12/9/2010	3:06:13 PM	SiCl4 post valve closed
12/9/2010	3:06:13 PM	Bubbler valve closed
12/9/2010	3:06:13 PM	Helium valve opened
12/9/2010	3:06:13 PM	Main Vac valve opened
12/9/2010	3:06:13 PM	Bypass valve opened
12/9/2010	3:06:13 PM	Helium MFC set to  100.000000
12/9/2010	3:06:13 PM	H2 MFC set to  0.000000
12/9/2010	3:06:13 PM	BCl3 MFC set to  0.000000
12/9/2010	3:06:13 PM	PHl3 MFC set to  0.000000
12/9/2010	3:06:13 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:06:13 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:06:14 PM	Tube furnace set to 0
12/9/2010	3:07:14 PM	Helium valve closed
12/9/2010	3:07:14 PM	H2 valve closed
12/9/2010	3:07:14 PM	BCl3 valve closed
12/9/2010	3:07:14 PM	PH3 valve closed
12/9/2010	3:07:14 PM	SiCl4 pre valve closed
12/9/2010	3:07:14 PM	SiCl4 post valve closed
12/9/2010	3:07:14 PM	Bubbler valve closed
12/9/2010	3:07:14 PM	Main Vac valve opened
12/9/2010	3:07:14 PM	Bypass valve opened
12/9/2010	3:07:14 PM	Helium MFC set to  0.000000
12/9/2010	3:07:14 PM	H2 MFC set to  0.000000
12/9/2010	3:07:14 PM	BCl3 MFC set to  0.000000
12/9/2010	3:07:14 PM	PHl3 MFC set to  0.000000
12/9/2010	3:07:14 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:07:14 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:07:14 PM	Tube furnace set to 0
12/9/2010	3:08:14 PM	H2 valve closed
12/9/2010	3:08:14 PM	BCl3 valve closed
12/9/2010	3:08:14 PM	PH3 valve closed
12/9/2010	3:08:14 PM	SiCl4 pre valve closed
12/9/2010	3:08:14 PM	SiCl4 post valve closed
12/9/2010	3:08:14 PM	Bubbler valve closed
12/9/2010	3:08:14 PM	Helium valve opened
12/9/2010	3:08:14 PM	Main Vac valve opened
12/9/2010	3:08:14 PM	Bypass valve opened
12/9/2010	3:08:14 PM	Helium MFC set to  100.000000
12/9/2010	3:08:14 PM	H2 MFC set to  0.000000
12/9/2010	3:08:14 PM	BCl3 MFC set to  0.000000
12/9/2010	3:08:14 PM	PHl3 MFC set to  0.000000
12/9/2010	3:08:14 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:08:14 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:08:14 PM	Tube furnace set to 0
12/9/2010	3:09:14 PM	Helium valve closed
12/9/2010	3:09:14 PM	H2 valve closed
12/9/2010	3:09:14 PM	BCl3 valve closed
12/9/2010	3:09:14 PM	PH3 valve closed
12/9/2010	3:09:14 PM	SiCl4 pre valve closed
12/9/2010	3:09:14 PM	SiCl4 post valve closed
12/9/2010	3:09:14 PM	Bubbler valve closed
12/9/2010	3:09:14 PM	Main Vac valve opened
12/9/2010	3:09:14 PM	Bypass valve opened
12/9/2010	3:09:14 PM	Helium MFC set to  0.000000
12/9/2010	3:09:14 PM	H2 MFC set to  0.000000
12/9/2010	3:09:14 PM	BCl3 MFC set to  0.000000
12/9/2010	3:09:14 PM	PHl3 MFC set to  0.000000
12/9/2010	3:09:14 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:09:14 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:09:14 PM	Tube furnace set to 0
12/9/2010	3:10:14 PM	H2 valve closed
12/9/2010	3:10:14 PM	BCl3 valve closed
12/9/2010	3:10:14 PM	PH3 valve closed
12/9/2010	3:10:14 PM	SiCl4 pre valve closed
12/9/2010	3:10:14 PM	SiCl4 post valve closed
12/9/2010	3:10:14 PM	Bubbler valve closed
12/9/2010	3:10:14 PM	Helium valve opened
12/9/2010	3:10:14 PM	Main Vac valve opened
12/9/2010	3:10:14 PM	Bypass valve opened
12/9/2010	3:10:14 PM	Helium MFC set to  100.000000
12/9/2010	3:10:14 PM	H2 MFC set to  0.000000
12/9/2010	3:10:14 PM	BCl3 MFC set to  0.000000
12/9/2010	3:10:14 PM	PHl3 MFC set to  0.000000
12/9/2010	3:10:14 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:10:14 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:10:14 PM	Tube furnace set to 0
12/9/2010	3:11:14 PM	Helium valve closed
12/9/2010	3:11:14 PM	H2 valve closed
12/9/2010	3:11:14 PM	BCl3 valve closed
12/9/2010	3:11:14 PM	PH3 valve closed
12/9/2010	3:11:14 PM	SiCl4 pre valve closed
12/9/2010	3:11:14 PM	SiCl4 post valve closed
12/9/2010	3:11:14 PM	Bubbler valve closed
12/9/2010	3:11:14 PM	Main Vac valve opened
12/9/2010	3:11:14 PM	Bypass valve opened
12/9/2010	3:11:14 PM	Helium MFC set to  0.000000
12/9/2010	3:11:14 PM	H2 MFC set to  0.000000
12/9/2010	3:11:14 PM	BCl3 MFC set to  0.000000
12/9/2010	3:11:14 PM	PHl3 MFC set to  0.000000
12/9/2010	3:11:14 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:11:14 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:11:14 PM	Tube furnace set to 0
12/9/2010	3:12:15 PM	H2 valve closed
12/9/2010	3:12:15 PM	BCl3 valve closed
12/9/2010	3:12:15 PM	PH3 valve closed
12/9/2010	3:12:15 PM	SiCl4 pre valve closed
12/9/2010	3:12:15 PM	SiCl4 post valve closed
12/9/2010	3:12:15 PM	Bubbler valve closed
12/9/2010	3:12:15 PM	Helium valve opened
12/9/2010	3:12:15 PM	Main Vac valve opened
12/9/2010	3:12:15 PM	Bypass valve opened
12/9/2010	3:12:15 PM	Helium MFC set to  100.000000
12/9/2010	3:12:15 PM	H2 MFC set to  0.000000
12/9/2010	3:12:15 PM	BCl3 MFC set to  0.000000
12/9/2010	3:12:15 PM	PHl3 MFC set to  0.000000
12/9/2010	3:12:15 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:12:15 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:12:15 PM	Tube furnace set to 0
12/9/2010	3:13:15 PM	Helium valve closed
12/9/2010	3:13:15 PM	H2 valve closed
12/9/2010	3:13:15 PM	BCl3 valve closed
12/9/2010	3:13:15 PM	PH3 valve closed
12/9/2010	3:13:15 PM	SiCl4 pre valve closed
12/9/2010	3:13:15 PM	SiCl4 post valve closed
12/9/2010	3:13:15 PM	Bubbler valve closed
12/9/2010	3:13:15 PM	Main Vac valve opened
12/9/2010	3:13:15 PM	Bypass valve opened
12/9/2010	3:13:15 PM	Helium MFC set to  0.000000
12/9/2010	3:13:15 PM	H2 MFC set to  0.000000
12/9/2010	3:13:15 PM	BCl3 MFC set to  0.000000
12/9/2010	3:13:15 PM	PHl3 MFC set to  0.000000
12/9/2010	3:13:15 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:13:15 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:13:15 PM	Tube furnace set to 0
12/9/2010	3:14:15 PM	H2 valve closed
12/9/2010	3:14:15 PM	BCl3 valve closed
12/9/2010	3:14:15 PM	PH3 valve closed
12/9/2010	3:14:15 PM	SiCl4 pre valve closed
12/9/2010	3:14:15 PM	SiCl4 post valve closed
12/9/2010	3:14:15 PM	Bubbler valve closed
12/9/2010	3:14:15 PM	Helium valve opened
12/9/2010	3:14:15 PM	Main Vac valve opened
12/9/2010	3:14:15 PM	Bypass valve opened
12/9/2010	3:14:15 PM	Helium MFC set to  100.000000
12/9/2010	3:14:15 PM	H2 MFC set to  0.000000
12/9/2010	3:14:15 PM	BCl3 MFC set to  0.000000
12/9/2010	3:14:15 PM	PHl3 MFC set to  0.000000
12/9/2010	3:14:15 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:14:15 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:14:15 PM	Tube furnace set to 0
12/9/2010	3:15:15 PM	Helium valve closed
12/9/2010	3:15:15 PM	H2 valve closed
12/9/2010	3:15:15 PM	BCl3 valve closed
12/9/2010	3:15:15 PM	PH3 valve closed
12/9/2010	3:15:15 PM	SiCl4 pre valve closed
12/9/2010	3:15:15 PM	SiCl4 post valve closed
12/9/2010	3:15:15 PM	Bubbler valve closed
12/9/2010	3:15:15 PM	Main Vac valve opened
12/9/2010	3:15:15 PM	Bypass valve opened
12/9/2010	3:15:15 PM	Helium MFC set to  0.000000
12/9/2010	3:15:15 PM	H2 MFC set to  0.000000
12/9/2010	3:15:15 PM	BCl3 MFC set to  0.000000
12/9/2010	3:15:15 PM	PHl3 MFC set to  0.000000
12/9/2010	3:15:15 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:15:15 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:15:15 PM	Tube furnace set to 0
12/9/2010	3:16:15 PM	H2 valve closed
12/9/2010	3:16:15 PM	BCl3 valve closed
12/9/2010	3:16:15 PM	PH3 valve closed
12/9/2010	3:16:15 PM	SiCl4 pre valve closed
12/9/2010	3:16:15 PM	SiCl4 post valve closed
12/9/2010	3:16:15 PM	Bubbler valve closed
12/9/2010	3:16:15 PM	Helium valve opened
12/9/2010	3:16:15 PM	Main Vac valve opened
12/9/2010	3:16:15 PM	Bypass valve opened
12/9/2010	3:16:15 PM	Helium MFC set to  100.000000
12/9/2010	3:16:15 PM	H2 MFC set to  0.000000
12/9/2010	3:16:15 PM	BCl3 MFC set to  0.000000
12/9/2010	3:16:15 PM	PHl3 MFC set to  0.000000
12/9/2010	3:16:15 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:16:15 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:16:15 PM	Tube furnace set to 0
12/9/2010	3:17:16 PM	Helium valve closed
12/9/2010	3:17:16 PM	H2 valve closed
12/9/2010	3:17:16 PM	BCl3 valve closed
12/9/2010	3:17:16 PM	PH3 valve closed
12/9/2010	3:17:16 PM	SiCl4 pre valve closed
12/9/2010	3:17:16 PM	SiCl4 post valve closed
12/9/2010	3:17:16 PM	Bubbler valve closed
12/9/2010	3:17:16 PM	Main Vac valve opened
12/9/2010	3:17:16 PM	Bypass valve opened
12/9/2010	3:17:16 PM	Helium MFC set to  0.000000
12/9/2010	3:17:16 PM	H2 MFC set to  0.000000
12/9/2010	3:17:16 PM	BCl3 MFC set to  0.000000
12/9/2010	3:17:16 PM	PHl3 MFC set to  0.000000
12/9/2010	3:17:16 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:17:16 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:17:16 PM	Tube furnace set to 0
12/9/2010	3:18:16 PM	H2 valve closed
12/9/2010	3:18:16 PM	BCl3 valve closed
12/9/2010	3:18:16 PM	PH3 valve closed
12/9/2010	3:18:16 PM	SiCl4 pre valve closed
12/9/2010	3:18:16 PM	SiCl4 post valve closed
12/9/2010	3:18:16 PM	Bubbler valve closed
12/9/2010	3:18:16 PM	Helium valve opened
12/9/2010	3:18:16 PM	Main Vac valve opened
12/9/2010	3:18:16 PM	Bypass valve opened
12/9/2010	3:18:16 PM	Helium MFC set to  100.000000
12/9/2010	3:18:16 PM	H2 MFC set to  0.000000
12/9/2010	3:18:16 PM	BCl3 MFC set to  0.000000
12/9/2010	3:18:16 PM	PHl3 MFC set to  0.000000
12/9/2010	3:18:16 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:18:16 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:18:16 PM	Tube furnace set to 0
12/9/2010	3:19:16 PM	Helium valve closed
12/9/2010	3:19:16 PM	H2 valve closed
12/9/2010	3:19:16 PM	BCl3 valve closed
12/9/2010	3:19:16 PM	PH3 valve closed
12/9/2010	3:19:16 PM	SiCl4 pre valve closed
12/9/2010	3:19:16 PM	SiCl4 post valve closed
12/9/2010	3:19:16 PM	Bubbler valve closed
12/9/2010	3:19:16 PM	Main Vac valve opened
12/9/2010	3:19:16 PM	Bypass valve opened
12/9/2010	3:19:16 PM	Helium MFC set to  0.000000
12/9/2010	3:19:16 PM	H2 MFC set to  0.000000
12/9/2010	3:19:16 PM	BCl3 MFC set to  0.000000
12/9/2010	3:19:16 PM	PHl3 MFC set to  0.000000
12/9/2010	3:19:16 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:19:16 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:19:16 PM	Tube furnace set to 0
12/9/2010	3:20:16 PM	H2 valve closed
12/9/2010	3:20:16 PM	BCl3 valve closed
12/9/2010	3:20:16 PM	PH3 valve closed
12/9/2010	3:20:16 PM	SiCl4 pre valve closed
12/9/2010	3:20:16 PM	SiCl4 post valve closed
12/9/2010	3:20:16 PM	Bubbler valve closed
12/9/2010	3:20:16 PM	Helium valve opened
12/9/2010	3:20:16 PM	Main Vac valve opened
12/9/2010	3:20:16 PM	Bypass valve opened
12/9/2010	3:20:16 PM	Helium MFC set to  100.000000
12/9/2010	3:20:16 PM	H2 MFC set to  0.000000
12/9/2010	3:20:16 PM	BCl3 MFC set to  0.000000
12/9/2010	3:20:16 PM	PHl3 MFC set to  0.000000
12/9/2010	3:20:16 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:20:16 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:20:16 PM	Tube furnace set to 0
12/9/2010	3:21:16 PM	Helium valve closed
12/9/2010	3:21:16 PM	H2 valve closed
12/9/2010	3:21:16 PM	BCl3 valve closed
12/9/2010	3:21:16 PM	PH3 valve closed
12/9/2010	3:21:16 PM	SiCl4 pre valve closed
12/9/2010	3:21:16 PM	SiCl4 post valve closed
12/9/2010	3:21:16 PM	Bubbler valve closed
12/9/2010	3:21:16 PM	Main Vac valve opened
12/9/2010	3:21:16 PM	Bypass valve opened
12/9/2010	3:21:16 PM	Helium MFC set to  0.000000
12/9/2010	3:21:16 PM	H2 MFC set to  0.000000
12/9/2010	3:21:16 PM	BCl3 MFC set to  0.000000
12/9/2010	3:21:16 PM	PHl3 MFC set to  0.000000
12/9/2010	3:21:16 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:21:16 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:21:16 PM	Tube furnace set to 0
12/9/2010	3:22:16 PM	H2 valve closed
12/9/2010	3:22:16 PM	BCl3 valve closed
12/9/2010	3:22:16 PM	PH3 valve closed
12/9/2010	3:22:16 PM	SiCl4 pre valve closed
12/9/2010	3:22:16 PM	SiCl4 post valve closed
12/9/2010	3:22:16 PM	Bubbler valve closed
12/9/2010	3:22:17 PM	Helium valve opened
12/9/2010	3:22:17 PM	Main Vac valve opened
12/9/2010	3:22:17 PM	Bypass valve opened
12/9/2010	3:22:17 PM	Helium MFC set to  100.000000
12/9/2010	3:22:17 PM	H2 MFC set to  0.000000
12/9/2010	3:22:17 PM	BCl3 MFC set to  0.000000
12/9/2010	3:22:17 PM	PHl3 MFC set to  0.000000
12/9/2010	3:22:17 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:22:17 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:22:17 PM	Tube furnace set to 0
12/9/2010	3:23:17 PM	Helium valve closed
12/9/2010	3:23:17 PM	H2 valve closed
12/9/2010	3:23:17 PM	BCl3 valve closed
12/9/2010	3:23:17 PM	PH3 valve closed
12/9/2010	3:23:17 PM	SiCl4 pre valve closed
12/9/2010	3:23:17 PM	SiCl4 post valve closed
12/9/2010	3:23:17 PM	Bubbler valve closed
12/9/2010	3:23:17 PM	Main Vac valve opened
12/9/2010	3:23:17 PM	Bypass valve opened
12/9/2010	3:23:17 PM	Helium MFC set to  0.000000
12/9/2010	3:23:17 PM	H2 MFC set to  0.000000
12/9/2010	3:23:17 PM	BCl3 MFC set to  0.000000
12/9/2010	3:23:17 PM	PHl3 MFC set to  0.000000
12/9/2010	3:23:17 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:23:17 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:23:17 PM	Tube furnace set to 0
12/9/2010	3:24:17 PM	H2 valve closed
12/9/2010	3:24:17 PM	BCl3 valve closed
12/9/2010	3:24:17 PM	PH3 valve closed
12/9/2010	3:24:17 PM	SiCl4 pre valve closed
12/9/2010	3:24:17 PM	SiCl4 post valve closed
12/9/2010	3:24:17 PM	Bubbler valve closed
12/9/2010	3:24:17 PM	Helium valve opened
12/9/2010	3:24:17 PM	Main Vac valve opened
12/9/2010	3:24:17 PM	Bypass valve opened
12/9/2010	3:24:17 PM	Helium MFC set to  100.000000
12/9/2010	3:24:17 PM	H2 MFC set to  0.000000
12/9/2010	3:24:17 PM	BCl3 MFC set to  0.000000
12/9/2010	3:24:17 PM	PHl3 MFC set to  0.000000
12/9/2010	3:24:17 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:24:17 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:24:17 PM	Tube furnace set to 0
12/9/2010	3:25:17 PM	Helium valve closed
12/9/2010	3:25:17 PM	H2 valve closed
12/9/2010	3:25:17 PM	BCl3 valve closed
12/9/2010	3:25:17 PM	PH3 valve closed
12/9/2010	3:25:17 PM	SiCl4 pre valve closed
12/9/2010	3:25:17 PM	SiCl4 post valve closed
12/9/2010	3:25:17 PM	Bubbler valve closed
12/9/2010	3:25:17 PM	Main Vac valve opened
12/9/2010	3:25:17 PM	Bypass valve opened
12/9/2010	3:25:17 PM	Helium MFC set to  0.000000
12/9/2010	3:25:17 PM	H2 MFC set to  0.000000
12/9/2010	3:25:17 PM	BCl3 MFC set to  0.000000
12/9/2010	3:25:17 PM	PHl3 MFC set to  0.000000
12/9/2010	3:25:17 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:25:17 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:25:17 PM	Tube furnace set to 0
12/9/2010	3:25:18 PM	Run finished at 3:25 PM
12/9/2010	3:25:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/9/2010	3:30:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/9/2010	3:30:26 PM	Recipe started at 3:30 PM
12/9/2010	3:30:26 PM	Helium valve closed
12/9/2010	3:30:26 PM	H2 valve closed
12/9/2010	3:30:26 PM	BCl3 valve closed
12/9/2010	3:30:26 PM	PH3 valve closed
12/9/2010	3:30:26 PM	SiCl4 pre valve closed
12/9/2010	3:30:26 PM	SiCl4 post valve closed
12/9/2010	3:30:26 PM	Main Vac valve closed
12/9/2010	3:30:26 PM	Bubbler valve closed
12/9/2010	3:30:26 PM	Bypass valve opened
12/9/2010	3:30:26 PM	Helium MFC set to  0.000000
12/9/2010	3:30:26 PM	H2 MFC set to  0.000000
12/9/2010	3:30:26 PM	BCl3 MFC set to  0.000000
12/9/2010	3:30:26 PM	PHl3 MFC set to  0.000000
12/9/2010	3:30:26 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:30:26 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:30:26 PM	Tube furnace set to 0
12/9/2010	3:30:27 PM	Helium valve closed
12/9/2010	3:30:27 PM	H2 valve closed
12/9/2010	3:30:27 PM	BCl3 valve closed
12/9/2010	3:30:27 PM	PH3 valve closed
12/9/2010	3:30:27 PM	SiCl4 pre valve closed
12/9/2010	3:30:27 PM	SiCl4 post valve closed
12/9/2010	3:30:27 PM	Bubbler valve closed
12/9/2010	3:30:27 PM	Main Vac valve opened
12/9/2010	3:30:27 PM	Bypass valve opened
12/9/2010	3:30:27 PM	Helium MFC set to  0.000000
12/9/2010	3:30:27 PM	H2 MFC set to  0.000000
12/9/2010	3:30:27 PM	BCl3 MFC set to  0.000000
12/9/2010	3:30:27 PM	PHl3 MFC set to  0.000000
12/9/2010	3:30:27 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:30:27 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:30:27 PM	Tube furnace set to 0
12/9/2010	3:31:27 PM	H2 valve closed
12/9/2010	3:31:27 PM	BCl3 valve closed
12/9/2010	3:31:27 PM	PH3 valve closed
12/9/2010	3:31:27 PM	SiCl4 pre valve closed
12/9/2010	3:31:27 PM	SiCl4 post valve closed
12/9/2010	3:31:27 PM	Bubbler valve closed
12/9/2010	3:31:27 PM	Helium valve opened
12/9/2010	3:31:27 PM	Main Vac valve opened
12/9/2010	3:31:27 PM	Bypass valve opened
12/9/2010	3:31:27 PM	Helium MFC set to  100.000000
12/9/2010	3:31:27 PM	H2 MFC set to  0.000000
12/9/2010	3:31:27 PM	BCl3 MFC set to  0.000000
12/9/2010	3:31:27 PM	PHl3 MFC set to  0.000000
12/9/2010	3:31:27 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:31:27 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:31:27 PM	Tube furnace set to 0
12/9/2010	3:32:27 PM	Helium valve closed
12/9/2010	3:32:27 PM	H2 valve closed
12/9/2010	3:32:27 PM	BCl3 valve closed
12/9/2010	3:32:27 PM	PH3 valve closed
12/9/2010	3:32:27 PM	SiCl4 pre valve closed
12/9/2010	3:32:27 PM	SiCl4 post valve closed
12/9/2010	3:32:27 PM	Bubbler valve closed
12/9/2010	3:32:27 PM	Main Vac valve opened
12/9/2010	3:32:27 PM	Bypass valve opened
12/9/2010	3:32:27 PM	Helium MFC set to  0.000000
12/9/2010	3:32:27 PM	H2 MFC set to  0.000000
12/9/2010	3:32:27 PM	BCl3 MFC set to  0.000000
12/9/2010	3:32:27 PM	PHl3 MFC set to  0.000000
12/9/2010	3:32:27 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:32:27 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:32:27 PM	Tube furnace set to 0
12/9/2010	3:33:27 PM	H2 valve closed
12/9/2010	3:33:27 PM	BCl3 valve closed
12/9/2010	3:33:27 PM	PH3 valve closed
12/9/2010	3:33:27 PM	SiCl4 pre valve closed
12/9/2010	3:33:27 PM	SiCl4 post valve closed
12/9/2010	3:33:27 PM	Bubbler valve closed
12/9/2010	3:33:27 PM	Helium valve opened
12/9/2010	3:33:27 PM	Main Vac valve opened
12/9/2010	3:33:27 PM	Bypass valve opened
12/9/2010	3:33:27 PM	Helium MFC set to  100.000000
12/9/2010	3:33:27 PM	H2 MFC set to  0.000000
12/9/2010	3:33:27 PM	BCl3 MFC set to  0.000000
12/9/2010	3:33:27 PM	PHl3 MFC set to  0.000000
12/9/2010	3:33:27 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:33:27 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:33:27 PM	Tube furnace set to 0
12/9/2010	3:34:27 PM	Helium valve closed
12/9/2010	3:34:27 PM	H2 valve closed
12/9/2010	3:34:27 PM	BCl3 valve closed
12/9/2010	3:34:27 PM	PH3 valve closed
12/9/2010	3:34:27 PM	SiCl4 pre valve closed
12/9/2010	3:34:27 PM	SiCl4 post valve closed
12/9/2010	3:34:27 PM	Bubbler valve closed
12/9/2010	3:34:27 PM	Main Vac valve opened
12/9/2010	3:34:27 PM	Bypass valve opened
12/9/2010	3:34:27 PM	Helium MFC set to  0.000000
12/9/2010	3:34:27 PM	H2 MFC set to  0.000000
12/9/2010	3:34:27 PM	BCl3 MFC set to  0.000000
12/9/2010	3:34:28 PM	PHl3 MFC set to  0.000000
12/9/2010	3:34:28 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:34:28 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:34:28 PM	Tube furnace set to 0
12/9/2010	3:35:28 PM	H2 valve closed
12/9/2010	3:35:28 PM	BCl3 valve closed
12/9/2010	3:35:28 PM	PH3 valve closed
12/9/2010	3:35:28 PM	SiCl4 pre valve closed
12/9/2010	3:35:28 PM	SiCl4 post valve closed
12/9/2010	3:35:28 PM	Bubbler valve closed
12/9/2010	3:35:28 PM	Helium valve opened
12/9/2010	3:35:28 PM	Main Vac valve opened
12/9/2010	3:35:28 PM	Bypass valve opened
12/9/2010	3:35:28 PM	Helium MFC set to  100.000000
12/9/2010	3:35:28 PM	H2 MFC set to  0.000000
12/9/2010	3:35:28 PM	BCl3 MFC set to  0.000000
12/9/2010	3:35:28 PM	PHl3 MFC set to  0.000000
12/9/2010	3:35:28 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:35:28 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:35:28 PM	Tube furnace set to 0
12/9/2010	3:36:28 PM	Helium valve closed
12/9/2010	3:36:28 PM	H2 valve closed
12/9/2010	3:36:28 PM	BCl3 valve closed
12/9/2010	3:36:28 PM	PH3 valve closed
12/9/2010	3:36:28 PM	SiCl4 pre valve closed
12/9/2010	3:36:28 PM	SiCl4 post valve closed
12/9/2010	3:36:28 PM	Bubbler valve closed
12/9/2010	3:36:28 PM	Main Vac valve opened
12/9/2010	3:36:28 PM	Bypass valve opened
12/9/2010	3:36:28 PM	Helium MFC set to  0.000000
12/9/2010	3:36:28 PM	H2 MFC set to  0.000000
12/9/2010	3:36:28 PM	BCl3 MFC set to  0.000000
12/9/2010	3:36:28 PM	PHl3 MFC set to  0.000000
12/9/2010	3:36:28 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:36:28 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:36:28 PM	Tube furnace set to 0
12/9/2010	3:37:28 PM	H2 valve closed
12/9/2010	3:37:28 PM	BCl3 valve closed
12/9/2010	3:37:28 PM	PH3 valve closed
12/9/2010	3:37:28 PM	SiCl4 pre valve closed
12/9/2010	3:37:28 PM	SiCl4 post valve closed
12/9/2010	3:37:28 PM	Bubbler valve closed
12/9/2010	3:37:28 PM	Helium valve opened
12/9/2010	3:37:28 PM	Main Vac valve opened
12/9/2010	3:37:28 PM	Bypass valve opened
12/9/2010	3:37:28 PM	Helium MFC set to  100.000000
12/9/2010	3:37:28 PM	H2 MFC set to  0.000000
12/9/2010	3:37:28 PM	BCl3 MFC set to  0.000000
12/9/2010	3:37:28 PM	PHl3 MFC set to  0.000000
12/9/2010	3:37:28 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:37:28 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:37:28 PM	Tube furnace set to 0
12/9/2010	3:38:28 PM	Helium valve closed
12/9/2010	3:38:28 PM	H2 valve closed
12/9/2010	3:38:28 PM	BCl3 valve closed
12/9/2010	3:38:28 PM	PH3 valve closed
12/9/2010	3:38:28 PM	SiCl4 pre valve closed
12/9/2010	3:38:28 PM	SiCl4 post valve closed
12/9/2010	3:38:28 PM	Bubbler valve closed
12/9/2010	3:38:28 PM	Main Vac valve opened
12/9/2010	3:38:28 PM	Bypass valve opened
12/9/2010	3:38:28 PM	Helium MFC set to  0.000000
12/9/2010	3:38:28 PM	H2 MFC set to  0.000000
12/9/2010	3:38:28 PM	BCl3 MFC set to  0.000000
12/9/2010	3:38:28 PM	PHl3 MFC set to  0.000000
12/9/2010	3:38:28 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:38:28 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:38:28 PM	Tube furnace set to 0
12/9/2010	3:39:28 PM	H2 valve closed
12/9/2010	3:39:28 PM	BCl3 valve closed
12/9/2010	3:39:28 PM	PH3 valve closed
12/9/2010	3:39:28 PM	SiCl4 pre valve closed
12/9/2010	3:39:28 PM	SiCl4 post valve closed
12/9/2010	3:39:28 PM	Bubbler valve closed
12/9/2010	3:39:28 PM	Helium valve opened
12/9/2010	3:39:28 PM	Main Vac valve opened
12/9/2010	3:39:28 PM	Bypass valve opened
12/9/2010	3:39:28 PM	Helium MFC set to  100.000000
12/9/2010	3:39:28 PM	H2 MFC set to  0.000000
12/9/2010	3:39:28 PM	BCl3 MFC set to  0.000000
12/9/2010	3:39:28 PM	PHl3 MFC set to  0.000000
12/9/2010	3:39:28 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:39:28 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:39:29 PM	Tube furnace set to 0
12/9/2010	3:40:29 PM	Helium valve closed
12/9/2010	3:40:29 PM	H2 valve closed
12/9/2010	3:40:29 PM	BCl3 valve closed
12/9/2010	3:40:29 PM	PH3 valve closed
12/9/2010	3:40:29 PM	SiCl4 pre valve closed
12/9/2010	3:40:29 PM	SiCl4 post valve closed
12/9/2010	3:40:29 PM	Bubbler valve closed
12/9/2010	3:40:29 PM	Main Vac valve opened
12/9/2010	3:40:29 PM	Bypass valve opened
12/9/2010	3:40:29 PM	Helium MFC set to  0.000000
12/9/2010	3:40:29 PM	H2 MFC set to  0.000000
12/9/2010	3:40:29 PM	BCl3 MFC set to  0.000000
12/9/2010	3:40:29 PM	PHl3 MFC set to  0.000000
12/9/2010	3:40:29 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:40:29 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:40:29 PM	Tube furnace set to 0
12/9/2010	3:41:29 PM	H2 valve closed
12/9/2010	3:41:29 PM	BCl3 valve closed
12/9/2010	3:41:29 PM	PH3 valve closed
12/9/2010	3:41:29 PM	SiCl4 pre valve closed
12/9/2010	3:41:29 PM	SiCl4 post valve closed
12/9/2010	3:41:29 PM	Bubbler valve closed
12/9/2010	3:41:29 PM	Helium valve opened
12/9/2010	3:41:29 PM	Main Vac valve opened
12/9/2010	3:41:29 PM	Bypass valve opened
12/9/2010	3:41:29 PM	Helium MFC set to  100.000000
12/9/2010	3:41:29 PM	H2 MFC set to  0.000000
12/9/2010	3:41:29 PM	BCl3 MFC set to  0.000000
12/9/2010	3:41:29 PM	PHl3 MFC set to  0.000000
12/9/2010	3:41:29 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:41:29 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:41:29 PM	Tube furnace set to 0
12/9/2010	3:42:29 PM	Helium valve closed
12/9/2010	3:42:29 PM	H2 valve closed
12/9/2010	3:42:29 PM	BCl3 valve closed
12/9/2010	3:42:29 PM	PH3 valve closed
12/9/2010	3:42:29 PM	SiCl4 pre valve closed
12/9/2010	3:42:29 PM	SiCl4 post valve closed
12/9/2010	3:42:29 PM	Bubbler valve closed
12/9/2010	3:42:29 PM	Main Vac valve opened
12/9/2010	3:42:29 PM	Bypass valve opened
12/9/2010	3:42:29 PM	Helium MFC set to  0.000000
12/9/2010	3:42:29 PM	H2 MFC set to  0.000000
12/9/2010	3:42:29 PM	BCl3 MFC set to  0.000000
12/9/2010	3:42:29 PM	PHl3 MFC set to  0.000000
12/9/2010	3:42:29 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:42:29 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:42:29 PM	Tube furnace set to 0
12/9/2010	3:43:29 PM	H2 valve closed
12/9/2010	3:43:29 PM	BCl3 valve closed
12/9/2010	3:43:29 PM	PH3 valve closed
12/9/2010	3:43:29 PM	SiCl4 pre valve closed
12/9/2010	3:43:29 PM	SiCl4 post valve closed
12/9/2010	3:43:29 PM	Bubbler valve closed
12/9/2010	3:43:29 PM	Helium valve opened
12/9/2010	3:43:29 PM	Main Vac valve opened
12/9/2010	3:43:29 PM	Bypass valve opened
12/9/2010	3:43:29 PM	Helium MFC set to  100.000000
12/9/2010	3:43:29 PM	H2 MFC set to  0.000000
12/9/2010	3:43:29 PM	BCl3 MFC set to  0.000000
12/9/2010	3:43:29 PM	PHl3 MFC set to  0.000000
12/9/2010	3:43:29 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:43:29 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:43:29 PM	Tube furnace set to 0
12/9/2010	3:44:29 PM	Helium valve closed
12/9/2010	3:44:29 PM	H2 valve closed
12/9/2010	3:44:29 PM	BCl3 valve closed
12/9/2010	3:44:29 PM	PH3 valve closed
12/9/2010	3:44:29 PM	SiCl4 pre valve closed
12/9/2010	3:44:29 PM	SiCl4 post valve closed
12/9/2010	3:44:29 PM	Bubbler valve closed
12/9/2010	3:44:29 PM	Main Vac valve opened
12/9/2010	3:44:29 PM	Bypass valve opened
12/9/2010	3:44:29 PM	Helium MFC set to  0.000000
12/9/2010	3:44:29 PM	H2 MFC set to  0.000000
12/9/2010	3:44:29 PM	BCl3 MFC set to  0.000000
12/9/2010	3:44:29 PM	PHl3 MFC set to  0.000000
12/9/2010	3:44:29 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:44:29 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:44:30 PM	Tube furnace set to 0
12/9/2010	3:44:42 PM	Run aborted at 3:44 PM
12/9/2010	3:44:42 PM	Helium valve closed
12/9/2010	3:44:42 PM	H2 valve closed
12/9/2010	3:44:42 PM	BCl3 valve closed
12/9/2010	3:44:42 PM	PH3 valve closed
12/9/2010	3:44:42 PM	SiCl4 pre valve closed
12/9/2010	3:44:42 PM	SiCl4 post valve closed
12/9/2010	3:44:42 PM	Bypass valve closed
12/9/2010	3:44:42 PM	Main Vac valve closed
12/9/2010	3:44:42 PM	Bubbler valve closed
12/9/2010	3:44:42 PM	Helium MFC set to  0.000000
12/9/2010	3:44:42 PM	H2 MFC set to  0.000000
12/9/2010	3:44:42 PM	BCl3 MFC set to  0.000000
12/9/2010	3:44:42 PM	PHl3 MFC set to  0.000000
12/9/2010	3:44:42 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:44:42 PM	Tube furnace set to 0
12/9/2010	3:44:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/9/2010	3:44:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/9/2010	3:45:00 PM	Recipe started at 3:44 PM
12/9/2010	3:45:00 PM	Helium valve closed
12/9/2010	3:45:00 PM	H2 valve closed
12/9/2010	3:45:00 PM	BCl3 valve closed
12/9/2010	3:45:00 PM	PH3 valve closed
12/9/2010	3:45:00 PM	SiCl4 pre valve closed
12/9/2010	3:45:00 PM	SiCl4 post valve closed
12/9/2010	3:45:00 PM	Main Vac valve closed
12/9/2010	3:45:00 PM	Bubbler valve closed
12/9/2010	3:45:00 PM	Bypass valve opened
12/9/2010	3:45:00 PM	Helium MFC set to  0.000000
12/9/2010	3:45:00 PM	H2 MFC set to  0.000000
12/9/2010	3:45:00 PM	BCl3 MFC set to  0.000000
12/9/2010	3:45:00 PM	PHl3 MFC set to  0.000000
12/9/2010	3:45:00 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:45:00 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:45:00 PM	Tube furnace set to 0
12/9/2010	3:45:01 PM	Helium valve closed
12/9/2010	3:45:01 PM	H2 valve closed
12/9/2010	3:45:01 PM	BCl3 valve closed
12/9/2010	3:45:01 PM	PH3 valve closed
12/9/2010	3:45:01 PM	SiCl4 pre valve closed
12/9/2010	3:45:01 PM	SiCl4 post valve closed
12/9/2010	3:45:01 PM	Bubbler valve closed
12/9/2010	3:45:01 PM	Main Vac valve opened
12/9/2010	3:45:01 PM	Bypass valve opened
12/9/2010	3:45:01 PM	Helium MFC set to  0.000000
12/9/2010	3:45:01 PM	H2 MFC set to  0.000000
12/9/2010	3:45:01 PM	BCl3 MFC set to  0.000000
12/9/2010	3:45:01 PM	PHl3 MFC set to  0.000000
12/9/2010	3:45:01 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:45:01 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:45:01 PM	Tube furnace set to 0
12/9/2010	3:46:01 PM	H2 valve closed
12/9/2010	3:46:01 PM	BCl3 valve closed
12/9/2010	3:46:01 PM	PH3 valve closed
12/9/2010	3:46:01 PM	SiCl4 pre valve closed
12/9/2010	3:46:01 PM	SiCl4 post valve closed
12/9/2010	3:46:01 PM	Bubbler valve closed
12/9/2010	3:46:01 PM	Helium valve opened
12/9/2010	3:46:01 PM	Main Vac valve opened
12/9/2010	3:46:01 PM	Bypass valve opened
12/9/2010	3:46:01 PM	Helium MFC set to  100.000000
12/9/2010	3:46:01 PM	H2 MFC set to  0.000000
12/9/2010	3:46:01 PM	BCl3 MFC set to  0.000000
12/9/2010	3:46:01 PM	PHl3 MFC set to  0.000000
12/9/2010	3:46:01 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:46:01 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:46:01 PM	Tube furnace set to 0
12/9/2010	3:47:01 PM	Helium valve closed
12/9/2010	3:47:01 PM	H2 valve closed
12/9/2010	3:47:01 PM	BCl3 valve closed
12/9/2010	3:47:01 PM	PH3 valve closed
12/9/2010	3:47:01 PM	SiCl4 pre valve closed
12/9/2010	3:47:01 PM	SiCl4 post valve closed
12/9/2010	3:47:01 PM	Bubbler valve closed
12/9/2010	3:47:01 PM	Main Vac valve opened
12/9/2010	3:47:01 PM	Bypass valve opened
12/9/2010	3:47:01 PM	Helium MFC set to  0.000000
12/9/2010	3:47:01 PM	H2 MFC set to  0.000000
12/9/2010	3:47:01 PM	BCl3 MFC set to  0.000000
12/9/2010	3:47:01 PM	PHl3 MFC set to  0.000000
12/9/2010	3:47:01 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:47:01 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:47:01 PM	Tube furnace set to 0
12/9/2010	3:48:01 PM	H2 valve closed
12/9/2010	3:48:01 PM	BCl3 valve closed
12/9/2010	3:48:01 PM	PH3 valve closed
12/9/2010	3:48:01 PM	SiCl4 pre valve closed
12/9/2010	3:48:01 PM	SiCl4 post valve closed
12/9/2010	3:48:01 PM	Bubbler valve closed
12/9/2010	3:48:01 PM	Helium valve opened
12/9/2010	3:48:01 PM	Main Vac valve opened
12/9/2010	3:48:01 PM	Bypass valve opened
12/9/2010	3:48:01 PM	Helium MFC set to  100.000000
12/9/2010	3:48:01 PM	H2 MFC set to  0.000000
12/9/2010	3:48:01 PM	BCl3 MFC set to  0.000000
12/9/2010	3:48:01 PM	PHl3 MFC set to  0.000000
12/9/2010	3:48:01 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:48:01 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:48:01 PM	Tube furnace set to 0
12/9/2010	3:49:01 PM	Helium valve closed
12/9/2010	3:49:01 PM	H2 valve closed
12/9/2010	3:49:01 PM	BCl3 valve closed
12/9/2010	3:49:01 PM	PH3 valve closed
12/9/2010	3:49:01 PM	SiCl4 pre valve closed
12/9/2010	3:49:01 PM	SiCl4 post valve closed
12/9/2010	3:49:01 PM	Bubbler valve closed
12/9/2010	3:49:01 PM	Main Vac valve opened
12/9/2010	3:49:01 PM	Bypass valve opened
12/9/2010	3:49:01 PM	Helium MFC set to  0.000000
12/9/2010	3:49:01 PM	H2 MFC set to  0.000000
12/9/2010	3:49:01 PM	BCl3 MFC set to  0.000000
12/9/2010	3:49:01 PM	PHl3 MFC set to  0.000000
12/9/2010	3:49:01 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:49:01 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:49:02 PM	Tube furnace set to 0
12/9/2010	3:50:02 PM	H2 valve closed
12/9/2010	3:50:02 PM	BCl3 valve closed
12/9/2010	3:50:02 PM	PH3 valve closed
12/9/2010	3:50:02 PM	SiCl4 pre valve closed
12/9/2010	3:50:02 PM	SiCl4 post valve closed
12/9/2010	3:50:02 PM	Bubbler valve closed
12/9/2010	3:50:02 PM	Helium valve opened
12/9/2010	3:50:02 PM	Main Vac valve opened
12/9/2010	3:50:02 PM	Bypass valve opened
12/9/2010	3:50:02 PM	Helium MFC set to  100.000000
12/9/2010	3:50:02 PM	H2 MFC set to  0.000000
12/9/2010	3:50:02 PM	BCl3 MFC set to  0.000000
12/9/2010	3:50:02 PM	PHl3 MFC set to  0.000000
12/9/2010	3:50:02 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:50:02 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:50:02 PM	Tube furnace set to 0
12/9/2010	3:51:02 PM	Helium valve closed
12/9/2010	3:51:02 PM	H2 valve closed
12/9/2010	3:51:02 PM	BCl3 valve closed
12/9/2010	3:51:02 PM	PH3 valve closed
12/9/2010	3:51:02 PM	SiCl4 pre valve closed
12/9/2010	3:51:02 PM	SiCl4 post valve closed
12/9/2010	3:51:02 PM	Bubbler valve closed
12/9/2010	3:51:02 PM	Main Vac valve opened
12/9/2010	3:51:02 PM	Bypass valve opened
12/9/2010	3:51:02 PM	Helium MFC set to  0.000000
12/9/2010	3:51:02 PM	H2 MFC set to  0.000000
12/9/2010	3:51:02 PM	BCl3 MFC set to  0.000000
12/9/2010	3:51:02 PM	PHl3 MFC set to  0.000000
12/9/2010	3:51:02 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:51:02 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:51:02 PM	Tube furnace set to 0
12/9/2010	3:52:02 PM	H2 valve closed
12/9/2010	3:52:02 PM	BCl3 valve closed
12/9/2010	3:52:02 PM	PH3 valve closed
12/9/2010	3:52:02 PM	SiCl4 pre valve closed
12/9/2010	3:52:02 PM	SiCl4 post valve closed
12/9/2010	3:52:02 PM	Bubbler valve closed
12/9/2010	3:52:02 PM	Helium valve opened
12/9/2010	3:52:02 PM	Main Vac valve opened
12/9/2010	3:52:02 PM	Bypass valve opened
12/9/2010	3:52:02 PM	Helium MFC set to  100.000000
12/9/2010	3:52:02 PM	H2 MFC set to  0.000000
12/9/2010	3:52:02 PM	BCl3 MFC set to  0.000000
12/9/2010	3:52:02 PM	PHl3 MFC set to  0.000000
12/9/2010	3:52:02 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:52:02 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:52:02 PM	Tube furnace set to 0
12/9/2010	3:53:02 PM	Helium valve closed
12/9/2010	3:53:02 PM	H2 valve closed
12/9/2010	3:53:02 PM	BCl3 valve closed
12/9/2010	3:53:02 PM	PH3 valve closed
12/9/2010	3:53:02 PM	SiCl4 pre valve closed
12/9/2010	3:53:02 PM	SiCl4 post valve closed
12/9/2010	3:53:02 PM	Bubbler valve closed
12/9/2010	3:53:02 PM	Main Vac valve opened
12/9/2010	3:53:02 PM	Bypass valve opened
12/9/2010	3:53:02 PM	Helium MFC set to  0.000000
12/9/2010	3:53:02 PM	H2 MFC set to  0.000000
12/9/2010	3:53:02 PM	BCl3 MFC set to  0.000000
12/9/2010	3:53:02 PM	PHl3 MFC set to  0.000000
12/9/2010	3:53:02 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:53:02 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:53:02 PM	Tube furnace set to 0
12/9/2010	3:54:02 PM	H2 valve closed
12/9/2010	3:54:02 PM	BCl3 valve closed
12/9/2010	3:54:02 PM	PH3 valve closed
12/9/2010	3:54:02 PM	SiCl4 pre valve closed
12/9/2010	3:54:02 PM	SiCl4 post valve closed
12/9/2010	3:54:02 PM	Bubbler valve closed
12/9/2010	3:54:02 PM	Helium valve opened
12/9/2010	3:54:02 PM	Main Vac valve opened
12/9/2010	3:54:02 PM	Bypass valve opened
12/9/2010	3:54:02 PM	Helium MFC set to  100.000000
12/9/2010	3:54:02 PM	H2 MFC set to  0.000000
12/9/2010	3:54:02 PM	BCl3 MFC set to  0.000000
12/9/2010	3:54:02 PM	PHl3 MFC set to  0.000000
12/9/2010	3:54:02 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:54:02 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:54:03 PM	Tube furnace set to 0
12/9/2010	3:55:03 PM	Helium valve closed
12/9/2010	3:55:03 PM	H2 valve closed
12/9/2010	3:55:03 PM	BCl3 valve closed
12/9/2010	3:55:03 PM	PH3 valve closed
12/9/2010	3:55:03 PM	SiCl4 pre valve closed
12/9/2010	3:55:03 PM	SiCl4 post valve closed
12/9/2010	3:55:03 PM	Bubbler valve closed
12/9/2010	3:55:03 PM	Main Vac valve opened
12/9/2010	3:55:03 PM	Bypass valve opened
12/9/2010	3:55:03 PM	Helium MFC set to  0.000000
12/9/2010	3:55:03 PM	H2 MFC set to  0.000000
12/9/2010	3:55:03 PM	BCl3 MFC set to  0.000000
12/9/2010	3:55:03 PM	PHl3 MFC set to  0.000000
12/9/2010	3:55:03 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:55:03 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:55:03 PM	Tube furnace set to 0
12/9/2010	3:56:03 PM	H2 valve closed
12/9/2010	3:56:03 PM	BCl3 valve closed
12/9/2010	3:56:03 PM	PH3 valve closed
12/9/2010	3:56:03 PM	SiCl4 pre valve closed
12/9/2010	3:56:03 PM	SiCl4 post valve closed
12/9/2010	3:56:03 PM	Bubbler valve closed
12/9/2010	3:56:03 PM	Helium valve opened
12/9/2010	3:56:03 PM	Main Vac valve opened
12/9/2010	3:56:03 PM	Bypass valve opened
12/9/2010	3:56:03 PM	Helium MFC set to  100.000000
12/9/2010	3:56:03 PM	H2 MFC set to  0.000000
12/9/2010	3:56:03 PM	BCl3 MFC set to  0.000000
12/9/2010	3:56:03 PM	PHl3 MFC set to  0.000000
12/9/2010	3:56:03 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:56:03 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:56:03 PM	Tube furnace set to 0
12/9/2010	3:57:03 PM	Helium valve closed
12/9/2010	3:57:03 PM	H2 valve closed
12/9/2010	3:57:03 PM	BCl3 valve closed
12/9/2010	3:57:03 PM	PH3 valve closed
12/9/2010	3:57:03 PM	SiCl4 pre valve closed
12/9/2010	3:57:03 PM	SiCl4 post valve closed
12/9/2010	3:57:03 PM	Bubbler valve closed
12/9/2010	3:57:03 PM	Main Vac valve opened
12/9/2010	3:57:03 PM	Bypass valve opened
12/9/2010	3:57:03 PM	Helium MFC set to  0.000000
12/9/2010	3:57:03 PM	H2 MFC set to  0.000000
12/9/2010	3:57:03 PM	BCl3 MFC set to  0.000000
12/9/2010	3:57:03 PM	PHl3 MFC set to  0.000000
12/9/2010	3:57:03 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:57:03 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:57:03 PM	Tube furnace set to 0
12/9/2010	3:57:53 PM	Run aborted at 3:57 PM
12/9/2010	3:57:53 PM	Helium valve closed
12/9/2010	3:57:53 PM	H2 valve closed
12/9/2010	3:57:53 PM	BCl3 valve closed
12/9/2010	3:57:53 PM	PH3 valve closed
12/9/2010	3:57:53 PM	SiCl4 pre valve closed
12/9/2010	3:57:53 PM	SiCl4 post valve closed
12/9/2010	3:57:53 PM	Bypass valve closed
12/9/2010	3:57:53 PM	Main Vac valve closed
12/9/2010	3:57:53 PM	Bubbler valve closed
12/9/2010	3:57:53 PM	Helium MFC set to  0.000000
12/9/2010	3:57:53 PM	H2 MFC set to  0.000000
12/9/2010	3:57:53 PM	BCl3 MFC set to  0.000000
12/9/2010	3:57:53 PM	PHl3 MFC set to  0.000000
12/9/2010	3:57:53 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:57:53 PM	Tube furnace set to 0
12/9/2010	3:57:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/9/2010	3:57:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/9/2010	3:58:11 PM	Recipe started at 3:58 PM
12/9/2010	3:58:11 PM	Helium valve closed
12/9/2010	3:58:11 PM	H2 valve closed
12/9/2010	3:58:11 PM	BCl3 valve closed
12/9/2010	3:58:11 PM	PH3 valve closed
12/9/2010	3:58:11 PM	SiCl4 pre valve closed
12/9/2010	3:58:11 PM	SiCl4 post valve closed
12/9/2010	3:58:11 PM	Main Vac valve closed
12/9/2010	3:58:11 PM	Bubbler valve closed
12/9/2010	3:58:11 PM	Bypass valve opened
12/9/2010	3:58:11 PM	Helium MFC set to  0.000000
12/9/2010	3:58:11 PM	H2 MFC set to  0.000000
12/9/2010	3:58:11 PM	BCl3 MFC set to  0.000000
12/9/2010	3:58:11 PM	PHl3 MFC set to  0.000000
12/9/2010	3:58:11 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:58:11 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:58:11 PM	Tube furnace set to 0
12/9/2010	3:58:12 PM	Helium valve closed
12/9/2010	3:58:12 PM	H2 valve closed
12/9/2010	3:58:12 PM	BCl3 valve closed
12/9/2010	3:58:12 PM	PH3 valve closed
12/9/2010	3:58:12 PM	SiCl4 pre valve closed
12/9/2010	3:58:12 PM	SiCl4 post valve closed
12/9/2010	3:58:12 PM	Bubbler valve closed
12/9/2010	3:58:12 PM	Main Vac valve opened
12/9/2010	3:58:12 PM	Bypass valve opened
12/9/2010	3:58:12 PM	Helium MFC set to  0.000000
12/9/2010	3:58:12 PM	H2 MFC set to  0.000000
12/9/2010	3:58:12 PM	BCl3 MFC set to  0.000000
12/9/2010	3:58:12 PM	PHl3 MFC set to  0.000000
12/9/2010	3:58:12 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:58:12 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:58:12 PM	Tube furnace set to 0
12/9/2010	3:59:12 PM	H2 valve closed
12/9/2010	3:59:12 PM	BCl3 valve closed
12/9/2010	3:59:12 PM	PH3 valve closed
12/9/2010	3:59:12 PM	SiCl4 pre valve closed
12/9/2010	3:59:12 PM	SiCl4 post valve closed
12/9/2010	3:59:12 PM	Bubbler valve closed
12/9/2010	3:59:12 PM	Helium valve opened
12/9/2010	3:59:12 PM	Main Vac valve opened
12/9/2010	3:59:12 PM	Bypass valve opened
12/9/2010	3:59:12 PM	Helium MFC set to  100.000000
12/9/2010	3:59:12 PM	H2 MFC set to  0.000000
12/9/2010	3:59:12 PM	BCl3 MFC set to  0.000000
12/9/2010	3:59:12 PM	PHl3 MFC set to  0.000000
12/9/2010	3:59:12 PM	SiCl4 MFC set to  0.000000
12/9/2010	3:59:12 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	3:59:12 PM	Tube furnace set to 0
12/9/2010	4:00:12 PM	Helium valve closed
12/9/2010	4:00:12 PM	H2 valve closed
12/9/2010	4:00:12 PM	BCl3 valve closed
12/9/2010	4:00:12 PM	PH3 valve closed
12/9/2010	4:00:12 PM	SiCl4 pre valve closed
12/9/2010	4:00:12 PM	SiCl4 post valve closed
12/9/2010	4:00:12 PM	Bubbler valve closed
12/9/2010	4:00:12 PM	Main Vac valve opened
12/9/2010	4:00:12 PM	Bypass valve opened
12/9/2010	4:00:12 PM	Helium MFC set to  0.000000
12/9/2010	4:00:12 PM	H2 MFC set to  0.000000
12/9/2010	4:00:12 PM	BCl3 MFC set to  0.000000
12/9/2010	4:00:12 PM	PHl3 MFC set to  0.000000
12/9/2010	4:00:12 PM	SiCl4 MFC set to  0.000000
12/9/2010	4:00:12 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	4:00:12 PM	Tube furnace set to 0
12/9/2010	4:01:12 PM	H2 valve closed
12/9/2010	4:01:12 PM	BCl3 valve closed
12/9/2010	4:01:12 PM	PH3 valve closed
12/9/2010	4:01:12 PM	SiCl4 pre valve closed
12/9/2010	4:01:12 PM	SiCl4 post valve closed
12/9/2010	4:01:12 PM	Bubbler valve closed
12/9/2010	4:01:12 PM	Helium valve opened
12/9/2010	4:01:12 PM	Main Vac valve opened
12/9/2010	4:01:12 PM	Bypass valve opened
12/9/2010	4:01:12 PM	Helium MFC set to  100.000000
12/9/2010	4:01:12 PM	H2 MFC set to  0.000000
12/9/2010	4:01:12 PM	BCl3 MFC set to  0.000000
12/9/2010	4:01:12 PM	PHl3 MFC set to  0.000000
12/9/2010	4:01:12 PM	SiCl4 MFC set to  0.000000
12/9/2010	4:01:12 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	4:01:13 PM	Tube furnace set to 0
12/9/2010	4:02:13 PM	Helium valve closed
12/9/2010	4:02:13 PM	H2 valve closed
12/9/2010	4:02:13 PM	BCl3 valve closed
12/9/2010	4:02:13 PM	PH3 valve closed
12/9/2010	4:02:13 PM	SiCl4 pre valve closed
12/9/2010	4:02:13 PM	SiCl4 post valve closed
12/9/2010	4:02:13 PM	Bubbler valve closed
12/9/2010	4:02:13 PM	Main Vac valve opened
12/9/2010	4:02:13 PM	Bypass valve opened
12/9/2010	4:02:13 PM	Helium MFC set to  0.000000
12/9/2010	4:02:13 PM	H2 MFC set to  0.000000
12/9/2010	4:02:13 PM	BCl3 MFC set to  0.000000
12/9/2010	4:02:13 PM	PHl3 MFC set to  0.000000
12/9/2010	4:02:13 PM	SiCl4 MFC set to  0.000000
12/9/2010	4:02:13 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	4:02:13 PM	Tube furnace set to 0
12/9/2010	4:03:13 PM	H2 valve closed
12/9/2010	4:03:13 PM	BCl3 valve closed
12/9/2010	4:03:13 PM	PH3 valve closed
12/9/2010	4:03:13 PM	SiCl4 pre valve closed
12/9/2010	4:03:13 PM	SiCl4 post valve closed
12/9/2010	4:03:13 PM	Bubbler valve closed
12/9/2010	4:03:13 PM	Helium valve opened
12/9/2010	4:03:13 PM	Main Vac valve opened
12/9/2010	4:03:13 PM	Bypass valve opened
12/9/2010	4:03:13 PM	Helium MFC set to  100.000000
12/9/2010	4:03:13 PM	H2 MFC set to  0.000000
12/9/2010	4:03:13 PM	BCl3 MFC set to  0.000000
12/9/2010	4:03:13 PM	PHl3 MFC set to  0.000000
12/9/2010	4:03:13 PM	SiCl4 MFC set to  0.000000
12/9/2010	4:03:13 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	4:03:13 PM	Tube furnace set to 0
12/9/2010	4:04:13 PM	Helium valve closed
12/9/2010	4:04:13 PM	H2 valve closed
12/9/2010	4:04:13 PM	BCl3 valve closed
12/9/2010	4:04:13 PM	PH3 valve closed
12/9/2010	4:04:13 PM	SiCl4 pre valve closed
12/9/2010	4:04:13 PM	SiCl4 post valve closed
12/9/2010	4:04:13 PM	Bubbler valve closed
12/9/2010	4:04:13 PM	Main Vac valve opened
12/9/2010	4:04:13 PM	Bypass valve opened
12/9/2010	4:04:13 PM	Helium MFC set to  0.000000
12/9/2010	4:04:13 PM	H2 MFC set to  0.000000
12/9/2010	4:04:13 PM	BCl3 MFC set to  0.000000
12/9/2010	4:04:13 PM	PHl3 MFC set to  0.000000
12/9/2010	4:04:13 PM	SiCl4 MFC set to  0.000000
12/9/2010	4:04:13 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	4:04:13 PM	Tube furnace set to 0
12/9/2010	4:05:13 PM	H2 valve closed
12/9/2010	4:05:13 PM	BCl3 valve closed
12/9/2010	4:05:13 PM	PH3 valve closed
12/9/2010	4:05:13 PM	SiCl4 pre valve closed
12/9/2010	4:05:13 PM	SiCl4 post valve closed
12/9/2010	4:05:13 PM	Bubbler valve closed
12/9/2010	4:05:13 PM	Helium valve opened
12/9/2010	4:05:13 PM	Main Vac valve opened
12/9/2010	4:05:13 PM	Bypass valve opened
12/9/2010	4:05:13 PM	Helium MFC set to  100.000000
12/9/2010	4:05:13 PM	H2 MFC set to  0.000000
12/9/2010	4:05:13 PM	BCl3 MFC set to  0.000000
12/9/2010	4:05:13 PM	PHl3 MFC set to  0.000000
12/9/2010	4:05:13 PM	SiCl4 MFC set to  0.000000
12/9/2010	4:05:13 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	4:05:13 PM	Tube furnace set to 0
12/9/2010	4:06:13 PM	Helium valve closed
12/9/2010	4:06:13 PM	H2 valve closed
12/9/2010	4:06:13 PM	BCl3 valve closed
12/9/2010	4:06:13 PM	PH3 valve closed
12/9/2010	4:06:13 PM	SiCl4 pre valve closed
12/9/2010	4:06:13 PM	SiCl4 post valve closed
12/9/2010	4:06:13 PM	Bubbler valve closed
12/9/2010	4:06:13 PM	Main Vac valve opened
12/9/2010	4:06:13 PM	Bypass valve opened
12/9/2010	4:06:13 PM	Helium MFC set to  0.000000
12/9/2010	4:06:13 PM	H2 MFC set to  0.000000
12/9/2010	4:06:13 PM	BCl3 MFC set to  0.000000
12/9/2010	4:06:13 PM	PHl3 MFC set to  0.000000
12/9/2010	4:06:13 PM	SiCl4 MFC set to  0.000000
12/9/2010	4:06:13 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	4:06:13 PM	Tube furnace set to 0
12/9/2010	4:06:56 PM	Run aborted at 4:06 PM
12/9/2010	4:06:56 PM	Helium valve closed
12/9/2010	4:06:56 PM	H2 valve closed
12/9/2010	4:06:56 PM	BCl3 valve closed
12/9/2010	4:06:56 PM	PH3 valve closed
12/9/2010	4:06:56 PM	SiCl4 pre valve closed
12/9/2010	4:06:56 PM	SiCl4 post valve closed
12/9/2010	4:06:56 PM	Bypass valve closed
12/9/2010	4:06:57 PM	Main Vac valve closed
12/9/2010	4:06:57 PM	Bubbler valve closed
12/9/2010	4:06:57 PM	Helium MFC set to  0.000000
12/9/2010	4:06:57 PM	H2 MFC set to  0.000000
12/9/2010	4:06:57 PM	BCl3 MFC set to  0.000000
12/9/2010	4:06:57 PM	PHl3 MFC set to  0.000000
12/9/2010	4:06:57 PM	SiCl4 MFC set to  0.000000
12/9/2010	4:06:57 PM	Tube furnace set to 0
12/9/2010	4:06:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/9/2010	4:07:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/9/2010	4:07:03 PM	Recipe started at 4:07 PM
12/9/2010	4:07:03 PM	Helium valve closed
12/9/2010	4:07:03 PM	H2 valve closed
12/9/2010	4:07:03 PM	BCl3 valve closed
12/9/2010	4:07:03 PM	PH3 valve closed
12/9/2010	4:07:03 PM	SiCl4 pre valve closed
12/9/2010	4:07:03 PM	SiCl4 post valve closed
12/9/2010	4:07:03 PM	Main Vac valve closed
12/9/2010	4:07:03 PM	Bubbler valve closed
12/9/2010	4:07:03 PM	Bypass valve opened
12/9/2010	4:07:03 PM	Helium MFC set to  0.000000
12/9/2010	4:07:03 PM	H2 MFC set to  0.000000
12/9/2010	4:07:03 PM	BCl3 MFC set to  0.000000
12/9/2010	4:07:03 PM	PHl3 MFC set to  0.000000
12/9/2010	4:07:03 PM	SiCl4 MFC set to  0.000000
12/9/2010	4:07:03 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	4:07:03 PM	Tube furnace set to 0
12/9/2010	4:07:03 PM	Helium valve closed
12/9/2010	4:07:03 PM	H2 valve closed
12/9/2010	4:07:03 PM	BCl3 valve closed
12/9/2010	4:07:03 PM	PH3 valve closed
12/9/2010	4:07:03 PM	SiCl4 pre valve closed
12/9/2010	4:07:03 PM	SiCl4 post valve closed
12/9/2010	4:07:03 PM	Bubbler valve closed
12/9/2010	4:07:03 PM	Main Vac valve opened
12/9/2010	4:07:03 PM	Bypass valve opened
12/9/2010	4:07:03 PM	Helium MFC set to  0.000000
12/9/2010	4:07:03 PM	H2 MFC set to  0.000000
12/9/2010	4:07:03 PM	BCl3 MFC set to  0.000000
12/9/2010	4:07:03 PM	PHl3 MFC set to  0.000000
12/9/2010	4:07:03 PM	SiCl4 MFC set to  0.000000
12/9/2010	4:07:03 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	4:07:04 PM	Tube furnace set to 0
12/9/2010	4:07:04 PM	Run finished at 4:07 PM
12/9/2010	4:07:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/9/2010	4:08:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/9/2010	4:08:13 PM	Recipe started at 4:08 PM
12/9/2010	4:08:13 PM	Helium valve closed
12/9/2010	4:08:13 PM	H2 valve closed
12/9/2010	4:08:13 PM	BCl3 valve closed
12/9/2010	4:08:13 PM	PH3 valve closed
12/9/2010	4:08:13 PM	SiCl4 pre valve closed
12/9/2010	4:08:13 PM	SiCl4 post valve closed
12/9/2010	4:08:13 PM	Main Vac valve closed
12/9/2010	4:08:13 PM	Bubbler valve closed
12/9/2010	4:08:13 PM	Bypass valve opened
12/9/2010	4:08:13 PM	Helium MFC set to  0.000000
12/9/2010	4:08:13 PM	H2 MFC set to  0.000000
12/9/2010	4:08:13 PM	BCl3 MFC set to  0.000000
12/9/2010	4:08:13 PM	PHl3 MFC set to  0.000000
12/9/2010	4:08:13 PM	SiCl4 MFC set to  0.000000
12/9/2010	4:08:13 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	4:08:13 PM	Tube furnace set to 0
12/9/2010	4:08:13 PM	Helium valve closed
12/9/2010	4:08:13 PM	H2 valve closed
12/9/2010	4:08:13 PM	BCl3 valve closed
12/9/2010	4:08:13 PM	PH3 valve closed
12/9/2010	4:08:13 PM	SiCl4 pre valve closed
12/9/2010	4:08:13 PM	SiCl4 post valve closed
12/9/2010	4:08:13 PM	Bubbler valve closed
12/9/2010	4:08:13 PM	Main Vac valve opened
12/9/2010	4:08:13 PM	Bypass valve opened
12/9/2010	4:08:13 PM	Helium MFC set to  0.000000
12/9/2010	4:08:13 PM	H2 MFC set to  0.000000
12/9/2010	4:08:13 PM	BCl3 MFC set to  0.000000
12/9/2010	4:08:13 PM	PHl3 MFC set to  0.000000
12/9/2010	4:08:13 PM	SiCl4 MFC set to  0.000000
12/9/2010	4:08:13 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	4:08:13 PM	Tube furnace set to 0
12/9/2010	4:09:13 PM	H2 valve closed
12/9/2010	4:09:13 PM	BCl3 valve closed
12/9/2010	4:09:13 PM	PH3 valve closed
12/9/2010	4:09:13 PM	SiCl4 pre valve closed
12/9/2010	4:09:13 PM	SiCl4 post valve closed
12/9/2010	4:09:13 PM	Bubbler valve closed
12/9/2010	4:09:13 PM	Helium valve opened
12/9/2010	4:09:13 PM	Main Vac valve opened
12/9/2010	4:09:13 PM	Bypass valve opened
12/9/2010	4:09:13 PM	Helium MFC set to  100.000000
12/9/2010	4:09:13 PM	H2 MFC set to  0.000000
12/9/2010	4:09:13 PM	BCl3 MFC set to  0.000000
12/9/2010	4:09:13 PM	PHl3 MFC set to  0.000000
12/9/2010	4:09:13 PM	SiCl4 MFC set to  0.000000
12/9/2010	4:09:13 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	4:09:13 PM	Tube furnace set to 0
12/9/2010	4:10:13 PM	Helium valve closed
12/9/2010	4:10:13 PM	H2 valve closed
12/9/2010	4:10:13 PM	BCl3 valve closed
12/9/2010	4:10:13 PM	PH3 valve closed
12/9/2010	4:10:13 PM	SiCl4 pre valve closed
12/9/2010	4:10:13 PM	SiCl4 post valve closed
12/9/2010	4:10:13 PM	Bubbler valve closed
12/9/2010	4:10:14 PM	Main Vac valve opened
12/9/2010	4:10:14 PM	Bypass valve opened
12/9/2010	4:10:14 PM	Helium MFC set to  0.000000
12/9/2010	4:10:14 PM	H2 MFC set to  0.000000
12/9/2010	4:10:14 PM	BCl3 MFC set to  0.000000
12/9/2010	4:10:14 PM	PHl3 MFC set to  0.000000
12/9/2010	4:10:14 PM	SiCl4 MFC set to  0.000000
12/9/2010	4:10:14 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	4:10:14 PM	Tube furnace set to 0
12/9/2010	4:11:14 PM	H2 valve closed
12/9/2010	4:11:14 PM	BCl3 valve closed
12/9/2010	4:11:14 PM	PH3 valve closed
12/9/2010	4:11:14 PM	SiCl4 pre valve closed
12/9/2010	4:11:14 PM	SiCl4 post valve closed
12/9/2010	4:11:14 PM	Bubbler valve closed
12/9/2010	4:11:14 PM	Helium valve opened
12/9/2010	4:11:14 PM	Main Vac valve opened
12/9/2010	4:11:14 PM	Bypass valve opened
12/9/2010	4:11:14 PM	Helium MFC set to  100.000000
12/9/2010	4:11:14 PM	H2 MFC set to  0.000000
12/9/2010	4:11:14 PM	BCl3 MFC set to  0.000000
12/9/2010	4:11:14 PM	PHl3 MFC set to  0.000000
12/9/2010	4:11:14 PM	SiCl4 MFC set to  0.000000
12/9/2010	4:11:14 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	4:11:14 PM	Tube furnace set to 0
12/9/2010	4:12:14 PM	Helium valve closed
12/9/2010	4:12:14 PM	H2 valve closed
12/9/2010	4:12:14 PM	BCl3 valve closed
12/9/2010	4:12:14 PM	PH3 valve closed
12/9/2010	4:12:14 PM	SiCl4 pre valve closed
12/9/2010	4:12:14 PM	SiCl4 post valve closed
12/9/2010	4:12:14 PM	Bubbler valve closed
12/9/2010	4:12:14 PM	Main Vac valve opened
12/9/2010	4:12:14 PM	Bypass valve opened
12/9/2010	4:12:14 PM	Helium MFC set to  0.000000
12/9/2010	4:12:14 PM	H2 MFC set to  0.000000
12/9/2010	4:12:14 PM	BCl3 MFC set to  0.000000
12/9/2010	4:12:14 PM	PHl3 MFC set to  0.000000
12/9/2010	4:12:14 PM	SiCl4 MFC set to  0.000000
12/9/2010	4:12:14 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	4:12:14 PM	Tube furnace set to 0
12/9/2010	4:13:14 PM	H2 valve closed
12/9/2010	4:13:14 PM	BCl3 valve closed
12/9/2010	4:13:14 PM	PH3 valve closed
12/9/2010	4:13:14 PM	SiCl4 pre valve closed
12/9/2010	4:13:14 PM	SiCl4 post valve closed
12/9/2010	4:13:14 PM	Bubbler valve closed
12/9/2010	4:13:14 PM	Helium valve opened
12/9/2010	4:13:14 PM	Main Vac valve opened
12/9/2010	4:13:14 PM	Bypass valve opened
12/9/2010	4:13:14 PM	Helium MFC set to  100.000000
12/9/2010	4:13:14 PM	H2 MFC set to  0.000000
12/9/2010	4:13:14 PM	BCl3 MFC set to  0.000000
12/9/2010	4:13:14 PM	PHl3 MFC set to  0.000000
12/9/2010	4:13:14 PM	SiCl4 MFC set to  0.000000
12/9/2010	4:13:14 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	4:13:14 PM	Tube furnace set to 0
12/9/2010	4:14:14 PM	Helium valve closed
12/9/2010	4:14:14 PM	H2 valve closed
12/9/2010	4:14:14 PM	BCl3 valve closed
12/9/2010	4:14:14 PM	PH3 valve closed
12/9/2010	4:14:14 PM	SiCl4 pre valve closed
12/9/2010	4:14:14 PM	SiCl4 post valve closed
12/9/2010	4:14:14 PM	Bubbler valve closed
12/9/2010	4:14:14 PM	Main Vac valve opened
12/9/2010	4:14:14 PM	Bypass valve opened
12/9/2010	4:14:14 PM	Helium MFC set to  0.000000
12/9/2010	4:14:14 PM	H2 MFC set to  0.000000
12/9/2010	4:14:14 PM	BCl3 MFC set to  0.000000
12/9/2010	4:14:14 PM	PHl3 MFC set to  0.000000
12/9/2010	4:14:14 PM	SiCl4 MFC set to  0.000000
12/9/2010	4:14:14 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	4:14:14 PM	Tube furnace set to 0
12/9/2010	4:15:14 PM	H2 valve closed
12/9/2010	4:15:14 PM	BCl3 valve closed
12/9/2010	4:15:14 PM	PH3 valve closed
12/9/2010	4:15:14 PM	SiCl4 pre valve closed
12/9/2010	4:15:14 PM	SiCl4 post valve closed
12/9/2010	4:15:14 PM	Bubbler valve closed
12/9/2010	4:15:14 PM	Helium valve opened
12/9/2010	4:15:14 PM	Main Vac valve opened
12/9/2010	4:15:14 PM	Bypass valve opened
12/9/2010	4:15:14 PM	Helium MFC set to  100.000000
12/9/2010	4:15:14 PM	H2 MFC set to  0.000000
12/9/2010	4:15:15 PM	BCl3 MFC set to  0.000000
12/9/2010	4:15:15 PM	PHl3 MFC set to  0.000000
12/9/2010	4:15:15 PM	SiCl4 MFC set to  0.000000
12/9/2010	4:15:15 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	4:15:15 PM	Tube furnace set to 0
12/9/2010	4:16:15 PM	Helium valve closed
12/9/2010	4:16:15 PM	H2 valve closed
12/9/2010	4:16:15 PM	BCl3 valve closed
12/9/2010	4:16:15 PM	PH3 valve closed
12/9/2010	4:16:15 PM	SiCl4 pre valve closed
12/9/2010	4:16:15 PM	SiCl4 post valve closed
12/9/2010	4:16:15 PM	Bubbler valve closed
12/9/2010	4:16:15 PM	Main Vac valve opened
12/9/2010	4:16:15 PM	Bypass valve opened
12/9/2010	4:16:15 PM	Helium MFC set to  0.000000
12/9/2010	4:16:15 PM	H2 MFC set to  0.000000
12/9/2010	4:16:15 PM	BCl3 MFC set to  0.000000
12/9/2010	4:16:15 PM	PHl3 MFC set to  0.000000
12/9/2010	4:16:15 PM	SiCl4 MFC set to  0.000000
12/9/2010	4:16:15 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	4:16:15 PM	Tube furnace set to 0
12/9/2010	4:17:15 PM	H2 valve closed
12/9/2010	4:17:15 PM	BCl3 valve closed
12/9/2010	4:17:15 PM	PH3 valve closed
12/9/2010	4:17:15 PM	SiCl4 pre valve closed
12/9/2010	4:17:15 PM	SiCl4 post valve closed
12/9/2010	4:17:15 PM	Bubbler valve closed
12/9/2010	4:17:15 PM	Helium valve opened
12/9/2010	4:17:15 PM	Main Vac valve opened
12/9/2010	4:17:15 PM	Bypass valve opened
12/9/2010	4:17:15 PM	Helium MFC set to  100.000000
12/9/2010	4:17:15 PM	H2 MFC set to  0.000000
12/9/2010	4:17:15 PM	BCl3 MFC set to  0.000000
12/9/2010	4:17:15 PM	PHl3 MFC set to  0.000000
12/9/2010	4:17:15 PM	SiCl4 MFC set to  0.000000
12/9/2010	4:17:15 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	4:17:15 PM	Tube furnace set to 0
12/9/2010	4:18:15 PM	Helium valve closed
12/9/2010	4:18:15 PM	H2 valve closed
12/9/2010	4:18:15 PM	BCl3 valve closed
12/9/2010	4:18:15 PM	PH3 valve closed
12/9/2010	4:18:15 PM	SiCl4 pre valve closed
12/9/2010	4:18:15 PM	SiCl4 post valve closed
12/9/2010	4:18:15 PM	Bubbler valve closed
12/9/2010	4:18:15 PM	Main Vac valve opened
12/9/2010	4:18:15 PM	Bypass valve opened
12/9/2010	4:18:15 PM	Helium MFC set to  0.000000
12/9/2010	4:18:15 PM	H2 MFC set to  0.000000
12/9/2010	4:18:15 PM	BCl3 MFC set to  0.000000
12/9/2010	4:18:15 PM	PHl3 MFC set to  0.000000
12/9/2010	4:18:15 PM	SiCl4 MFC set to  0.000000
12/9/2010	4:18:15 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	4:18:15 PM	Tube furnace set to 0
12/9/2010	4:19:15 PM	H2 valve closed
12/9/2010	4:19:15 PM	BCl3 valve closed
12/9/2010	4:19:15 PM	PH3 valve closed
12/9/2010	4:19:15 PM	SiCl4 pre valve closed
12/9/2010	4:19:15 PM	SiCl4 post valve closed
12/9/2010	4:19:15 PM	Bubbler valve closed
12/9/2010	4:19:15 PM	Helium valve opened
12/9/2010	4:19:15 PM	Main Vac valve opened
12/9/2010	4:19:15 PM	Bypass valve opened
12/9/2010	4:19:15 PM	Helium MFC set to  100.000000
12/9/2010	4:19:15 PM	H2 MFC set to  0.000000
12/9/2010	4:19:15 PM	BCl3 MFC set to  0.000000
12/9/2010	4:19:15 PM	PHl3 MFC set to  0.000000
12/9/2010	4:19:15 PM	SiCl4 MFC set to  0.000000
12/9/2010	4:19:15 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	4:19:15 PM	Tube furnace set to 0
12/9/2010	4:20:15 PM	Helium valve closed
12/9/2010	4:20:15 PM	H2 valve closed
12/9/2010	4:20:15 PM	BCl3 valve closed
12/9/2010	4:20:15 PM	PH3 valve closed
12/9/2010	4:20:15 PM	SiCl4 pre valve closed
12/9/2010	4:20:15 PM	SiCl4 post valve closed
12/9/2010	4:20:15 PM	Bubbler valve closed
12/9/2010	4:20:15 PM	Main Vac valve opened
12/9/2010	4:20:15 PM	Bypass valve opened
12/9/2010	4:20:15 PM	Helium MFC set to  0.000000
12/9/2010	4:20:15 PM	H2 MFC set to  0.000000
12/9/2010	4:20:15 PM	BCl3 MFC set to  0.000000
12/9/2010	4:20:15 PM	PHl3 MFC set to  0.000000
12/9/2010	4:20:15 PM	SiCl4 MFC set to  0.000000
12/9/2010	4:20:15 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	4:20:16 PM	Tube furnace set to 0
12/9/2010	4:21:16 PM	H2 valve closed
12/9/2010	4:21:16 PM	BCl3 valve closed
12/9/2010	4:21:16 PM	PH3 valve closed
12/9/2010	4:21:16 PM	SiCl4 pre valve closed
12/9/2010	4:21:16 PM	SiCl4 post valve closed
12/9/2010	4:21:16 PM	Bubbler valve closed
12/9/2010	4:21:16 PM	Helium valve opened
12/9/2010	4:21:16 PM	Main Vac valve opened
12/9/2010	4:21:16 PM	Bypass valve opened
12/9/2010	4:21:16 PM	Helium MFC set to  100.000000
12/9/2010	4:21:16 PM	H2 MFC set to  0.000000
12/9/2010	4:21:16 PM	BCl3 MFC set to  0.000000
12/9/2010	4:21:16 PM	PHl3 MFC set to  0.000000
12/9/2010	4:21:16 PM	SiCl4 MFC set to  0.000000
12/9/2010	4:21:16 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	4:21:16 PM	Tube furnace set to 0
12/9/2010	4:22:16 PM	Helium valve closed
12/9/2010	4:22:16 PM	H2 valve closed
12/9/2010	4:22:16 PM	BCl3 valve closed
12/9/2010	4:22:16 PM	PH3 valve closed
12/9/2010	4:22:16 PM	SiCl4 pre valve closed
12/9/2010	4:22:16 PM	SiCl4 post valve closed
12/9/2010	4:22:16 PM	Bubbler valve closed
12/9/2010	4:22:16 PM	Main Vac valve opened
12/9/2010	4:22:16 PM	Bypass valve opened
12/9/2010	4:22:16 PM	Helium MFC set to  0.000000
12/9/2010	4:22:16 PM	H2 MFC set to  0.000000
12/9/2010	4:22:16 PM	BCl3 MFC set to  0.000000
12/9/2010	4:22:16 PM	PHl3 MFC set to  0.000000
12/9/2010	4:22:16 PM	SiCl4 MFC set to  0.000000
12/9/2010	4:22:16 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	4:22:16 PM	Tube furnace set to 0
12/9/2010	4:23:16 PM	H2 valve closed
12/9/2010	4:23:16 PM	BCl3 valve closed
12/9/2010	4:23:16 PM	PH3 valve closed
12/9/2010	4:23:16 PM	SiCl4 pre valve closed
12/9/2010	4:23:16 PM	SiCl4 post valve closed
12/9/2010	4:23:16 PM	Bubbler valve closed
12/9/2010	4:23:16 PM	Helium valve opened
12/9/2010	4:23:16 PM	Main Vac valve opened
12/9/2010	4:23:16 PM	Bypass valve opened
12/9/2010	4:23:16 PM	Helium MFC set to  100.000000
12/9/2010	4:23:16 PM	H2 MFC set to  0.000000
12/9/2010	4:23:16 PM	BCl3 MFC set to  0.000000
12/9/2010	4:23:16 PM	PHl3 MFC set to  0.000000
12/9/2010	4:23:16 PM	SiCl4 MFC set to  0.000000
12/9/2010	4:23:16 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	4:23:16 PM	Tube furnace set to 0
12/9/2010	4:24:16 PM	Helium valve closed
12/9/2010	4:24:16 PM	H2 valve closed
12/9/2010	4:24:16 PM	BCl3 valve closed
12/9/2010	4:24:16 PM	PH3 valve closed
12/9/2010	4:24:16 PM	SiCl4 pre valve closed
12/9/2010	4:24:16 PM	SiCl4 post valve closed
12/9/2010	4:24:16 PM	Bubbler valve closed
12/9/2010	4:24:16 PM	Main Vac valve opened
12/9/2010	4:24:16 PM	Bypass valve opened
12/9/2010	4:24:16 PM	Helium MFC set to  0.000000
12/9/2010	4:24:16 PM	H2 MFC set to  0.000000
12/9/2010	4:24:16 PM	BCl3 MFC set to  0.000000
12/9/2010	4:24:16 PM	PHl3 MFC set to  0.000000
12/9/2010	4:24:16 PM	SiCl4 MFC set to  0.000000
12/9/2010	4:24:16 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	4:24:16 PM	Tube furnace set to 0
12/9/2010	4:25:16 PM	H2 valve closed
12/9/2010	4:25:16 PM	BCl3 valve closed
12/9/2010	4:25:16 PM	PH3 valve closed
12/9/2010	4:25:16 PM	SiCl4 pre valve closed
12/9/2010	4:25:16 PM	SiCl4 post valve closed
12/9/2010	4:25:16 PM	Bubbler valve closed
12/9/2010	4:25:16 PM	Helium valve opened
12/9/2010	4:25:16 PM	Main Vac valve opened
12/9/2010	4:25:16 PM	Bypass valve opened
12/9/2010	4:25:16 PM	Helium MFC set to  100.000000
12/9/2010	4:25:16 PM	H2 MFC set to  0.000000
12/9/2010	4:25:16 PM	BCl3 MFC set to  0.000000
12/9/2010	4:25:16 PM	PHl3 MFC set to  0.000000
12/9/2010	4:25:16 PM	SiCl4 MFC set to  0.000000
12/9/2010	4:25:16 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	4:25:17 PM	Tube furnace set to 0
12/9/2010	4:26:17 PM	Helium valve closed
12/9/2010	4:26:17 PM	H2 valve closed
12/9/2010	4:26:17 PM	BCl3 valve closed
12/9/2010	4:26:17 PM	PH3 valve closed
12/9/2010	4:26:17 PM	SiCl4 pre valve closed
12/9/2010	4:26:17 PM	SiCl4 post valve closed
12/9/2010	4:26:17 PM	Bubbler valve closed
12/9/2010	4:26:17 PM	Main Vac valve opened
12/9/2010	4:26:17 PM	Bypass valve opened
12/9/2010	4:26:17 PM	Helium MFC set to  0.000000
12/9/2010	4:26:17 PM	H2 MFC set to  0.000000
12/9/2010	4:26:17 PM	BCl3 MFC set to  0.000000
12/9/2010	4:26:17 PM	PHl3 MFC set to  0.000000
12/9/2010	4:26:17 PM	SiCl4 MFC set to  0.000000
12/9/2010	4:26:17 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	4:26:17 PM	Tube furnace set to 0
12/9/2010	4:27:17 PM	H2 valve closed
12/9/2010	4:27:17 PM	BCl3 valve closed
12/9/2010	4:27:17 PM	PH3 valve closed
12/9/2010	4:27:17 PM	SiCl4 pre valve closed
12/9/2010	4:27:17 PM	SiCl4 post valve closed
12/9/2010	4:27:17 PM	Bubbler valve closed
12/9/2010	4:27:17 PM	Helium valve opened
12/9/2010	4:27:17 PM	Main Vac valve opened
12/9/2010	4:27:17 PM	Bypass valve opened
12/9/2010	4:27:17 PM	Helium MFC set to  100.000000
12/9/2010	4:27:17 PM	H2 MFC set to  0.000000
12/9/2010	4:27:17 PM	BCl3 MFC set to  0.000000
12/9/2010	4:27:17 PM	PHl3 MFC set to  0.000000
12/9/2010	4:27:17 PM	SiCl4 MFC set to  0.000000
12/9/2010	4:27:17 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	4:27:17 PM	Tube furnace set to 0
12/9/2010	4:28:17 PM	Helium valve closed
12/9/2010	4:28:17 PM	H2 valve closed
12/9/2010	4:28:17 PM	BCl3 valve closed
12/9/2010	4:28:17 PM	PH3 valve closed
12/9/2010	4:28:17 PM	SiCl4 pre valve closed
12/9/2010	4:28:17 PM	SiCl4 post valve closed
12/9/2010	4:28:17 PM	Bubbler valve closed
12/9/2010	4:28:17 PM	Main Vac valve opened
12/9/2010	4:28:17 PM	Bypass valve opened
12/9/2010	4:28:17 PM	Helium MFC set to  0.000000
12/9/2010	4:28:17 PM	H2 MFC set to  0.000000
12/9/2010	4:28:17 PM	BCl3 MFC set to  0.000000
12/9/2010	4:28:17 PM	PHl3 MFC set to  0.000000
12/9/2010	4:28:17 PM	SiCl4 MFC set to  0.000000
12/9/2010	4:28:17 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	4:28:17 PM	Tube furnace set to 0
12/9/2010	4:28:18 PM	Run finished at 4:28 PM
12/9/2010	4:28:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/9/2010	5:35:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/9/2010	5:35:59 PM	Recipe started at 5:35 PM
12/9/2010	5:36:00 PM	Helium valve closed
12/9/2010	5:36:00 PM	H2 valve closed
12/9/2010	5:36:00 PM	BCl3 valve closed
12/9/2010	5:36:00 PM	PH3 valve closed
12/9/2010	5:36:00 PM	SiCl4 pre valve closed
12/9/2010	5:36:00 PM	SiCl4 post valve closed
12/9/2010	5:36:00 PM	Main Vac valve closed
12/9/2010	5:36:00 PM	Bubbler valve closed
12/9/2010	5:36:00 PM	Bypass valve opened
12/9/2010	5:36:00 PM	Helium MFC set to  0.000000
12/9/2010	5:36:00 PM	H2 MFC set to  0.000000
12/9/2010	5:36:00 PM	BCl3 MFC set to  0.000000
12/9/2010	5:36:00 PM	PHl3 MFC set to  0.000000
12/9/2010	5:36:00 PM	SiCl4 MFC set to  0.000000
12/9/2010	5:36:00 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	5:36:00 PM	Tube furnace set to 0
12/9/2010	5:36:00 PM	Helium valve closed
12/9/2010	5:36:00 PM	H2 valve closed
12/9/2010	5:36:00 PM	BCl3 valve closed
12/9/2010	5:36:00 PM	PH3 valve closed
12/9/2010	5:36:00 PM	SiCl4 pre valve closed
12/9/2010	5:36:00 PM	SiCl4 post valve closed
12/9/2010	5:36:00 PM	Bubbler valve closed
12/9/2010	5:36:00 PM	Main Vac valve opened
12/9/2010	5:36:00 PM	Bypass valve opened
12/9/2010	5:36:00 PM	Helium MFC set to  0.000000
12/9/2010	5:36:00 PM	H2 MFC set to  0.000000
12/9/2010	5:36:00 PM	BCl3 MFC set to  0.000000
12/9/2010	5:36:00 PM	PHl3 MFC set to  0.000000
12/9/2010	5:36:00 PM	SiCl4 MFC set to  0.000000
12/9/2010	5:36:00 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	5:36:00 PM	Tube furnace set to 0
12/9/2010	5:37:00 PM	H2 valve closed
12/9/2010	5:37:00 PM	BCl3 valve closed
12/9/2010	5:37:00 PM	PH3 valve closed
12/9/2010	5:37:00 PM	SiCl4 pre valve closed
12/9/2010	5:37:00 PM	SiCl4 post valve closed
12/9/2010	5:37:00 PM	Bubbler valve closed
12/9/2010	5:37:00 PM	Helium valve opened
12/9/2010	5:37:00 PM	Main Vac valve opened
12/9/2010	5:37:00 PM	Bypass valve opened
12/9/2010	5:37:00 PM	Helium MFC set to  100.000000
12/9/2010	5:37:00 PM	H2 MFC set to  0.000000
12/9/2010	5:37:00 PM	BCl3 MFC set to  0.000000
12/9/2010	5:37:00 PM	PHl3 MFC set to  0.000000
12/9/2010	5:37:00 PM	SiCl4 MFC set to  0.000000
12/9/2010	5:37:00 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	5:37:00 PM	Tube furnace set to 0
12/9/2010	5:38:00 PM	Helium valve closed
12/9/2010	5:38:00 PM	H2 valve closed
12/9/2010	5:38:00 PM	BCl3 valve closed
12/9/2010	5:38:00 PM	PH3 valve closed
12/9/2010	5:38:00 PM	SiCl4 pre valve closed
12/9/2010	5:38:00 PM	SiCl4 post valve closed
12/9/2010	5:38:00 PM	Bubbler valve closed
12/9/2010	5:38:00 PM	Main Vac valve opened
12/9/2010	5:38:00 PM	Bypass valve opened
12/9/2010	5:38:00 PM	Helium MFC set to  0.000000
12/9/2010	5:38:00 PM	H2 MFC set to  0.000000
12/9/2010	5:38:00 PM	BCl3 MFC set to  0.000000
12/9/2010	5:38:00 PM	PHl3 MFC set to  0.000000
12/9/2010	5:38:00 PM	SiCl4 MFC set to  0.000000
12/9/2010	5:38:00 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	5:38:01 PM	Tube furnace set to 0
12/9/2010	5:39:01 PM	H2 valve closed
12/9/2010	5:39:01 PM	BCl3 valve closed
12/9/2010	5:39:01 PM	PH3 valve closed
12/9/2010	5:39:01 PM	SiCl4 pre valve closed
12/9/2010	5:39:01 PM	SiCl4 post valve closed
12/9/2010	5:39:01 PM	Bubbler valve closed
12/9/2010	5:39:01 PM	Helium valve opened
12/9/2010	5:39:01 PM	Main Vac valve opened
12/9/2010	5:39:01 PM	Bypass valve opened
12/9/2010	5:39:01 PM	Helium MFC set to  100.000000
12/9/2010	5:39:01 PM	H2 MFC set to  0.000000
12/9/2010	5:39:01 PM	BCl3 MFC set to  0.000000
12/9/2010	5:39:01 PM	PHl3 MFC set to  0.000000
12/9/2010	5:39:01 PM	SiCl4 MFC set to  0.000000
12/9/2010	5:39:01 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	5:39:01 PM	Tube furnace set to 0
12/9/2010	5:40:01 PM	Helium valve closed
12/9/2010	5:40:01 PM	H2 valve closed
12/9/2010	5:40:01 PM	BCl3 valve closed
12/9/2010	5:40:01 PM	PH3 valve closed
12/9/2010	5:40:01 PM	SiCl4 pre valve closed
12/9/2010	5:40:01 PM	SiCl4 post valve closed
12/9/2010	5:40:01 PM	Bubbler valve closed
12/9/2010	5:40:01 PM	Main Vac valve opened
12/9/2010	5:40:01 PM	Bypass valve opened
12/9/2010	5:40:01 PM	Helium MFC set to  0.000000
12/9/2010	5:40:01 PM	H2 MFC set to  0.000000
12/9/2010	5:40:01 PM	BCl3 MFC set to  0.000000
12/9/2010	5:40:01 PM	PHl3 MFC set to  0.000000
12/9/2010	5:40:01 PM	SiCl4 MFC set to  0.000000
12/9/2010	5:40:01 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	5:40:01 PM	Tube furnace set to 0
12/9/2010	5:41:01 PM	H2 valve closed
12/9/2010	5:41:01 PM	BCl3 valve closed
12/9/2010	5:41:01 PM	PH3 valve closed
12/9/2010	5:41:01 PM	SiCl4 pre valve closed
12/9/2010	5:41:01 PM	SiCl4 post valve closed
12/9/2010	5:41:01 PM	Bubbler valve closed
12/9/2010	5:41:01 PM	Helium valve opened
12/9/2010	5:41:01 PM	Main Vac valve opened
12/9/2010	5:41:01 PM	Bypass valve opened
12/9/2010	5:41:01 PM	Helium MFC set to  100.000000
12/9/2010	5:41:01 PM	H2 MFC set to  0.000000
12/9/2010	5:41:01 PM	BCl3 MFC set to  0.000000
12/9/2010	5:41:01 PM	PHl3 MFC set to  0.000000
12/9/2010	5:41:01 PM	SiCl4 MFC set to  0.000000
12/9/2010	5:41:01 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	5:41:01 PM	Tube furnace set to 0
12/9/2010	5:42:01 PM	Helium valve closed
12/9/2010	5:42:01 PM	H2 valve closed
12/9/2010	5:42:01 PM	BCl3 valve closed
12/9/2010	5:42:01 PM	PH3 valve closed
12/9/2010	5:42:01 PM	SiCl4 pre valve closed
12/9/2010	5:42:01 PM	SiCl4 post valve closed
12/9/2010	5:42:01 PM	Bubbler valve closed
12/9/2010	5:42:01 PM	Main Vac valve opened
12/9/2010	5:42:01 PM	Bypass valve opened
12/9/2010	5:42:01 PM	Helium MFC set to  0.000000
12/9/2010	5:42:01 PM	H2 MFC set to  0.000000
12/9/2010	5:42:01 PM	BCl3 MFC set to  0.000000
12/9/2010	5:42:01 PM	PHl3 MFC set to  0.000000
12/9/2010	5:42:01 PM	SiCl4 MFC set to  0.000000
12/9/2010	5:42:01 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	5:42:01 PM	Tube furnace set to 0
12/9/2010	5:43:01 PM	H2 valve closed
12/9/2010	5:43:01 PM	BCl3 valve closed
12/9/2010	5:43:01 PM	PH3 valve closed
12/9/2010	5:43:01 PM	SiCl4 pre valve closed
12/9/2010	5:43:01 PM	SiCl4 post valve closed
12/9/2010	5:43:01 PM	Bubbler valve closed
12/9/2010	5:43:01 PM	Helium valve opened
12/9/2010	5:43:01 PM	Main Vac valve opened
12/9/2010	5:43:01 PM	Bypass valve opened
12/9/2010	5:43:01 PM	Helium MFC set to  100.000000
12/9/2010	5:43:01 PM	H2 MFC set to  0.000000
12/9/2010	5:43:01 PM	BCl3 MFC set to  0.000000
12/9/2010	5:43:01 PM	PHl3 MFC set to  0.000000
12/9/2010	5:43:01 PM	SiCl4 MFC set to  0.000000
12/9/2010	5:43:01 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	5:43:02 PM	Tube furnace set to 0
12/9/2010	5:44:02 PM	Helium valve closed
12/9/2010	5:44:02 PM	H2 valve closed
12/9/2010	5:44:02 PM	BCl3 valve closed
12/9/2010	5:44:02 PM	PH3 valve closed
12/9/2010	5:44:02 PM	SiCl4 pre valve closed
12/9/2010	5:44:02 PM	SiCl4 post valve closed
12/9/2010	5:44:02 PM	Bubbler valve closed
12/9/2010	5:44:02 PM	Main Vac valve opened
12/9/2010	5:44:02 PM	Bypass valve opened
12/9/2010	5:44:02 PM	Helium MFC set to  0.000000
12/9/2010	5:44:02 PM	H2 MFC set to  0.000000
12/9/2010	5:44:02 PM	BCl3 MFC set to  0.000000
12/9/2010	5:44:02 PM	PHl3 MFC set to  0.000000
12/9/2010	5:44:02 PM	SiCl4 MFC set to  0.000000
12/9/2010	5:44:02 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	5:44:02 PM	Tube furnace set to 0
12/9/2010	5:45:02 PM	H2 valve closed
12/9/2010	5:45:02 PM	BCl3 valve closed
12/9/2010	5:45:02 PM	PH3 valve closed
12/9/2010	5:45:02 PM	SiCl4 pre valve closed
12/9/2010	5:45:02 PM	SiCl4 post valve closed
12/9/2010	5:45:02 PM	Bubbler valve closed
12/9/2010	5:45:02 PM	Helium valve opened
12/9/2010	5:45:02 PM	Main Vac valve opened
12/9/2010	5:45:02 PM	Bypass valve opened
12/9/2010	5:45:02 PM	Helium MFC set to  100.000000
12/9/2010	5:45:02 PM	H2 MFC set to  0.000000
12/9/2010	5:45:02 PM	BCl3 MFC set to  0.000000
12/9/2010	5:45:02 PM	PHl3 MFC set to  0.000000
12/9/2010	5:45:02 PM	SiCl4 MFC set to  0.000000
12/9/2010	5:45:02 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	5:45:02 PM	Tube furnace set to 0
12/9/2010	5:46:02 PM	Helium valve closed
12/9/2010	5:46:02 PM	H2 valve closed
12/9/2010	5:46:02 PM	BCl3 valve closed
12/9/2010	5:46:02 PM	PH3 valve closed
12/9/2010	5:46:02 PM	SiCl4 pre valve closed
12/9/2010	5:46:02 PM	SiCl4 post valve closed
12/9/2010	5:46:02 PM	Bubbler valve closed
12/9/2010	5:46:02 PM	Main Vac valve opened
12/9/2010	5:46:02 PM	Bypass valve opened
12/9/2010	5:46:02 PM	Helium MFC set to  0.000000
12/9/2010	5:46:02 PM	H2 MFC set to  0.000000
12/9/2010	5:46:02 PM	BCl3 MFC set to  0.000000
12/9/2010	5:46:02 PM	PHl3 MFC set to  0.000000
12/9/2010	5:46:02 PM	SiCl4 MFC set to  0.000000
12/9/2010	5:46:02 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	5:46:02 PM	Tube furnace set to 0
12/9/2010	5:47:02 PM	H2 valve closed
12/9/2010	5:47:02 PM	BCl3 valve closed
12/9/2010	5:47:02 PM	PH3 valve closed
12/9/2010	5:47:02 PM	SiCl4 pre valve closed
12/9/2010	5:47:02 PM	SiCl4 post valve closed
12/9/2010	5:47:02 PM	Bubbler valve closed
12/9/2010	5:47:02 PM	Helium valve opened
12/9/2010	5:47:02 PM	Main Vac valve opened
12/9/2010	5:47:02 PM	Bypass valve opened
12/9/2010	5:47:02 PM	Helium MFC set to  100.000000
12/9/2010	5:47:02 PM	H2 MFC set to  0.000000
12/9/2010	5:47:02 PM	BCl3 MFC set to  0.000000
12/9/2010	5:47:02 PM	PHl3 MFC set to  0.000000
12/9/2010	5:47:02 PM	SiCl4 MFC set to  0.000000
12/9/2010	5:47:02 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	5:47:02 PM	Tube furnace set to 0
12/9/2010	5:48:02 PM	Helium valve closed
12/9/2010	5:48:02 PM	H2 valve closed
12/9/2010	5:48:02 PM	BCl3 valve closed
12/9/2010	5:48:02 PM	PH3 valve closed
12/9/2010	5:48:02 PM	SiCl4 pre valve closed
12/9/2010	5:48:02 PM	SiCl4 post valve closed
12/9/2010	5:48:02 PM	Bubbler valve closed
12/9/2010	5:48:02 PM	Main Vac valve opened
12/9/2010	5:48:02 PM	Bypass valve opened
12/9/2010	5:48:02 PM	Helium MFC set to  0.000000
12/9/2010	5:48:02 PM	H2 MFC set to  0.000000
12/9/2010	5:48:02 PM	BCl3 MFC set to  0.000000
12/9/2010	5:48:02 PM	PHl3 MFC set to  0.000000
12/9/2010	5:48:02 PM	SiCl4 MFC set to  0.000000
12/9/2010	5:48:02 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	5:48:02 PM	Tube furnace set to 0
12/9/2010	5:49:03 PM	H2 valve closed
12/9/2010	5:49:03 PM	BCl3 valve closed
12/9/2010	5:49:03 PM	PH3 valve closed
12/9/2010	5:49:03 PM	SiCl4 pre valve closed
12/9/2010	5:49:03 PM	SiCl4 post valve closed
12/9/2010	5:49:03 PM	Bubbler valve closed
12/9/2010	5:49:03 PM	Helium valve opened
12/9/2010	5:49:03 PM	Main Vac valve opened
12/9/2010	5:49:03 PM	Bypass valve opened
12/9/2010	5:49:03 PM	Helium MFC set to  100.000000
12/9/2010	5:49:03 PM	H2 MFC set to  0.000000
12/9/2010	5:49:03 PM	BCl3 MFC set to  0.000000
12/9/2010	5:49:03 PM	PHl3 MFC set to  0.000000
12/9/2010	5:49:03 PM	SiCl4 MFC set to  0.000000
12/9/2010	5:49:03 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	5:49:03 PM	Tube furnace set to 0
12/9/2010	5:50:03 PM	Helium valve closed
12/9/2010	5:50:03 PM	H2 valve closed
12/9/2010	5:50:03 PM	BCl3 valve closed
12/9/2010	5:50:03 PM	PH3 valve closed
12/9/2010	5:50:03 PM	SiCl4 pre valve closed
12/9/2010	5:50:03 PM	SiCl4 post valve closed
12/9/2010	5:50:03 PM	Bubbler valve closed
12/9/2010	5:50:03 PM	Main Vac valve opened
12/9/2010	5:50:03 PM	Bypass valve opened
12/9/2010	5:50:03 PM	Helium MFC set to  0.000000
12/9/2010	5:50:03 PM	H2 MFC set to  0.000000
12/9/2010	5:50:03 PM	BCl3 MFC set to  0.000000
12/9/2010	5:50:03 PM	PHl3 MFC set to  0.000000
12/9/2010	5:50:03 PM	SiCl4 MFC set to  0.000000
12/9/2010	5:50:03 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	5:50:03 PM	Tube furnace set to 0
12/9/2010	5:51:03 PM	H2 valve closed
12/9/2010	5:51:03 PM	BCl3 valve closed
12/9/2010	5:51:03 PM	PH3 valve closed
12/9/2010	5:51:03 PM	SiCl4 pre valve closed
12/9/2010	5:51:03 PM	SiCl4 post valve closed
12/9/2010	5:51:03 PM	Bubbler valve closed
12/9/2010	5:51:03 PM	Helium valve opened
12/9/2010	5:51:03 PM	Main Vac valve opened
12/9/2010	5:51:03 PM	Bypass valve opened
12/9/2010	5:51:03 PM	Helium MFC set to  100.000000
12/9/2010	5:51:03 PM	H2 MFC set to  0.000000
12/9/2010	5:51:03 PM	BCl3 MFC set to  0.000000
12/9/2010	5:51:03 PM	PHl3 MFC set to  0.000000
12/9/2010	5:51:03 PM	SiCl4 MFC set to  0.000000
12/9/2010	5:51:03 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	5:51:03 PM	Tube furnace set to 0
12/9/2010	5:52:03 PM	Helium valve closed
12/9/2010	5:52:03 PM	H2 valve closed
12/9/2010	5:52:03 PM	BCl3 valve closed
12/9/2010	5:52:03 PM	PH3 valve closed
12/9/2010	5:52:03 PM	SiCl4 pre valve closed
12/9/2010	5:52:03 PM	SiCl4 post valve closed
12/9/2010	5:52:03 PM	Bubbler valve closed
12/9/2010	5:52:03 PM	Main Vac valve opened
12/9/2010	5:52:03 PM	Bypass valve opened
12/9/2010	5:52:03 PM	Helium MFC set to  0.000000
12/9/2010	5:52:03 PM	H2 MFC set to  0.000000
12/9/2010	5:52:03 PM	BCl3 MFC set to  0.000000
12/9/2010	5:52:03 PM	PHl3 MFC set to  0.000000
12/9/2010	5:52:03 PM	SiCl4 MFC set to  0.000000
12/9/2010	5:52:03 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	5:52:03 PM	Tube furnace set to 0
12/9/2010	5:53:03 PM	H2 valve closed
12/9/2010	5:53:03 PM	BCl3 valve closed
12/9/2010	5:53:03 PM	PH3 valve closed
12/9/2010	5:53:03 PM	SiCl4 pre valve closed
12/9/2010	5:53:03 PM	SiCl4 post valve closed
12/9/2010	5:53:03 PM	Bubbler valve closed
12/9/2010	5:53:03 PM	Helium valve opened
12/9/2010	5:53:03 PM	Main Vac valve opened
12/9/2010	5:53:03 PM	Bypass valve opened
12/9/2010	5:53:03 PM	Helium MFC set to  100.000000
12/9/2010	5:53:03 PM	H2 MFC set to  0.000000
12/9/2010	5:53:03 PM	BCl3 MFC set to  0.000000
12/9/2010	5:53:03 PM	PHl3 MFC set to  0.000000
12/9/2010	5:53:03 PM	SiCl4 MFC set to  0.000000
12/9/2010	5:53:03 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	5:53:03 PM	Tube furnace set to 0
12/9/2010	5:54:03 PM	Helium valve closed
12/9/2010	5:54:03 PM	H2 valve closed
12/9/2010	5:54:03 PM	BCl3 valve closed
12/9/2010	5:54:03 PM	PH3 valve closed
12/9/2010	5:54:04 PM	SiCl4 pre valve closed
12/9/2010	5:54:04 PM	SiCl4 post valve closed
12/9/2010	5:54:04 PM	Bubbler valve closed
12/9/2010	5:54:04 PM	Main Vac valve opened
12/9/2010	5:54:04 PM	Bypass valve opened
12/9/2010	5:54:04 PM	Helium MFC set to  0.000000
12/9/2010	5:54:04 PM	H2 MFC set to  0.000000
12/9/2010	5:54:04 PM	BCl3 MFC set to  0.000000
12/9/2010	5:54:04 PM	PHl3 MFC set to  0.000000
12/9/2010	5:54:04 PM	SiCl4 MFC set to  0.000000
12/9/2010	5:54:04 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	5:54:04 PM	Tube furnace set to 0
12/9/2010	5:54:30 PM	Run aborted at 5:54 PM
12/9/2010	5:54:30 PM	Helium valve closed
12/9/2010	5:54:30 PM	H2 valve closed
12/9/2010	5:54:30 PM	BCl3 valve closed
12/9/2010	5:54:30 PM	PH3 valve closed
12/9/2010	5:54:30 PM	SiCl4 pre valve closed
12/9/2010	5:54:30 PM	SiCl4 post valve closed
12/9/2010	5:54:30 PM	Bypass valve closed
12/9/2010	5:54:30 PM	Main Vac valve closed
12/9/2010	5:54:30 PM	Bubbler valve closed
12/9/2010	5:54:30 PM	Helium MFC set to  0.000000
12/9/2010	5:54:30 PM	H2 MFC set to  0.000000
12/9/2010	5:54:30 PM	BCl3 MFC set to  0.000000
12/9/2010	5:54:30 PM	PHl3 MFC set to  0.000000
12/9/2010	5:54:30 PM	SiCl4 MFC set to  0.000000
12/9/2010	5:54:30 PM	Tube furnace set to 0
12/9/2010	5:54:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/9/2010	5:54:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/9/2010	5:54:36 PM	Recipe started at 5:54 PM
12/9/2010	5:54:36 PM	Helium valve closed
12/9/2010	5:54:36 PM	H2 valve closed
12/9/2010	5:54:36 PM	BCl3 valve closed
12/9/2010	5:54:36 PM	PH3 valve closed
12/9/2010	5:54:36 PM	SiCl4 pre valve closed
12/9/2010	5:54:36 PM	SiCl4 post valve closed
12/9/2010	5:54:36 PM	Main Vac valve closed
12/9/2010	5:54:36 PM	Bubbler valve closed
12/9/2010	5:54:36 PM	Bypass valve opened
12/9/2010	5:54:36 PM	Helium MFC set to  0.000000
12/9/2010	5:54:36 PM	H2 MFC set to  0.000000
12/9/2010	5:54:36 PM	BCl3 MFC set to  0.000000
12/9/2010	5:54:36 PM	PHl3 MFC set to  0.000000
12/9/2010	5:54:36 PM	SiCl4 MFC set to  0.000000
12/9/2010	5:54:36 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	5:54:36 PM	Tube furnace set to 0
12/9/2010	5:54:36 PM	Helium valve closed
12/9/2010	5:54:36 PM	H2 valve closed
12/9/2010	5:54:36 PM	BCl3 valve closed
12/9/2010	5:54:36 PM	PH3 valve closed
12/9/2010	5:54:36 PM	SiCl4 pre valve closed
12/9/2010	5:54:36 PM	SiCl4 post valve closed
12/9/2010	5:54:36 PM	Bubbler valve closed
12/9/2010	5:54:36 PM	Main Vac valve opened
12/9/2010	5:54:36 PM	Bypass valve opened
12/9/2010	5:54:36 PM	Helium MFC set to  0.000000
12/9/2010	5:54:36 PM	H2 MFC set to  0.000000
12/9/2010	5:54:36 PM	BCl3 MFC set to  0.000000
12/9/2010	5:54:36 PM	PHl3 MFC set to  0.000000
12/9/2010	5:54:36 PM	SiCl4 MFC set to  0.000000
12/9/2010	5:54:36 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	5:54:36 PM	Tube furnace set to 0
12/9/2010	5:54:37 PM	Run finished at 5:54 PM
12/9/2010	5:54:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/9/2010	5:55:28 PM	Bypass valve closed
12/9/2010	5:55:28 PM	Main Vac valve closed
12/9/2010	5:55:44 PM	Main Vac valve opened
12/9/2010	5:55:45 PM	Bypass valve opened
12/9/2010	5:56:25 PM	Recipe started at 5:56 PM
12/9/2010	5:56:25 PM	Helium valve closed
12/9/2010	5:56:25 PM	BCl3 valve closed
12/9/2010	5:56:25 PM	PH3 valve closed
12/9/2010	5:56:25 PM	SiCl4 pre valve closed
12/9/2010	5:56:25 PM	SiCl4 post valve closed
12/9/2010	5:56:25 PM	Main Vac valve closed
12/9/2010	5:56:25 PM	Bypass valve closed
12/9/2010	5:56:25 PM	Bubbler valve closed
12/9/2010	5:56:25 PM	H2 valve opened
12/9/2010	5:56:25 PM	Helium MFC set to  0.000000
12/9/2010	5:56:25 PM	H2 MFC set to  500.000000
12/9/2010	5:56:25 PM	BCl3 MFC set to  0.000000
12/9/2010	5:56:25 PM	PHl3 MFC set to  0.000000
12/9/2010	5:56:25 PM	SiCl4 MFC set to  0.000000
12/9/2010	5:56:25 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	5:56:25 PM	Tube furnace set to 0
12/9/2010	5:57:48 PM	Helium valve closed
12/9/2010	5:57:48 PM	BCl3 valve closed
12/9/2010	5:57:48 PM	PH3 valve closed
12/9/2010	5:57:48 PM	SiCl4 pre valve closed
12/9/2010	5:57:48 PM	SiCl4 post valve closed
12/9/2010	5:57:48 PM	Main Vac valve closed
12/9/2010	5:57:48 PM	Bypass valve closed
12/9/2010	5:57:48 PM	H2 valve opened
12/9/2010	5:57:48 PM	Bubbler valve opened
12/9/2010	5:57:48 PM	Helium MFC set to  0.000000
12/9/2010	5:57:48 PM	H2 MFC set to  500.000000
12/9/2010	5:57:48 PM	BCl3 MFC set to  0.000000
12/9/2010	5:57:48 PM	PHl3 MFC set to  0.000000
12/9/2010	5:57:48 PM	SiCl4 MFC set to  0.000000
12/9/2010	5:57:48 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	5:57:48 PM	Tube furnace set to 1000
12/9/2010	6:17:48 PM	Helium valve closed
12/9/2010	6:17:48 PM	BCl3 valve closed
12/9/2010	6:17:48 PM	Main Vac valve closed
12/9/2010	6:17:48 PM	Bypass valve closed
12/9/2010	6:17:48 PM	H2 valve opened
12/9/2010	6:17:48 PM	PH3 valve opened
12/9/2010	6:17:48 PM	SiCl4 pre valve opened
12/9/2010	6:17:48 PM	SiCl4 post valve opened
12/9/2010	6:17:48 PM	Bubbler valve opened
12/9/2010	6:17:48 PM	Helium MFC set to  0.000000
12/9/2010	6:17:48 PM	H2 MFC set to  500.000000
12/9/2010	6:17:48 PM	BCl3 MFC set to  0.000000
12/9/2010	6:17:48 PM	PHl3 MFC set to  1.000000
12/9/2010	6:17:48 PM	SiCl4 MFC set to  50.000000
12/9/2010	6:17:48 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	6:17:48 PM	Tube furnace set to 1000
12/9/2010	6:47:48 PM	H2 valve closed
12/9/2010	6:47:48 PM	BCl3 valve closed
12/9/2010	6:47:48 PM	PH3 valve closed
12/9/2010	6:47:48 PM	SiCl4 pre valve closed
12/9/2010	6:47:48 PM	SiCl4 post valve closed
12/9/2010	6:47:48 PM	Main Vac valve closed
12/9/2010	6:47:48 PM	Bypass valve closed
12/9/2010	6:47:48 PM	Helium valve opened
12/9/2010	6:47:48 PM	Bubbler valve opened
12/9/2010	6:47:48 PM	Helium MFC set to  500.000000
12/9/2010	6:47:48 PM	H2 MFC set to  0.000000
12/9/2010	6:47:48 PM	BCl3 MFC set to  0.000000
12/9/2010	6:47:48 PM	PHl3 MFC set to  0.000000
12/9/2010	6:47:48 PM	SiCl4 MFC set to  0.000000
12/9/2010	6:47:48 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	6:47:49 PM	Tube furnace set to 0
12/9/2010	7:07:48 PM	Helium valve closed
12/9/2010	7:07:49 PM	H2 valve closed
12/9/2010	7:07:49 PM	BCl3 valve closed
12/9/2010	7:07:49 PM	PH3 valve closed
12/9/2010	7:07:49 PM	SiCl4 pre valve closed
12/9/2010	7:07:49 PM	SiCl4 post valve closed
12/9/2010	7:07:49 PM	Main Vac valve closed
12/9/2010	7:07:49 PM	Bypass valve closed
12/9/2010	7:07:49 PM	Bubbler valve closed
12/9/2010	7:07:49 PM	Helium MFC set to  0.000000
12/9/2010	7:07:49 PM	H2 MFC set to  0.000000
12/9/2010	7:07:49 PM	BCl3 MFC set to  0.000000
12/9/2010	7:07:49 PM	PHl3 MFC set to  0.000000
12/9/2010	7:07:49 PM	SiCl4 MFC set to  0.000000
12/9/2010	7:07:49 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	7:07:49 PM	Tube furnace set to 0
12/9/2010	7:07:49 PM	Run finished at 7:07 PM
12/9/2010	8:27:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/9/2010	8:27:58 PM	Recipe started at 8:27 PM
12/9/2010	8:27:58 PM	Helium valve closed
12/9/2010	8:27:58 PM	H2 valve closed
12/9/2010	8:27:58 PM	BCl3 valve closed
12/9/2010	8:27:58 PM	PH3 valve closed
12/9/2010	8:27:58 PM	SiCl4 pre valve closed
12/9/2010	8:27:58 PM	SiCl4 post valve closed
12/9/2010	8:27:58 PM	Main Vac valve closed
12/9/2010	8:27:58 PM	Bubbler valve closed
12/9/2010	8:27:58 PM	Bypass valve opened
12/9/2010	8:27:58 PM	Helium MFC set to  0.000000
12/9/2010	8:27:58 PM	H2 MFC set to  0.000000
12/9/2010	8:27:58 PM	BCl3 MFC set to  0.000000
12/9/2010	8:27:58 PM	PHl3 MFC set to  0.000000
12/9/2010	8:27:58 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:27:58 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:27:59 PM	Tube furnace set to 0
12/9/2010	8:28:54 PM	Helium valve closed
12/9/2010	8:28:54 PM	H2 valve closed
12/9/2010	8:28:54 PM	BCl3 valve closed
12/9/2010	8:28:54 PM	PH3 valve closed
12/9/2010	8:28:54 PM	SiCl4 pre valve closed
12/9/2010	8:28:54 PM	SiCl4 post valve closed
12/9/2010	8:28:54 PM	Bubbler valve closed
12/9/2010	8:28:54 PM	Main Vac valve opened
12/9/2010	8:28:54 PM	Bypass valve opened
12/9/2010	8:28:54 PM	Helium MFC set to  0.000000
12/9/2010	8:28:54 PM	H2 MFC set to  0.000000
12/9/2010	8:28:54 PM	BCl3 MFC set to  0.000000
12/9/2010	8:28:54 PM	PHl3 MFC set to  0.000000
12/9/2010	8:28:54 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:28:54 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:28:54 PM	Tube furnace set to 0
12/9/2010	8:28:54 PM	Run finished at 8:28 PM
12/9/2010	8:28:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/9/2010	8:29:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/9/2010	8:29:19 PM	Recipe started at 8:29 PM
12/9/2010	8:29:19 PM	Helium valve closed
12/9/2010	8:29:19 PM	H2 valve closed
12/9/2010	8:29:19 PM	BCl3 valve closed
12/9/2010	8:29:19 PM	PH3 valve closed
12/9/2010	8:29:19 PM	SiCl4 pre valve closed
12/9/2010	8:29:19 PM	SiCl4 post valve closed
12/9/2010	8:29:19 PM	Main Vac valve closed
12/9/2010	8:29:19 PM	Bubbler valve closed
12/9/2010	8:29:19 PM	Bypass valve opened
12/9/2010	8:29:19 PM	Helium MFC set to  0.000000
12/9/2010	8:29:19 PM	H2 MFC set to  0.000000
12/9/2010	8:29:19 PM	BCl3 MFC set to  0.000000
12/9/2010	8:29:19 PM	PHl3 MFC set to  0.000000
12/9/2010	8:29:19 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:29:19 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:29:19 PM	Tube furnace set to 0
12/9/2010	8:29:19 PM	Helium valve closed
12/9/2010	8:29:19 PM	H2 valve closed
12/9/2010	8:29:19 PM	BCl3 valve closed
12/9/2010	8:29:19 PM	PH3 valve closed
12/9/2010	8:29:19 PM	SiCl4 pre valve closed
12/9/2010	8:29:19 PM	SiCl4 post valve closed
12/9/2010	8:29:19 PM	Bubbler valve closed
12/9/2010	8:29:19 PM	Main Vac valve opened
12/9/2010	8:29:19 PM	Bypass valve opened
12/9/2010	8:29:19 PM	Helium MFC set to  0.000000
12/9/2010	8:29:19 PM	H2 MFC set to  0.000000
12/9/2010	8:29:19 PM	BCl3 MFC set to  0.000000
12/9/2010	8:29:19 PM	PHl3 MFC set to  0.000000
12/9/2010	8:29:19 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:29:19 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:29:19 PM	Tube furnace set to 0
12/9/2010	8:30:19 PM	H2 valve closed
12/9/2010	8:30:19 PM	BCl3 valve closed
12/9/2010	8:30:19 PM	PH3 valve closed
12/9/2010	8:30:19 PM	SiCl4 pre valve closed
12/9/2010	8:30:19 PM	SiCl4 post valve closed
12/9/2010	8:30:19 PM	Bubbler valve closed
12/9/2010	8:30:19 PM	Helium valve opened
12/9/2010	8:30:19 PM	Main Vac valve opened
12/9/2010	8:30:19 PM	Bypass valve opened
12/9/2010	8:30:19 PM	Helium MFC set to  100.000000
12/9/2010	8:30:19 PM	H2 MFC set to  0.000000
12/9/2010	8:30:19 PM	BCl3 MFC set to  0.000000
12/9/2010	8:30:19 PM	PHl3 MFC set to  0.000000
12/9/2010	8:30:19 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:30:19 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:30:20 PM	Tube furnace set to 0
12/9/2010	8:31:20 PM	Helium valve closed
12/9/2010	8:31:20 PM	H2 valve closed
12/9/2010	8:31:20 PM	BCl3 valve closed
12/9/2010	8:31:20 PM	PH3 valve closed
12/9/2010	8:31:20 PM	SiCl4 pre valve closed
12/9/2010	8:31:20 PM	SiCl4 post valve closed
12/9/2010	8:31:20 PM	Bubbler valve closed
12/9/2010	8:31:20 PM	Main Vac valve opened
12/9/2010	8:31:20 PM	Bypass valve opened
12/9/2010	8:31:20 PM	Helium MFC set to  0.000000
12/9/2010	8:31:20 PM	H2 MFC set to  0.000000
12/9/2010	8:31:20 PM	BCl3 MFC set to  0.000000
12/9/2010	8:31:20 PM	PHl3 MFC set to  0.000000
12/9/2010	8:31:20 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:31:20 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:31:20 PM	Tube furnace set to 0
12/9/2010	8:32:20 PM	H2 valve closed
12/9/2010	8:32:20 PM	BCl3 valve closed
12/9/2010	8:32:20 PM	PH3 valve closed
12/9/2010	8:32:20 PM	SiCl4 pre valve closed
12/9/2010	8:32:20 PM	SiCl4 post valve closed
12/9/2010	8:32:20 PM	Bubbler valve closed
12/9/2010	8:32:20 PM	Helium valve opened
12/9/2010	8:32:20 PM	Main Vac valve opened
12/9/2010	8:32:20 PM	Bypass valve opened
12/9/2010	8:32:20 PM	Helium MFC set to  100.000000
12/9/2010	8:32:20 PM	H2 MFC set to  0.000000
12/9/2010	8:32:20 PM	BCl3 MFC set to  0.000000
12/9/2010	8:32:20 PM	PHl3 MFC set to  0.000000
12/9/2010	8:32:20 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:32:20 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:32:20 PM	Tube furnace set to 0
12/9/2010	8:33:20 PM	Helium valve closed
12/9/2010	8:33:20 PM	H2 valve closed
12/9/2010	8:33:20 PM	BCl3 valve closed
12/9/2010	8:33:20 PM	PH3 valve closed
12/9/2010	8:33:20 PM	SiCl4 pre valve closed
12/9/2010	8:33:20 PM	SiCl4 post valve closed
12/9/2010	8:33:20 PM	Bubbler valve closed
12/9/2010	8:33:20 PM	Main Vac valve opened
12/9/2010	8:33:20 PM	Bypass valve opened
12/9/2010	8:33:20 PM	Helium MFC set to  0.000000
12/9/2010	8:33:20 PM	H2 MFC set to  0.000000
12/9/2010	8:33:20 PM	BCl3 MFC set to  0.000000
12/9/2010	8:33:20 PM	PHl3 MFC set to  0.000000
12/9/2010	8:33:20 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:33:20 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:33:20 PM	Tube furnace set to 0
12/9/2010	8:34:20 PM	H2 valve closed
12/9/2010	8:34:20 PM	BCl3 valve closed
12/9/2010	8:34:20 PM	PH3 valve closed
12/9/2010	8:34:20 PM	SiCl4 pre valve closed
12/9/2010	8:34:20 PM	SiCl4 post valve closed
12/9/2010	8:34:20 PM	Bubbler valve closed
12/9/2010	8:34:20 PM	Helium valve opened
12/9/2010	8:34:20 PM	Main Vac valve opened
12/9/2010	8:34:20 PM	Bypass valve opened
12/9/2010	8:34:20 PM	Helium MFC set to  100.000000
12/9/2010	8:34:20 PM	H2 MFC set to  0.000000
12/9/2010	8:34:20 PM	BCl3 MFC set to  0.000000
12/9/2010	8:34:20 PM	PHl3 MFC set to  0.000000
12/9/2010	8:34:20 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:34:20 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:34:20 PM	Tube furnace set to 0
12/9/2010	8:35:20 PM	Helium valve closed
12/9/2010	8:35:20 PM	H2 valve closed
12/9/2010	8:35:20 PM	BCl3 valve closed
12/9/2010	8:35:20 PM	PH3 valve closed
12/9/2010	8:35:20 PM	SiCl4 pre valve closed
12/9/2010	8:35:20 PM	SiCl4 post valve closed
12/9/2010	8:35:20 PM	Bubbler valve closed
12/9/2010	8:35:20 PM	Main Vac valve opened
12/9/2010	8:35:20 PM	Bypass valve opened
12/9/2010	8:35:20 PM	Helium MFC set to  0.000000
12/9/2010	8:35:20 PM	H2 MFC set to  0.000000
12/9/2010	8:35:20 PM	BCl3 MFC set to  0.000000
12/9/2010	8:35:20 PM	PHl3 MFC set to  0.000000
12/9/2010	8:35:20 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:35:20 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:35:21 PM	Tube furnace set to 0
12/9/2010	8:36:21 PM	H2 valve closed
12/9/2010	8:36:21 PM	BCl3 valve closed
12/9/2010	8:36:21 PM	PH3 valve closed
12/9/2010	8:36:21 PM	SiCl4 pre valve closed
12/9/2010	8:36:21 PM	SiCl4 post valve closed
12/9/2010	8:36:21 PM	Bubbler valve closed
12/9/2010	8:36:21 PM	Helium valve opened
12/9/2010	8:36:21 PM	Main Vac valve opened
12/9/2010	8:36:21 PM	Bypass valve opened
12/9/2010	8:36:21 PM	Helium MFC set to  100.000000
12/9/2010	8:36:21 PM	H2 MFC set to  0.000000
12/9/2010	8:36:21 PM	BCl3 MFC set to  0.000000
12/9/2010	8:36:21 PM	PHl3 MFC set to  0.000000
12/9/2010	8:36:21 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:36:21 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:36:21 PM	Tube furnace set to 0
12/9/2010	8:37:21 PM	Helium valve closed
12/9/2010	8:37:21 PM	H2 valve closed
12/9/2010	8:37:21 PM	BCl3 valve closed
12/9/2010	8:37:21 PM	PH3 valve closed
12/9/2010	8:37:21 PM	SiCl4 pre valve closed
12/9/2010	8:37:21 PM	SiCl4 post valve closed
12/9/2010	8:37:21 PM	Bubbler valve closed
12/9/2010	8:37:21 PM	Main Vac valve opened
12/9/2010	8:37:21 PM	Bypass valve opened
12/9/2010	8:37:21 PM	Helium MFC set to  0.000000
12/9/2010	8:37:21 PM	H2 MFC set to  0.000000
12/9/2010	8:37:21 PM	BCl3 MFC set to  0.000000
12/9/2010	8:37:21 PM	PHl3 MFC set to  0.000000
12/9/2010	8:37:21 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:37:21 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:37:21 PM	Tube furnace set to 0
12/9/2010	8:38:21 PM	H2 valve closed
12/9/2010	8:38:21 PM	BCl3 valve closed
12/9/2010	8:38:21 PM	PH3 valve closed
12/9/2010	8:38:21 PM	SiCl4 pre valve closed
12/9/2010	8:38:21 PM	SiCl4 post valve closed
12/9/2010	8:38:21 PM	Bubbler valve closed
12/9/2010	8:38:21 PM	Helium valve opened
12/9/2010	8:38:21 PM	Main Vac valve opened
12/9/2010	8:38:21 PM	Bypass valve opened
12/9/2010	8:38:21 PM	Helium MFC set to  100.000000
12/9/2010	8:38:21 PM	H2 MFC set to  0.000000
12/9/2010	8:38:21 PM	BCl3 MFC set to  0.000000
12/9/2010	8:38:21 PM	PHl3 MFC set to  0.000000
12/9/2010	8:38:21 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:38:21 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:38:21 PM	Tube furnace set to 0
12/9/2010	8:39:21 PM	Helium valve closed
12/9/2010	8:39:21 PM	H2 valve closed
12/9/2010	8:39:21 PM	BCl3 valve closed
12/9/2010	8:39:21 PM	PH3 valve closed
12/9/2010	8:39:21 PM	SiCl4 pre valve closed
12/9/2010	8:39:21 PM	SiCl4 post valve closed
12/9/2010	8:39:21 PM	Bubbler valve closed
12/9/2010	8:39:21 PM	Main Vac valve opened
12/9/2010	8:39:21 PM	Bypass valve opened
12/9/2010	8:39:21 PM	Helium MFC set to  0.000000
12/9/2010	8:39:21 PM	H2 MFC set to  0.000000
12/9/2010	8:39:21 PM	BCl3 MFC set to  0.000000
12/9/2010	8:39:21 PM	PHl3 MFC set to  0.000000
12/9/2010	8:39:21 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:39:21 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:39:21 PM	Tube furnace set to 0
12/9/2010	8:40:21 PM	H2 valve closed
12/9/2010	8:40:21 PM	BCl3 valve closed
12/9/2010	8:40:21 PM	PH3 valve closed
12/9/2010	8:40:21 PM	SiCl4 pre valve closed
12/9/2010	8:40:21 PM	SiCl4 post valve closed
12/9/2010	8:40:21 PM	Bubbler valve closed
12/9/2010	8:40:21 PM	Helium valve opened
12/9/2010	8:40:21 PM	Main Vac valve opened
12/9/2010	8:40:21 PM	Bypass valve opened
12/9/2010	8:40:21 PM	Helium MFC set to  100.000000
12/9/2010	8:40:21 PM	H2 MFC set to  0.000000
12/9/2010	8:40:21 PM	BCl3 MFC set to  0.000000
12/9/2010	8:40:21 PM	PHl3 MFC set to  0.000000
12/9/2010	8:40:21 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:40:21 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:40:21 PM	Tube furnace set to 0
12/9/2010	8:41:18 PM	Run aborted at 8:41 PM
12/9/2010	8:41:18 PM	Helium valve closed
12/9/2010	8:41:18 PM	H2 valve closed
12/9/2010	8:41:18 PM	BCl3 valve closed
12/9/2010	8:41:18 PM	PH3 valve closed
12/9/2010	8:41:18 PM	SiCl4 pre valve closed
12/9/2010	8:41:18 PM	SiCl4 post valve closed
12/9/2010	8:41:18 PM	Bypass valve closed
12/9/2010	8:41:18 PM	Main Vac valve closed
12/9/2010	8:41:18 PM	Bubbler valve closed
12/9/2010	8:41:18 PM	Helium MFC set to  0.000000
12/9/2010	8:41:18 PM	H2 MFC set to  0.000000
12/9/2010	8:41:18 PM	BCl3 MFC set to  0.000000
12/9/2010	8:41:18 PM	PHl3 MFC set to  0.000000
12/9/2010	8:41:18 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:41:18 PM	Tube furnace set to 0
12/9/2010	8:41:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/9/2010	8:41:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/9/2010	8:41:23 PM	Recipe started at 8:41 PM
12/9/2010	8:41:23 PM	Helium valve closed
12/9/2010	8:41:23 PM	H2 valve closed
12/9/2010	8:41:23 PM	BCl3 valve closed
12/9/2010	8:41:23 PM	PH3 valve closed
12/9/2010	8:41:23 PM	SiCl4 pre valve closed
12/9/2010	8:41:23 PM	SiCl4 post valve closed
12/9/2010	8:41:23 PM	Main Vac valve closed
12/9/2010	8:41:23 PM	Bubbler valve closed
12/9/2010	8:41:23 PM	Bypass valve opened
12/9/2010	8:41:23 PM	Helium MFC set to  0.000000
12/9/2010	8:41:23 PM	H2 MFC set to  0.000000
12/9/2010	8:41:23 PM	BCl3 MFC set to  0.000000
12/9/2010	8:41:23 PM	PHl3 MFC set to  0.000000
12/9/2010	8:41:23 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:41:23 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:41:23 PM	Tube furnace set to 0
12/9/2010	8:41:23 PM	Helium valve closed
12/9/2010	8:41:23 PM	H2 valve closed
12/9/2010	8:41:23 PM	BCl3 valve closed
12/9/2010	8:41:23 PM	PH3 valve closed
12/9/2010	8:41:23 PM	SiCl4 pre valve closed
12/9/2010	8:41:23 PM	SiCl4 post valve closed
12/9/2010	8:41:23 PM	Bubbler valve closed
12/9/2010	8:41:23 PM	Main Vac valve opened
12/9/2010	8:41:23 PM	Bypass valve opened
12/9/2010	8:41:23 PM	Helium MFC set to  0.000000
12/9/2010	8:41:23 PM	H2 MFC set to  0.000000
12/9/2010	8:41:23 PM	BCl3 MFC set to  0.000000
12/9/2010	8:41:23 PM	PHl3 MFC set to  0.000000
12/9/2010	8:41:23 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:41:23 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:41:24 PM	Tube furnace set to 0
12/9/2010	8:41:24 PM	Run finished at 8:41 PM
12/9/2010	8:41:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/9/2010	8:42:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/9/2010	8:42:18 PM	Recipe started at 8:42 PM
12/9/2010	8:42:18 PM	Helium valve closed
12/9/2010	8:42:18 PM	H2 valve closed
12/9/2010	8:42:18 PM	BCl3 valve closed
12/9/2010	8:42:18 PM	PH3 valve closed
12/9/2010	8:42:18 PM	SiCl4 pre valve closed
12/9/2010	8:42:18 PM	SiCl4 post valve closed
12/9/2010	8:42:18 PM	Main Vac valve closed
12/9/2010	8:42:18 PM	Bubbler valve closed
12/9/2010	8:42:18 PM	Bypass valve opened
12/9/2010	8:42:18 PM	Helium MFC set to  0.000000
12/9/2010	8:42:18 PM	H2 MFC set to  0.000000
12/9/2010	8:42:18 PM	BCl3 MFC set to  0.000000
12/9/2010	8:42:18 PM	PHl3 MFC set to  0.000000
12/9/2010	8:42:18 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:42:18 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:42:18 PM	Tube furnace set to 0
12/9/2010	8:42:18 PM	Helium valve closed
12/9/2010	8:42:18 PM	H2 valve closed
12/9/2010	8:42:18 PM	BCl3 valve closed
12/9/2010	8:42:18 PM	PH3 valve closed
12/9/2010	8:42:18 PM	SiCl4 pre valve closed
12/9/2010	8:42:18 PM	SiCl4 post valve closed
12/9/2010	8:42:18 PM	Bubbler valve closed
12/9/2010	8:42:18 PM	Main Vac valve opened
12/9/2010	8:42:18 PM	Bypass valve opened
12/9/2010	8:42:18 PM	Helium MFC set to  0.000000
12/9/2010	8:42:18 PM	H2 MFC set to  0.000000
12/9/2010	8:42:18 PM	BCl3 MFC set to  0.000000
12/9/2010	8:42:18 PM	PHl3 MFC set to  0.000000
12/9/2010	8:42:18 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:42:18 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:42:19 PM	Tube furnace set to 0
12/9/2010	8:43:19 PM	H2 valve closed
12/9/2010	8:43:19 PM	BCl3 valve closed
12/9/2010	8:43:19 PM	PH3 valve closed
12/9/2010	8:43:19 PM	SiCl4 pre valve closed
12/9/2010	8:43:19 PM	SiCl4 post valve closed
12/9/2010	8:43:19 PM	Bubbler valve closed
12/9/2010	8:43:19 PM	Helium valve opened
12/9/2010	8:43:19 PM	Main Vac valve opened
12/9/2010	8:43:19 PM	Bypass valve opened
12/9/2010	8:43:19 PM	Helium MFC set to  100.000000
12/9/2010	8:43:19 PM	H2 MFC set to  0.000000
12/9/2010	8:43:19 PM	BCl3 MFC set to  0.000000
12/9/2010	8:43:19 PM	PHl3 MFC set to  0.000000
12/9/2010	8:43:19 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:43:19 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:43:19 PM	Tube furnace set to 0
12/9/2010	8:44:19 PM	Helium valve closed
12/9/2010	8:44:19 PM	H2 valve closed
12/9/2010	8:44:19 PM	BCl3 valve closed
12/9/2010	8:44:19 PM	PH3 valve closed
12/9/2010	8:44:19 PM	SiCl4 pre valve closed
12/9/2010	8:44:19 PM	SiCl4 post valve closed
12/9/2010	8:44:19 PM	Bubbler valve closed
12/9/2010	8:44:19 PM	Main Vac valve opened
12/9/2010	8:44:19 PM	Bypass valve opened
12/9/2010	8:44:19 PM	Helium MFC set to  0.000000
12/9/2010	8:44:19 PM	H2 MFC set to  0.000000
12/9/2010	8:44:19 PM	BCl3 MFC set to  0.000000
12/9/2010	8:44:19 PM	PHl3 MFC set to  0.000000
12/9/2010	8:44:19 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:44:19 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:44:19 PM	Tube furnace set to 0
12/9/2010	8:45:19 PM	H2 valve closed
12/9/2010	8:45:19 PM	BCl3 valve closed
12/9/2010	8:45:19 PM	PH3 valve closed
12/9/2010	8:45:19 PM	SiCl4 pre valve closed
12/9/2010	8:45:19 PM	SiCl4 post valve closed
12/9/2010	8:45:19 PM	Bubbler valve closed
12/9/2010	8:45:19 PM	Helium valve opened
12/9/2010	8:45:19 PM	Main Vac valve opened
12/9/2010	8:45:19 PM	Bypass valve opened
12/9/2010	8:45:19 PM	Helium MFC set to  100.000000
12/9/2010	8:45:19 PM	H2 MFC set to  0.000000
12/9/2010	8:45:19 PM	BCl3 MFC set to  0.000000
12/9/2010	8:45:19 PM	PHl3 MFC set to  0.000000
12/9/2010	8:45:19 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:45:19 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:45:19 PM	Tube furnace set to 0
12/9/2010	8:46:19 PM	Helium valve closed
12/9/2010	8:46:19 PM	H2 valve closed
12/9/2010	8:46:19 PM	BCl3 valve closed
12/9/2010	8:46:19 PM	PH3 valve closed
12/9/2010	8:46:19 PM	SiCl4 pre valve closed
12/9/2010	8:46:19 PM	SiCl4 post valve closed
12/9/2010	8:46:19 PM	Bubbler valve closed
12/9/2010	8:46:19 PM	Main Vac valve opened
12/9/2010	8:46:19 PM	Bypass valve opened
12/9/2010	8:46:19 PM	Helium MFC set to  0.000000
12/9/2010	8:46:19 PM	H2 MFC set to  0.000000
12/9/2010	8:46:19 PM	BCl3 MFC set to  0.000000
12/9/2010	8:46:19 PM	PHl3 MFC set to  0.000000
12/9/2010	8:46:19 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:46:19 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:46:19 PM	Tube furnace set to 0
12/9/2010	8:47:19 PM	H2 valve closed
12/9/2010	8:47:19 PM	BCl3 valve closed
12/9/2010	8:47:19 PM	PH3 valve closed
12/9/2010	8:47:19 PM	SiCl4 pre valve closed
12/9/2010	8:47:19 PM	SiCl4 post valve closed
12/9/2010	8:47:19 PM	Bubbler valve closed
12/9/2010	8:47:19 PM	Helium valve opened
12/9/2010	8:47:19 PM	Main Vac valve opened
12/9/2010	8:47:19 PM	Bypass valve opened
12/9/2010	8:47:19 PM	Helium MFC set to  100.000000
12/9/2010	8:47:19 PM	H2 MFC set to  0.000000
12/9/2010	8:47:19 PM	BCl3 MFC set to  0.000000
12/9/2010	8:47:19 PM	PHl3 MFC set to  0.000000
12/9/2010	8:47:19 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:47:19 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:47:20 PM	Tube furnace set to 0
12/9/2010	8:48:20 PM	Helium valve closed
12/9/2010	8:48:20 PM	H2 valve closed
12/9/2010	8:48:20 PM	BCl3 valve closed
12/9/2010	8:48:20 PM	PH3 valve closed
12/9/2010	8:48:20 PM	SiCl4 pre valve closed
12/9/2010	8:48:20 PM	SiCl4 post valve closed
12/9/2010	8:48:20 PM	Bubbler valve closed
12/9/2010	8:48:20 PM	Main Vac valve opened
12/9/2010	8:48:20 PM	Bypass valve opened
12/9/2010	8:48:20 PM	Helium MFC set to  0.000000
12/9/2010	8:48:20 PM	H2 MFC set to  0.000000
12/9/2010	8:48:20 PM	BCl3 MFC set to  0.000000
12/9/2010	8:48:20 PM	PHl3 MFC set to  0.000000
12/9/2010	8:48:20 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:48:20 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:48:20 PM	Tube furnace set to 0
12/9/2010	8:49:20 PM	H2 valve closed
12/9/2010	8:49:20 PM	BCl3 valve closed
12/9/2010	8:49:20 PM	PH3 valve closed
12/9/2010	8:49:20 PM	SiCl4 pre valve closed
12/9/2010	8:49:20 PM	SiCl4 post valve closed
12/9/2010	8:49:20 PM	Bubbler valve closed
12/9/2010	8:49:20 PM	Helium valve opened
12/9/2010	8:49:20 PM	Main Vac valve opened
12/9/2010	8:49:20 PM	Bypass valve opened
12/9/2010	8:49:20 PM	Helium MFC set to  100.000000
12/9/2010	8:49:20 PM	H2 MFC set to  0.000000
12/9/2010	8:49:20 PM	BCl3 MFC set to  0.000000
12/9/2010	8:49:20 PM	PHl3 MFC set to  0.000000
12/9/2010	8:49:20 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:49:20 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:49:20 PM	Tube furnace set to 0
12/9/2010	8:50:20 PM	Helium valve closed
12/9/2010	8:50:20 PM	H2 valve closed
12/9/2010	8:50:20 PM	BCl3 valve closed
12/9/2010	8:50:20 PM	PH3 valve closed
12/9/2010	8:50:20 PM	SiCl4 pre valve closed
12/9/2010	8:50:20 PM	SiCl4 post valve closed
12/9/2010	8:50:20 PM	Bubbler valve closed
12/9/2010	8:50:20 PM	Main Vac valve opened
12/9/2010	8:50:20 PM	Bypass valve opened
12/9/2010	8:50:20 PM	Helium MFC set to  0.000000
12/9/2010	8:50:20 PM	H2 MFC set to  0.000000
12/9/2010	8:50:20 PM	BCl3 MFC set to  0.000000
12/9/2010	8:50:20 PM	PHl3 MFC set to  0.000000
12/9/2010	8:50:20 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:50:20 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:50:20 PM	Tube furnace set to 0
12/9/2010	8:51:20 PM	H2 valve closed
12/9/2010	8:51:20 PM	BCl3 valve closed
12/9/2010	8:51:20 PM	PH3 valve closed
12/9/2010	8:51:20 PM	SiCl4 pre valve closed
12/9/2010	8:51:20 PM	SiCl4 post valve closed
12/9/2010	8:51:20 PM	Bubbler valve closed
12/9/2010	8:51:20 PM	Helium valve opened
12/9/2010	8:51:20 PM	Main Vac valve opened
12/9/2010	8:51:20 PM	Bypass valve opened
12/9/2010	8:51:20 PM	Helium MFC set to  100.000000
12/9/2010	8:51:20 PM	H2 MFC set to  0.000000
12/9/2010	8:51:20 PM	BCl3 MFC set to  0.000000
12/9/2010	8:51:20 PM	PHl3 MFC set to  0.000000
12/9/2010	8:51:20 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:51:20 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:51:20 PM	Tube furnace set to 0
12/9/2010	8:52:20 PM	Helium valve closed
12/9/2010	8:52:20 PM	H2 valve closed
12/9/2010	8:52:20 PM	BCl3 valve closed
12/9/2010	8:52:20 PM	PH3 valve closed
12/9/2010	8:52:20 PM	SiCl4 pre valve closed
12/9/2010	8:52:20 PM	SiCl4 post valve closed
12/9/2010	8:52:20 PM	Bubbler valve closed
12/9/2010	8:52:20 PM	Main Vac valve opened
12/9/2010	8:52:20 PM	Bypass valve opened
12/9/2010	8:52:20 PM	Helium MFC set to  0.000000
12/9/2010	8:52:20 PM	H2 MFC set to  0.000000
12/9/2010	8:52:20 PM	BCl3 MFC set to  0.000000
12/9/2010	8:52:20 PM	PHl3 MFC set to  0.000000
12/9/2010	8:52:20 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:52:20 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:52:21 PM	Tube furnace set to 0
12/9/2010	8:53:21 PM	H2 valve closed
12/9/2010	8:53:21 PM	BCl3 valve closed
12/9/2010	8:53:21 PM	PH3 valve closed
12/9/2010	8:53:21 PM	SiCl4 pre valve closed
12/9/2010	8:53:21 PM	SiCl4 post valve closed
12/9/2010	8:53:21 PM	Bubbler valve closed
12/9/2010	8:53:21 PM	Helium valve opened
12/9/2010	8:53:21 PM	Main Vac valve opened
12/9/2010	8:53:21 PM	Bypass valve opened
12/9/2010	8:53:21 PM	Helium MFC set to  100.000000
12/9/2010	8:53:21 PM	H2 MFC set to  0.000000
12/9/2010	8:53:21 PM	BCl3 MFC set to  0.000000
12/9/2010	8:53:21 PM	PHl3 MFC set to  0.000000
12/9/2010	8:53:21 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:53:21 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:53:21 PM	Tube furnace set to 0
12/9/2010	8:54:21 PM	Helium valve closed
12/9/2010	8:54:21 PM	H2 valve closed
12/9/2010	8:54:21 PM	BCl3 valve closed
12/9/2010	8:54:21 PM	PH3 valve closed
12/9/2010	8:54:21 PM	SiCl4 pre valve closed
12/9/2010	8:54:21 PM	SiCl4 post valve closed
12/9/2010	8:54:21 PM	Bubbler valve closed
12/9/2010	8:54:21 PM	Main Vac valve opened
12/9/2010	8:54:21 PM	Bypass valve opened
12/9/2010	8:54:21 PM	Helium MFC set to  0.000000
12/9/2010	8:54:21 PM	H2 MFC set to  0.000000
12/9/2010	8:54:21 PM	BCl3 MFC set to  0.000000
12/9/2010	8:54:21 PM	PHl3 MFC set to  0.000000
12/9/2010	8:54:21 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:54:21 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:54:21 PM	Tube furnace set to 0
12/9/2010	8:55:21 PM	H2 valve closed
12/9/2010	8:55:21 PM	BCl3 valve closed
12/9/2010	8:55:21 PM	PH3 valve closed
12/9/2010	8:55:21 PM	SiCl4 pre valve closed
12/9/2010	8:55:21 PM	SiCl4 post valve closed
12/9/2010	8:55:21 PM	Bubbler valve closed
12/9/2010	8:55:21 PM	Helium valve opened
12/9/2010	8:55:21 PM	Main Vac valve opened
12/9/2010	8:55:21 PM	Bypass valve opened
12/9/2010	8:55:21 PM	Helium MFC set to  100.000000
12/9/2010	8:55:21 PM	H2 MFC set to  0.000000
12/9/2010	8:55:21 PM	BCl3 MFC set to  0.000000
12/9/2010	8:55:21 PM	PHl3 MFC set to  0.000000
12/9/2010	8:55:21 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:55:21 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:55:21 PM	Tube furnace set to 0
12/9/2010	8:56:21 PM	Helium valve closed
12/9/2010	8:56:21 PM	H2 valve closed
12/9/2010	8:56:21 PM	BCl3 valve closed
12/9/2010	8:56:21 PM	PH3 valve closed
12/9/2010	8:56:21 PM	SiCl4 pre valve closed
12/9/2010	8:56:21 PM	SiCl4 post valve closed
12/9/2010	8:56:21 PM	Bubbler valve closed
12/9/2010	8:56:21 PM	Main Vac valve opened
12/9/2010	8:56:21 PM	Bypass valve opened
12/9/2010	8:56:21 PM	Helium MFC set to  0.000000
12/9/2010	8:56:21 PM	H2 MFC set to  0.000000
12/9/2010	8:56:21 PM	BCl3 MFC set to  0.000000
12/9/2010	8:56:21 PM	PHl3 MFC set to  0.000000
12/9/2010	8:56:21 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:56:21 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:56:21 PM	Tube furnace set to 0
12/9/2010	8:57:21 PM	H2 valve closed
12/9/2010	8:57:21 PM	BCl3 valve closed
12/9/2010	8:57:21 PM	PH3 valve closed
12/9/2010	8:57:21 PM	SiCl4 pre valve closed
12/9/2010	8:57:21 PM	SiCl4 post valve closed
12/9/2010	8:57:21 PM	Bubbler valve closed
12/9/2010	8:57:21 PM	Helium valve opened
12/9/2010	8:57:21 PM	Main Vac valve opened
12/9/2010	8:57:21 PM	Bypass valve opened
12/9/2010	8:57:21 PM	Helium MFC set to  100.000000
12/9/2010	8:57:21 PM	H2 MFC set to  0.000000
12/9/2010	8:57:21 PM	BCl3 MFC set to  0.000000
12/9/2010	8:57:21 PM	PHl3 MFC set to  0.000000
12/9/2010	8:57:21 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:57:21 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:57:21 PM	Tube furnace set to 0
12/9/2010	8:58:21 PM	Helium valve closed
12/9/2010	8:58:22 PM	H2 valve closed
12/9/2010	8:58:22 PM	BCl3 valve closed
12/9/2010	8:58:22 PM	PH3 valve closed
12/9/2010	8:58:22 PM	SiCl4 pre valve closed
12/9/2010	8:58:22 PM	SiCl4 post valve closed
12/9/2010	8:58:22 PM	Bubbler valve closed
12/9/2010	8:58:22 PM	Main Vac valve opened
12/9/2010	8:58:22 PM	Bypass valve opened
12/9/2010	8:58:22 PM	Helium MFC set to  0.000000
12/9/2010	8:58:22 PM	H2 MFC set to  0.000000
12/9/2010	8:58:22 PM	BCl3 MFC set to  0.000000
12/9/2010	8:58:22 PM	PHl3 MFC set to  0.000000
12/9/2010	8:58:22 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:58:22 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:58:22 PM	Tube furnace set to 0
12/9/2010	8:59:22 PM	H2 valve closed
12/9/2010	8:59:22 PM	BCl3 valve closed
12/9/2010	8:59:22 PM	PH3 valve closed
12/9/2010	8:59:22 PM	SiCl4 pre valve closed
12/9/2010	8:59:22 PM	SiCl4 post valve closed
12/9/2010	8:59:22 PM	Bubbler valve closed
12/9/2010	8:59:22 PM	Helium valve opened
12/9/2010	8:59:22 PM	Main Vac valve opened
12/9/2010	8:59:22 PM	Bypass valve opened
12/9/2010	8:59:22 PM	Helium MFC set to  100.000000
12/9/2010	8:59:22 PM	H2 MFC set to  0.000000
12/9/2010	8:59:22 PM	BCl3 MFC set to  0.000000
12/9/2010	8:59:22 PM	PHl3 MFC set to  0.000000
12/9/2010	8:59:22 PM	SiCl4 MFC set to  0.000000
12/9/2010	8:59:22 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	8:59:22 PM	Tube furnace set to 0
12/9/2010	9:00:22 PM	Helium valve closed
12/9/2010	9:00:22 PM	H2 valve closed
12/9/2010	9:00:22 PM	BCl3 valve closed
12/9/2010	9:00:22 PM	PH3 valve closed
12/9/2010	9:00:22 PM	SiCl4 pre valve closed
12/9/2010	9:00:22 PM	SiCl4 post valve closed
12/9/2010	9:00:22 PM	Bubbler valve closed
12/9/2010	9:00:22 PM	Main Vac valve opened
12/9/2010	9:00:22 PM	Bypass valve opened
12/9/2010	9:00:22 PM	Helium MFC set to  0.000000
12/9/2010	9:00:22 PM	H2 MFC set to  0.000000
12/9/2010	9:00:22 PM	BCl3 MFC set to  0.000000
12/9/2010	9:00:22 PM	PHl3 MFC set to  0.000000
12/9/2010	9:00:22 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:00:22 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:00:22 PM	Tube furnace set to 0
12/9/2010	9:01:22 PM	H2 valve closed
12/9/2010	9:01:22 PM	BCl3 valve closed
12/9/2010	9:01:22 PM	PH3 valve closed
12/9/2010	9:01:22 PM	SiCl4 pre valve closed
12/9/2010	9:01:22 PM	SiCl4 post valve closed
12/9/2010	9:01:22 PM	Bubbler valve closed
12/9/2010	9:01:22 PM	Helium valve opened
12/9/2010	9:01:22 PM	Main Vac valve opened
12/9/2010	9:01:22 PM	Bypass valve opened
12/9/2010	9:01:22 PM	Helium MFC set to  100.000000
12/9/2010	9:01:22 PM	H2 MFC set to  0.000000
12/9/2010	9:01:22 PM	BCl3 MFC set to  0.000000
12/9/2010	9:01:22 PM	PHl3 MFC set to  0.000000
12/9/2010	9:01:22 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:01:22 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:01:22 PM	Tube furnace set to 0
12/9/2010	9:02:22 PM	Helium valve closed
12/9/2010	9:02:22 PM	H2 valve closed
12/9/2010	9:02:22 PM	BCl3 valve closed
12/9/2010	9:02:22 PM	PH3 valve closed
12/9/2010	9:02:22 PM	SiCl4 pre valve closed
12/9/2010	9:02:22 PM	SiCl4 post valve closed
12/9/2010	9:02:22 PM	Bubbler valve closed
12/9/2010	9:02:22 PM	Main Vac valve opened
12/9/2010	9:02:22 PM	Bypass valve opened
12/9/2010	9:02:22 PM	Helium MFC set to  0.000000
12/9/2010	9:02:22 PM	H2 MFC set to  0.000000
12/9/2010	9:02:22 PM	BCl3 MFC set to  0.000000
12/9/2010	9:02:22 PM	PHl3 MFC set to  0.000000
12/9/2010	9:02:22 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:02:22 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:02:22 PM	Tube furnace set to 0
12/9/2010	9:02:23 PM	Run finished at 9:02 PM
12/9/2010	9:02:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/9/2010	9:04:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/9/2010	9:04:28 PM	Recipe started at 9:04 PM
12/9/2010	9:04:28 PM	Helium valve closed
12/9/2010	9:04:28 PM	H2 valve closed
12/9/2010	9:04:28 PM	BCl3 valve closed
12/9/2010	9:04:28 PM	PH3 valve closed
12/9/2010	9:04:28 PM	SiCl4 pre valve closed
12/9/2010	9:04:28 PM	SiCl4 post valve closed
12/9/2010	9:04:28 PM	Main Vac valve closed
12/9/2010	9:04:28 PM	Bubbler valve closed
12/9/2010	9:04:28 PM	Bypass valve opened
12/9/2010	9:04:28 PM	Helium MFC set to  0.000000
12/9/2010	9:04:28 PM	H2 MFC set to  0.000000
12/9/2010	9:04:28 PM	BCl3 MFC set to  0.000000
12/9/2010	9:04:28 PM	PHl3 MFC set to  0.000000
12/9/2010	9:04:28 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:04:28 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:04:28 PM	Tube furnace set to 0
12/9/2010	9:04:29 PM	Helium valve closed
12/9/2010	9:04:29 PM	H2 valve closed
12/9/2010	9:04:29 PM	BCl3 valve closed
12/9/2010	9:04:29 PM	PH3 valve closed
12/9/2010	9:04:29 PM	SiCl4 pre valve closed
12/9/2010	9:04:29 PM	SiCl4 post valve closed
12/9/2010	9:04:29 PM	Bubbler valve closed
12/9/2010	9:04:29 PM	Main Vac valve opened
12/9/2010	9:04:29 PM	Bypass valve opened
12/9/2010	9:04:29 PM	Helium MFC set to  0.000000
12/9/2010	9:04:29 PM	H2 MFC set to  0.000000
12/9/2010	9:04:29 PM	BCl3 MFC set to  0.000000
12/9/2010	9:04:29 PM	PHl3 MFC set to  0.000000
12/9/2010	9:04:29 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:04:29 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:04:29 PM	Tube furnace set to 0
12/9/2010	9:05:29 PM	H2 valve closed
12/9/2010	9:05:29 PM	BCl3 valve closed
12/9/2010	9:05:29 PM	PH3 valve closed
12/9/2010	9:05:29 PM	SiCl4 pre valve closed
12/9/2010	9:05:29 PM	SiCl4 post valve closed
12/9/2010	9:05:29 PM	Bubbler valve closed
12/9/2010	9:05:29 PM	Helium valve opened
12/9/2010	9:05:29 PM	Main Vac valve opened
12/9/2010	9:05:29 PM	Bypass valve opened
12/9/2010	9:05:29 PM	Helium MFC set to  100.000000
12/9/2010	9:05:29 PM	H2 MFC set to  0.000000
12/9/2010	9:05:29 PM	BCl3 MFC set to  0.000000
12/9/2010	9:05:29 PM	PHl3 MFC set to  0.000000
12/9/2010	9:05:29 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:05:29 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:05:29 PM	Tube furnace set to 0
12/9/2010	9:06:29 PM	Helium valve closed
12/9/2010	9:06:29 PM	H2 valve closed
12/9/2010	9:06:29 PM	BCl3 valve closed
12/9/2010	9:06:29 PM	PH3 valve closed
12/9/2010	9:06:29 PM	SiCl4 pre valve closed
12/9/2010	9:06:29 PM	SiCl4 post valve closed
12/9/2010	9:06:29 PM	Bubbler valve closed
12/9/2010	9:06:29 PM	Main Vac valve opened
12/9/2010	9:06:29 PM	Bypass valve opened
12/9/2010	9:06:29 PM	Helium MFC set to  0.000000
12/9/2010	9:06:29 PM	H2 MFC set to  0.000000
12/9/2010	9:06:29 PM	BCl3 MFC set to  0.000000
12/9/2010	9:06:29 PM	PHl3 MFC set to  0.000000
12/9/2010	9:06:29 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:06:29 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:06:29 PM	Tube furnace set to 0
12/9/2010	9:07:29 PM	H2 valve closed
12/9/2010	9:07:29 PM	BCl3 valve closed
12/9/2010	9:07:29 PM	PH3 valve closed
12/9/2010	9:07:29 PM	SiCl4 pre valve closed
12/9/2010	9:07:29 PM	SiCl4 post valve closed
12/9/2010	9:07:29 PM	Bubbler valve closed
12/9/2010	9:07:29 PM	Helium valve opened
12/9/2010	9:07:29 PM	Main Vac valve opened
12/9/2010	9:07:29 PM	Bypass valve opened
12/9/2010	9:07:29 PM	Helium MFC set to  100.000000
12/9/2010	9:07:29 PM	H2 MFC set to  0.000000
12/9/2010	9:07:29 PM	BCl3 MFC set to  0.000000
12/9/2010	9:07:29 PM	PHl3 MFC set to  0.000000
12/9/2010	9:07:29 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:07:29 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:07:29 PM	Tube furnace set to 0
12/9/2010	9:08:29 PM	Helium valve closed
12/9/2010	9:08:29 PM	H2 valve closed
12/9/2010	9:08:29 PM	BCl3 valve closed
12/9/2010	9:08:29 PM	PH3 valve closed
12/9/2010	9:08:29 PM	SiCl4 pre valve closed
12/9/2010	9:08:29 PM	SiCl4 post valve closed
12/9/2010	9:08:29 PM	Bubbler valve closed
12/9/2010	9:08:29 PM	Main Vac valve opened
12/9/2010	9:08:29 PM	Bypass valve opened
12/9/2010	9:08:29 PM	Helium MFC set to  0.000000
12/9/2010	9:08:29 PM	H2 MFC set to  0.000000
12/9/2010	9:08:29 PM	BCl3 MFC set to  0.000000
12/9/2010	9:08:29 PM	PHl3 MFC set to  0.000000
12/9/2010	9:08:29 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:08:29 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:08:30 PM	Tube furnace set to 0
12/9/2010	9:09:30 PM	H2 valve closed
12/9/2010	9:09:30 PM	BCl3 valve closed
12/9/2010	9:09:30 PM	PH3 valve closed
12/9/2010	9:09:30 PM	SiCl4 pre valve closed
12/9/2010	9:09:30 PM	SiCl4 post valve closed
12/9/2010	9:09:30 PM	Bubbler valve closed
12/9/2010	9:09:30 PM	Helium valve opened
12/9/2010	9:09:30 PM	Main Vac valve opened
12/9/2010	9:09:30 PM	Bypass valve opened
12/9/2010	9:09:30 PM	Helium MFC set to  100.000000
12/9/2010	9:09:30 PM	H2 MFC set to  0.000000
12/9/2010	9:09:30 PM	BCl3 MFC set to  0.000000
12/9/2010	9:09:30 PM	PHl3 MFC set to  0.000000
12/9/2010	9:09:30 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:09:30 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:09:30 PM	Tube furnace set to 0
12/9/2010	9:10:30 PM	Helium valve closed
12/9/2010	9:10:30 PM	H2 valve closed
12/9/2010	9:10:30 PM	BCl3 valve closed
12/9/2010	9:10:30 PM	PH3 valve closed
12/9/2010	9:10:30 PM	SiCl4 pre valve closed
12/9/2010	9:10:30 PM	SiCl4 post valve closed
12/9/2010	9:10:30 PM	Bubbler valve closed
12/9/2010	9:10:30 PM	Main Vac valve opened
12/9/2010	9:10:30 PM	Bypass valve opened
12/9/2010	9:10:30 PM	Helium MFC set to  0.000000
12/9/2010	9:10:30 PM	H2 MFC set to  0.000000
12/9/2010	9:10:30 PM	BCl3 MFC set to  0.000000
12/9/2010	9:10:30 PM	PHl3 MFC set to  0.000000
12/9/2010	9:10:30 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:10:30 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:10:30 PM	Tube furnace set to 0
12/9/2010	9:11:30 PM	H2 valve closed
12/9/2010	9:11:30 PM	BCl3 valve closed
12/9/2010	9:11:30 PM	PH3 valve closed
12/9/2010	9:11:30 PM	SiCl4 pre valve closed
12/9/2010	9:11:30 PM	SiCl4 post valve closed
12/9/2010	9:11:30 PM	Bubbler valve closed
12/9/2010	9:11:30 PM	Helium valve opened
12/9/2010	9:11:30 PM	Main Vac valve opened
12/9/2010	9:11:30 PM	Bypass valve opened
12/9/2010	9:11:30 PM	Helium MFC set to  100.000000
12/9/2010	9:11:30 PM	H2 MFC set to  0.000000
12/9/2010	9:11:30 PM	BCl3 MFC set to  0.000000
12/9/2010	9:11:30 PM	PHl3 MFC set to  0.000000
12/9/2010	9:11:30 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:11:30 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:11:30 PM	Tube furnace set to 0
12/9/2010	9:12:30 PM	Helium valve closed
12/9/2010	9:12:30 PM	H2 valve closed
12/9/2010	9:12:30 PM	BCl3 valve closed
12/9/2010	9:12:30 PM	PH3 valve closed
12/9/2010	9:12:30 PM	SiCl4 pre valve closed
12/9/2010	9:12:30 PM	SiCl4 post valve closed
12/9/2010	9:12:30 PM	Bubbler valve closed
12/9/2010	9:12:30 PM	Main Vac valve opened
12/9/2010	9:12:30 PM	Bypass valve opened
12/9/2010	9:12:30 PM	Helium MFC set to  0.000000
12/9/2010	9:12:30 PM	H2 MFC set to  0.000000
12/9/2010	9:12:30 PM	BCl3 MFC set to  0.000000
12/9/2010	9:12:30 PM	PHl3 MFC set to  0.000000
12/9/2010	9:12:30 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:12:30 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:12:30 PM	Tube furnace set to 0
12/9/2010	9:13:30 PM	H2 valve closed
12/9/2010	9:13:30 PM	BCl3 valve closed
12/9/2010	9:13:30 PM	PH3 valve closed
12/9/2010	9:13:30 PM	SiCl4 pre valve closed
12/9/2010	9:13:30 PM	SiCl4 post valve closed
12/9/2010	9:13:30 PM	Bubbler valve closed
12/9/2010	9:13:30 PM	Helium valve opened
12/9/2010	9:13:30 PM	Main Vac valve opened
12/9/2010	9:13:30 PM	Bypass valve opened
12/9/2010	9:13:30 PM	Helium MFC set to  100.000000
12/9/2010	9:13:30 PM	H2 MFC set to  0.000000
12/9/2010	9:13:30 PM	BCl3 MFC set to  0.000000
12/9/2010	9:13:30 PM	PHl3 MFC set to  0.000000
12/9/2010	9:13:30 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:13:30 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:13:30 PM	Tube furnace set to 0
12/9/2010	9:14:30 PM	Helium valve closed
12/9/2010	9:14:31 PM	H2 valve closed
12/9/2010	9:14:31 PM	BCl3 valve closed
12/9/2010	9:14:31 PM	PH3 valve closed
12/9/2010	9:14:31 PM	SiCl4 pre valve closed
12/9/2010	9:14:31 PM	SiCl4 post valve closed
12/9/2010	9:14:31 PM	Bubbler valve closed
12/9/2010	9:14:31 PM	Main Vac valve opened
12/9/2010	9:14:31 PM	Bypass valve opened
12/9/2010	9:14:31 PM	Helium MFC set to  0.000000
12/9/2010	9:14:31 PM	H2 MFC set to  0.000000
12/9/2010	9:14:31 PM	BCl3 MFC set to  0.000000
12/9/2010	9:14:31 PM	PHl3 MFC set to  0.000000
12/9/2010	9:14:31 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:14:31 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:14:31 PM	Tube furnace set to 0
12/9/2010	9:15:31 PM	H2 valve closed
12/9/2010	9:15:31 PM	BCl3 valve closed
12/9/2010	9:15:31 PM	PH3 valve closed
12/9/2010	9:15:31 PM	SiCl4 pre valve closed
12/9/2010	9:15:31 PM	SiCl4 post valve closed
12/9/2010	9:15:31 PM	Bubbler valve closed
12/9/2010	9:15:31 PM	Helium valve opened
12/9/2010	9:15:31 PM	Main Vac valve opened
12/9/2010	9:15:31 PM	Bypass valve opened
12/9/2010	9:15:31 PM	Helium MFC set to  100.000000
12/9/2010	9:15:31 PM	H2 MFC set to  0.000000
12/9/2010	9:15:31 PM	BCl3 MFC set to  0.000000
12/9/2010	9:15:31 PM	PHl3 MFC set to  0.000000
12/9/2010	9:15:31 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:15:31 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:15:31 PM	Tube furnace set to 0
12/9/2010	9:16:31 PM	Helium valve closed
12/9/2010	9:16:31 PM	H2 valve closed
12/9/2010	9:16:31 PM	BCl3 valve closed
12/9/2010	9:16:31 PM	PH3 valve closed
12/9/2010	9:16:31 PM	SiCl4 pre valve closed
12/9/2010	9:16:31 PM	SiCl4 post valve closed
12/9/2010	9:16:31 PM	Bubbler valve closed
12/9/2010	9:16:31 PM	Main Vac valve opened
12/9/2010	9:16:31 PM	Bypass valve opened
12/9/2010	9:16:31 PM	Helium MFC set to  0.000000
12/9/2010	9:16:31 PM	H2 MFC set to  0.000000
12/9/2010	9:16:31 PM	BCl3 MFC set to  0.000000
12/9/2010	9:16:31 PM	PHl3 MFC set to  0.000000
12/9/2010	9:16:31 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:16:31 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:16:31 PM	Tube furnace set to 0
12/9/2010	9:17:31 PM	H2 valve closed
12/9/2010	9:17:31 PM	BCl3 valve closed
12/9/2010	9:17:31 PM	PH3 valve closed
12/9/2010	9:17:31 PM	SiCl4 pre valve closed
12/9/2010	9:17:31 PM	SiCl4 post valve closed
12/9/2010	9:17:31 PM	Bubbler valve closed
12/9/2010	9:17:31 PM	Helium valve opened
12/9/2010	9:17:31 PM	Main Vac valve opened
12/9/2010	9:17:31 PM	Bypass valve opened
12/9/2010	9:17:31 PM	Helium MFC set to  100.000000
12/9/2010	9:17:31 PM	H2 MFC set to  0.000000
12/9/2010	9:17:31 PM	BCl3 MFC set to  0.000000
12/9/2010	9:17:31 PM	PHl3 MFC set to  0.000000
12/9/2010	9:17:31 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:17:31 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:17:31 PM	Tube furnace set to 0
12/9/2010	9:18:31 PM	Helium valve closed
12/9/2010	9:18:31 PM	H2 valve closed
12/9/2010	9:18:31 PM	BCl3 valve closed
12/9/2010	9:18:31 PM	PH3 valve closed
12/9/2010	9:18:31 PM	SiCl4 pre valve closed
12/9/2010	9:18:31 PM	SiCl4 post valve closed
12/9/2010	9:18:31 PM	Bubbler valve closed
12/9/2010	9:18:31 PM	Main Vac valve opened
12/9/2010	9:18:31 PM	Bypass valve opened
12/9/2010	9:18:31 PM	Helium MFC set to  0.000000
12/9/2010	9:18:31 PM	H2 MFC set to  0.000000
12/9/2010	9:18:31 PM	BCl3 MFC set to  0.000000
12/9/2010	9:18:31 PM	PHl3 MFC set to  0.000000
12/9/2010	9:18:31 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:18:31 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:18:31 PM	Tube furnace set to 0
12/9/2010	9:19:31 PM	H2 valve closed
12/9/2010	9:19:31 PM	BCl3 valve closed
12/9/2010	9:19:31 PM	PH3 valve closed
12/9/2010	9:19:31 PM	SiCl4 pre valve closed
12/9/2010	9:19:31 PM	SiCl4 post valve closed
12/9/2010	9:19:31 PM	Bubbler valve closed
12/9/2010	9:19:31 PM	Helium valve opened
12/9/2010	9:19:31 PM	Main Vac valve opened
12/9/2010	9:19:31 PM	Bypass valve opened
12/9/2010	9:19:31 PM	Helium MFC set to  100.000000
12/9/2010	9:19:31 PM	H2 MFC set to  0.000000
12/9/2010	9:19:32 PM	BCl3 MFC set to  0.000000
12/9/2010	9:19:32 PM	PHl3 MFC set to  0.000000
12/9/2010	9:19:32 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:19:32 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:19:32 PM	Tube furnace set to 0
12/9/2010	9:20:32 PM	Helium valve closed
12/9/2010	9:20:32 PM	H2 valve closed
12/9/2010	9:20:32 PM	BCl3 valve closed
12/9/2010	9:20:32 PM	PH3 valve closed
12/9/2010	9:20:32 PM	SiCl4 pre valve closed
12/9/2010	9:20:32 PM	SiCl4 post valve closed
12/9/2010	9:20:32 PM	Bubbler valve closed
12/9/2010	9:20:32 PM	Main Vac valve opened
12/9/2010	9:20:32 PM	Bypass valve opened
12/9/2010	9:20:32 PM	Helium MFC set to  0.000000
12/9/2010	9:20:32 PM	H2 MFC set to  0.000000
12/9/2010	9:20:32 PM	BCl3 MFC set to  0.000000
12/9/2010	9:20:32 PM	PHl3 MFC set to  0.000000
12/9/2010	9:20:32 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:20:32 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:20:32 PM	Tube furnace set to 0
12/9/2010	9:21:32 PM	H2 valve closed
12/9/2010	9:21:32 PM	BCl3 valve closed
12/9/2010	9:21:32 PM	PH3 valve closed
12/9/2010	9:21:32 PM	SiCl4 pre valve closed
12/9/2010	9:21:32 PM	SiCl4 post valve closed
12/9/2010	9:21:32 PM	Bubbler valve closed
12/9/2010	9:21:32 PM	Helium valve opened
12/9/2010	9:21:32 PM	Main Vac valve opened
12/9/2010	9:21:32 PM	Bypass valve opened
12/9/2010	9:21:32 PM	Helium MFC set to  100.000000
12/9/2010	9:21:32 PM	H2 MFC set to  0.000000
12/9/2010	9:21:32 PM	BCl3 MFC set to  0.000000
12/9/2010	9:21:32 PM	PHl3 MFC set to  0.000000
12/9/2010	9:21:32 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:21:32 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:21:32 PM	Tube furnace set to 0
12/9/2010	9:22:32 PM	Helium valve closed
12/9/2010	9:22:32 PM	H2 valve closed
12/9/2010	9:22:32 PM	BCl3 valve closed
12/9/2010	9:22:32 PM	PH3 valve closed
12/9/2010	9:22:32 PM	SiCl4 pre valve closed
12/9/2010	9:22:32 PM	SiCl4 post valve closed
12/9/2010	9:22:32 PM	Bubbler valve closed
12/9/2010	9:22:32 PM	Main Vac valve opened
12/9/2010	9:22:32 PM	Bypass valve opened
12/9/2010	9:22:32 PM	Helium MFC set to  0.000000
12/9/2010	9:22:32 PM	H2 MFC set to  0.000000
12/9/2010	9:22:32 PM	BCl3 MFC set to  0.000000
12/9/2010	9:22:32 PM	PHl3 MFC set to  0.000000
12/9/2010	9:22:32 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:22:32 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:22:32 PM	Tube furnace set to 0
12/9/2010	9:23:32 PM	H2 valve closed
12/9/2010	9:23:32 PM	BCl3 valve closed
12/9/2010	9:23:32 PM	PH3 valve closed
12/9/2010	9:23:32 PM	SiCl4 pre valve closed
12/9/2010	9:23:32 PM	SiCl4 post valve closed
12/9/2010	9:23:32 PM	Bubbler valve closed
12/9/2010	9:23:32 PM	Helium valve opened
12/9/2010	9:23:32 PM	Main Vac valve opened
12/9/2010	9:23:32 PM	Bypass valve opened
12/9/2010	9:23:32 PM	Helium MFC set to  100.000000
12/9/2010	9:23:32 PM	H2 MFC set to  0.000000
12/9/2010	9:23:32 PM	BCl3 MFC set to  0.000000
12/9/2010	9:23:32 PM	PHl3 MFC set to  0.000000
12/9/2010	9:23:32 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:23:32 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:23:32 PM	Tube furnace set to 0
12/9/2010	9:24:32 PM	Helium valve closed
12/9/2010	9:24:32 PM	H2 valve closed
12/9/2010	9:24:32 PM	BCl3 valve closed
12/9/2010	9:24:32 PM	PH3 valve closed
12/9/2010	9:24:32 PM	SiCl4 pre valve closed
12/9/2010	9:24:32 PM	SiCl4 post valve closed
12/9/2010	9:24:32 PM	Bubbler valve closed
12/9/2010	9:24:32 PM	Main Vac valve opened
12/9/2010	9:24:32 PM	Bypass valve opened
12/9/2010	9:24:32 PM	Helium MFC set to  0.000000
12/9/2010	9:24:32 PM	H2 MFC set to  0.000000
12/9/2010	9:24:32 PM	BCl3 MFC set to  0.000000
12/9/2010	9:24:32 PM	PHl3 MFC set to  0.000000
12/9/2010	9:24:32 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:24:32 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:24:33 PM	Tube furnace set to 0
12/9/2010	9:24:34 PM	Run finished at 9:24 PM
12/9/2010	9:24:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/9/2010	9:28:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/9/2010	9:28:31 PM	Recipe started at 9:28 PM
12/9/2010	9:28:31 PM	Helium valve closed
12/9/2010	9:28:31 PM	H2 valve closed
12/9/2010	9:28:31 PM	BCl3 valve closed
12/9/2010	9:28:31 PM	PH3 valve closed
12/9/2010	9:28:31 PM	SiCl4 pre valve closed
12/9/2010	9:28:31 PM	SiCl4 post valve closed
12/9/2010	9:28:31 PM	Main Vac valve closed
12/9/2010	9:28:31 PM	Bubbler valve closed
12/9/2010	9:28:31 PM	Bypass valve opened
12/9/2010	9:28:31 PM	Helium MFC set to  0.000000
12/9/2010	9:28:31 PM	H2 MFC set to  0.000000
12/9/2010	9:28:31 PM	BCl3 MFC set to  0.000000
12/9/2010	9:28:31 PM	PHl3 MFC set to  0.000000
12/9/2010	9:28:31 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:28:31 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:28:31 PM	Tube furnace set to 0
12/9/2010	9:28:32 PM	Helium valve closed
12/9/2010	9:28:32 PM	H2 valve closed
12/9/2010	9:28:32 PM	BCl3 valve closed
12/9/2010	9:28:32 PM	PH3 valve closed
12/9/2010	9:28:32 PM	SiCl4 pre valve closed
12/9/2010	9:28:32 PM	SiCl4 post valve closed
12/9/2010	9:28:32 PM	Bubbler valve closed
12/9/2010	9:28:32 PM	Main Vac valve opened
12/9/2010	9:28:32 PM	Bypass valve opened
12/9/2010	9:28:32 PM	Helium MFC set to  0.000000
12/9/2010	9:28:32 PM	H2 MFC set to  0.000000
12/9/2010	9:28:32 PM	BCl3 MFC set to  0.000000
12/9/2010	9:28:32 PM	PHl3 MFC set to  0.000000
12/9/2010	9:28:32 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:28:32 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:28:32 PM	Tube furnace set to 0
12/9/2010	9:29:32 PM	H2 valve closed
12/9/2010	9:29:32 PM	BCl3 valve closed
12/9/2010	9:29:32 PM	PH3 valve closed
12/9/2010	9:29:32 PM	SiCl4 pre valve closed
12/9/2010	9:29:32 PM	SiCl4 post valve closed
12/9/2010	9:29:32 PM	Bubbler valve closed
12/9/2010	9:29:32 PM	Helium valve opened
12/9/2010	9:29:32 PM	Main Vac valve opened
12/9/2010	9:29:32 PM	Bypass valve opened
12/9/2010	9:29:32 PM	Helium MFC set to  100.000000
12/9/2010	9:29:32 PM	H2 MFC set to  0.000000
12/9/2010	9:29:32 PM	BCl3 MFC set to  0.000000
12/9/2010	9:29:32 PM	PHl3 MFC set to  0.000000
12/9/2010	9:29:32 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:29:32 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:29:32 PM	Tube furnace set to 0
12/9/2010	9:30:32 PM	Helium valve closed
12/9/2010	9:30:32 PM	H2 valve closed
12/9/2010	9:30:32 PM	BCl3 valve closed
12/9/2010	9:30:32 PM	PH3 valve closed
12/9/2010	9:30:32 PM	SiCl4 pre valve closed
12/9/2010	9:30:32 PM	SiCl4 post valve closed
12/9/2010	9:30:32 PM	Bubbler valve closed
12/9/2010	9:30:32 PM	Main Vac valve opened
12/9/2010	9:30:32 PM	Bypass valve opened
12/9/2010	9:30:32 PM	Helium MFC set to  0.000000
12/9/2010	9:30:32 PM	H2 MFC set to  0.000000
12/9/2010	9:30:32 PM	BCl3 MFC set to  0.000000
12/9/2010	9:30:32 PM	PHl3 MFC set to  0.000000
12/9/2010	9:30:32 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:30:32 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:30:32 PM	Tube furnace set to 0
12/9/2010	9:31:32 PM	H2 valve closed
12/9/2010	9:31:32 PM	BCl3 valve closed
12/9/2010	9:31:32 PM	PH3 valve closed
12/9/2010	9:31:32 PM	SiCl4 pre valve closed
12/9/2010	9:31:32 PM	SiCl4 post valve closed
12/9/2010	9:31:32 PM	Bubbler valve closed
12/9/2010	9:31:32 PM	Helium valve opened
12/9/2010	9:31:32 PM	Main Vac valve opened
12/9/2010	9:31:32 PM	Bypass valve opened
12/9/2010	9:31:32 PM	Helium MFC set to  100.000000
12/9/2010	9:31:32 PM	H2 MFC set to  0.000000
12/9/2010	9:31:32 PM	BCl3 MFC set to  0.000000
12/9/2010	9:31:32 PM	PHl3 MFC set to  0.000000
12/9/2010	9:31:32 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:31:32 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:31:33 PM	Tube furnace set to 0
12/9/2010	9:32:33 PM	Helium valve closed
12/9/2010	9:32:33 PM	H2 valve closed
12/9/2010	9:32:33 PM	BCl3 valve closed
12/9/2010	9:32:33 PM	PH3 valve closed
12/9/2010	9:32:33 PM	SiCl4 pre valve closed
12/9/2010	9:32:33 PM	SiCl4 post valve closed
12/9/2010	9:32:33 PM	Bubbler valve closed
12/9/2010	9:32:33 PM	Main Vac valve opened
12/9/2010	9:32:33 PM	Bypass valve opened
12/9/2010	9:32:33 PM	Helium MFC set to  0.000000
12/9/2010	9:32:33 PM	H2 MFC set to  0.000000
12/9/2010	9:32:33 PM	BCl3 MFC set to  0.000000
12/9/2010	9:32:33 PM	PHl3 MFC set to  0.000000
12/9/2010	9:32:33 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:32:33 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:32:33 PM	Tube furnace set to 0
12/9/2010	9:33:33 PM	H2 valve closed
12/9/2010	9:33:33 PM	BCl3 valve closed
12/9/2010	9:33:33 PM	PH3 valve closed
12/9/2010	9:33:33 PM	SiCl4 pre valve closed
12/9/2010	9:33:33 PM	SiCl4 post valve closed
12/9/2010	9:33:33 PM	Bubbler valve closed
12/9/2010	9:33:33 PM	Helium valve opened
12/9/2010	9:33:33 PM	Main Vac valve opened
12/9/2010	9:33:33 PM	Bypass valve opened
12/9/2010	9:33:33 PM	Helium MFC set to  100.000000
12/9/2010	9:33:33 PM	H2 MFC set to  0.000000
12/9/2010	9:33:33 PM	BCl3 MFC set to  0.000000
12/9/2010	9:33:33 PM	PHl3 MFC set to  0.000000
12/9/2010	9:33:33 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:33:33 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:33:33 PM	Tube furnace set to 0
12/9/2010	9:34:33 PM	Helium valve closed
12/9/2010	9:34:33 PM	H2 valve closed
12/9/2010	9:34:33 PM	BCl3 valve closed
12/9/2010	9:34:33 PM	PH3 valve closed
12/9/2010	9:34:33 PM	SiCl4 pre valve closed
12/9/2010	9:34:33 PM	SiCl4 post valve closed
12/9/2010	9:34:33 PM	Bubbler valve closed
12/9/2010	9:34:33 PM	Main Vac valve opened
12/9/2010	9:34:33 PM	Bypass valve opened
12/9/2010	9:34:33 PM	Helium MFC set to  0.000000
12/9/2010	9:34:33 PM	H2 MFC set to  0.000000
12/9/2010	9:34:33 PM	BCl3 MFC set to  0.000000
12/9/2010	9:34:33 PM	PHl3 MFC set to  0.000000
12/9/2010	9:34:33 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:34:33 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:34:33 PM	Tube furnace set to 0
12/9/2010	9:35:33 PM	H2 valve closed
12/9/2010	9:35:33 PM	BCl3 valve closed
12/9/2010	9:35:33 PM	PH3 valve closed
12/9/2010	9:35:33 PM	SiCl4 pre valve closed
12/9/2010	9:35:33 PM	SiCl4 post valve closed
12/9/2010	9:35:33 PM	Bubbler valve closed
12/9/2010	9:35:33 PM	Helium valve opened
12/9/2010	9:35:33 PM	Main Vac valve opened
12/9/2010	9:35:33 PM	Bypass valve opened
12/9/2010	9:35:33 PM	Helium MFC set to  100.000000
12/9/2010	9:35:33 PM	H2 MFC set to  0.000000
12/9/2010	9:35:33 PM	BCl3 MFC set to  0.000000
12/9/2010	9:35:33 PM	PHl3 MFC set to  0.000000
12/9/2010	9:35:33 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:35:33 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:35:33 PM	Tube furnace set to 0
12/9/2010	9:36:33 PM	Helium valve closed
12/9/2010	9:36:33 PM	H2 valve closed
12/9/2010	9:36:33 PM	BCl3 valve closed
12/9/2010	9:36:33 PM	PH3 valve closed
12/9/2010	9:36:33 PM	SiCl4 pre valve closed
12/9/2010	9:36:33 PM	SiCl4 post valve closed
12/9/2010	9:36:33 PM	Bubbler valve closed
12/9/2010	9:36:33 PM	Main Vac valve opened
12/9/2010	9:36:33 PM	Bypass valve opened
12/9/2010	9:36:33 PM	Helium MFC set to  0.000000
12/9/2010	9:36:33 PM	H2 MFC set to  0.000000
12/9/2010	9:36:33 PM	BCl3 MFC set to  0.000000
12/9/2010	9:36:33 PM	PHl3 MFC set to  0.000000
12/9/2010	9:36:33 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:36:33 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:36:33 PM	Tube furnace set to 0
12/9/2010	9:37:34 PM	H2 valve closed
12/9/2010	9:37:34 PM	BCl3 valve closed
12/9/2010	9:37:34 PM	PH3 valve closed
12/9/2010	9:37:34 PM	SiCl4 pre valve closed
12/9/2010	9:37:34 PM	SiCl4 post valve closed
12/9/2010	9:37:34 PM	Bubbler valve closed
12/9/2010	9:37:34 PM	Helium valve opened
12/9/2010	9:37:34 PM	Main Vac valve opened
12/9/2010	9:37:34 PM	Bypass valve opened
12/9/2010	9:37:34 PM	Helium MFC set to  100.000000
12/9/2010	9:37:34 PM	H2 MFC set to  0.000000
12/9/2010	9:37:34 PM	BCl3 MFC set to  0.000000
12/9/2010	9:37:34 PM	PHl3 MFC set to  0.000000
12/9/2010	9:37:34 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:37:34 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:37:34 PM	Tube furnace set to 0
12/9/2010	9:38:34 PM	Helium valve closed
12/9/2010	9:38:34 PM	H2 valve closed
12/9/2010	9:38:34 PM	BCl3 valve closed
12/9/2010	9:38:34 PM	PH3 valve closed
12/9/2010	9:38:34 PM	SiCl4 pre valve closed
12/9/2010	9:38:34 PM	SiCl4 post valve closed
12/9/2010	9:38:34 PM	Bubbler valve closed
12/9/2010	9:38:34 PM	Main Vac valve opened
12/9/2010	9:38:34 PM	Bypass valve opened
12/9/2010	9:38:34 PM	Helium MFC set to  0.000000
12/9/2010	9:38:34 PM	H2 MFC set to  0.000000
12/9/2010	9:38:34 PM	BCl3 MFC set to  0.000000
12/9/2010	9:38:34 PM	PHl3 MFC set to  0.000000
12/9/2010	9:38:34 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:38:34 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:38:34 PM	Tube furnace set to 0
12/9/2010	9:39:34 PM	H2 valve closed
12/9/2010	9:39:34 PM	BCl3 valve closed
12/9/2010	9:39:34 PM	PH3 valve closed
12/9/2010	9:39:34 PM	SiCl4 pre valve closed
12/9/2010	9:39:34 PM	SiCl4 post valve closed
12/9/2010	9:39:34 PM	Bubbler valve closed
12/9/2010	9:39:34 PM	Helium valve opened
12/9/2010	9:39:34 PM	Main Vac valve opened
12/9/2010	9:39:34 PM	Bypass valve opened
12/9/2010	9:39:34 PM	Helium MFC set to  100.000000
12/9/2010	9:39:34 PM	H2 MFC set to  0.000000
12/9/2010	9:39:34 PM	BCl3 MFC set to  0.000000
12/9/2010	9:39:34 PM	PHl3 MFC set to  0.000000
12/9/2010	9:39:34 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:39:34 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:39:34 PM	Tube furnace set to 0
12/9/2010	9:40:34 PM	Helium valve closed
12/9/2010	9:40:34 PM	H2 valve closed
12/9/2010	9:40:34 PM	BCl3 valve closed
12/9/2010	9:40:34 PM	PH3 valve closed
12/9/2010	9:40:34 PM	SiCl4 pre valve closed
12/9/2010	9:40:34 PM	SiCl4 post valve closed
12/9/2010	9:40:34 PM	Bubbler valve closed
12/9/2010	9:40:34 PM	Main Vac valve opened
12/9/2010	9:40:34 PM	Bypass valve opened
12/9/2010	9:40:34 PM	Helium MFC set to  0.000000
12/9/2010	9:40:34 PM	H2 MFC set to  0.000000
12/9/2010	9:40:34 PM	BCl3 MFC set to  0.000000
12/9/2010	9:40:34 PM	PHl3 MFC set to  0.000000
12/9/2010	9:40:34 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:40:34 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:40:34 PM	Tube furnace set to 0
12/9/2010	9:41:34 PM	H2 valve closed
12/9/2010	9:41:34 PM	BCl3 valve closed
12/9/2010	9:41:34 PM	PH3 valve closed
12/9/2010	9:41:34 PM	SiCl4 pre valve closed
12/9/2010	9:41:34 PM	SiCl4 post valve closed
12/9/2010	9:41:34 PM	Bubbler valve closed
12/9/2010	9:41:34 PM	Helium valve opened
12/9/2010	9:41:34 PM	Main Vac valve opened
12/9/2010	9:41:34 PM	Bypass valve opened
12/9/2010	9:41:34 PM	Helium MFC set to  100.000000
12/9/2010	9:41:34 PM	H2 MFC set to  0.000000
12/9/2010	9:41:34 PM	BCl3 MFC set to  0.000000
12/9/2010	9:41:34 PM	PHl3 MFC set to  0.000000
12/9/2010	9:41:34 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:41:34 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:41:34 PM	Tube furnace set to 0
12/9/2010	9:42:34 PM	Helium valve closed
12/9/2010	9:42:35 PM	H2 valve closed
12/9/2010	9:42:35 PM	BCl3 valve closed
12/9/2010	9:42:35 PM	PH3 valve closed
12/9/2010	9:42:35 PM	SiCl4 pre valve closed
12/9/2010	9:42:35 PM	SiCl4 post valve closed
12/9/2010	9:42:35 PM	Bubbler valve closed
12/9/2010	9:42:35 PM	Main Vac valve opened
12/9/2010	9:42:35 PM	Bypass valve opened
12/9/2010	9:42:35 PM	Helium MFC set to  0.000000
12/9/2010	9:42:35 PM	H2 MFC set to  0.000000
12/9/2010	9:42:35 PM	BCl3 MFC set to  0.000000
12/9/2010	9:42:35 PM	PHl3 MFC set to  0.000000
12/9/2010	9:42:35 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:42:35 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:42:35 PM	Tube furnace set to 0
12/9/2010	9:43:35 PM	H2 valve closed
12/9/2010	9:43:35 PM	BCl3 valve closed
12/9/2010	9:43:35 PM	PH3 valve closed
12/9/2010	9:43:35 PM	SiCl4 pre valve closed
12/9/2010	9:43:35 PM	SiCl4 post valve closed
12/9/2010	9:43:35 PM	Bubbler valve closed
12/9/2010	9:43:35 PM	Helium valve opened
12/9/2010	9:43:35 PM	Main Vac valve opened
12/9/2010	9:43:35 PM	Bypass valve opened
12/9/2010	9:43:35 PM	Helium MFC set to  100.000000
12/9/2010	9:43:35 PM	H2 MFC set to  0.000000
12/9/2010	9:43:35 PM	BCl3 MFC set to  0.000000
12/9/2010	9:43:35 PM	PHl3 MFC set to  0.000000
12/9/2010	9:43:35 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:43:35 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:43:35 PM	Tube furnace set to 0
12/9/2010	9:44:35 PM	Helium valve closed
12/9/2010	9:44:35 PM	H2 valve closed
12/9/2010	9:44:35 PM	BCl3 valve closed
12/9/2010	9:44:35 PM	PH3 valve closed
12/9/2010	9:44:35 PM	SiCl4 pre valve closed
12/9/2010	9:44:35 PM	SiCl4 post valve closed
12/9/2010	9:44:35 PM	Bubbler valve closed
12/9/2010	9:44:35 PM	Main Vac valve opened
12/9/2010	9:44:35 PM	Bypass valve opened
12/9/2010	9:44:35 PM	Helium MFC set to  0.000000
12/9/2010	9:44:35 PM	H2 MFC set to  0.000000
12/9/2010	9:44:35 PM	BCl3 MFC set to  0.000000
12/9/2010	9:44:35 PM	PHl3 MFC set to  0.000000
12/9/2010	9:44:35 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:44:35 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:44:35 PM	Tube furnace set to 0
12/9/2010	9:44:42 PM	Run aborted at 9:44 PM
12/9/2010	9:44:42 PM	Helium valve closed
12/9/2010	9:44:42 PM	H2 valve closed
12/9/2010	9:44:42 PM	BCl3 valve closed
12/9/2010	9:44:42 PM	PH3 valve closed
12/9/2010	9:44:42 PM	SiCl4 pre valve closed
12/9/2010	9:44:42 PM	SiCl4 post valve closed
12/9/2010	9:44:42 PM	Bypass valve closed
12/9/2010	9:44:42 PM	Main Vac valve closed
12/9/2010	9:44:42 PM	Bubbler valve closed
12/9/2010	9:44:42 PM	Helium MFC set to  0.000000
12/9/2010	9:44:42 PM	H2 MFC set to  0.000000
12/9/2010	9:44:42 PM	BCl3 MFC set to  0.000000
12/9/2010	9:44:42 PM	PHl3 MFC set to  0.000000
12/9/2010	9:44:42 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:44:42 PM	Tube furnace set to 0
12/9/2010	9:44:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/9/2010	9:44:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/9/2010	9:44:47 PM	Recipe started at 9:44 PM
12/9/2010	9:44:47 PM	Helium valve closed
12/9/2010	9:44:47 PM	H2 valve closed
12/9/2010	9:44:47 PM	BCl3 valve closed
12/9/2010	9:44:47 PM	PH3 valve closed
12/9/2010	9:44:47 PM	SiCl4 pre valve closed
12/9/2010	9:44:47 PM	SiCl4 post valve closed
12/9/2010	9:44:47 PM	Main Vac valve closed
12/9/2010	9:44:47 PM	Bubbler valve closed
12/9/2010	9:44:47 PM	Bypass valve opened
12/9/2010	9:44:47 PM	Helium MFC set to  0.000000
12/9/2010	9:44:47 PM	H2 MFC set to  0.000000
12/9/2010	9:44:47 PM	BCl3 MFC set to  0.000000
12/9/2010	9:44:47 PM	PHl3 MFC set to  0.000000
12/9/2010	9:44:47 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:44:47 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:44:47 PM	Tube furnace set to 0
12/9/2010	9:44:48 PM	Helium valve closed
12/9/2010	9:44:48 PM	H2 valve closed
12/9/2010	9:44:48 PM	BCl3 valve closed
12/9/2010	9:44:48 PM	PH3 valve closed
12/9/2010	9:44:48 PM	SiCl4 pre valve closed
12/9/2010	9:44:48 PM	SiCl4 post valve closed
12/9/2010	9:44:48 PM	Bubbler valve closed
12/9/2010	9:44:48 PM	Main Vac valve opened
12/9/2010	9:44:48 PM	Bypass valve opened
12/9/2010	9:44:48 PM	Helium MFC set to  0.000000
12/9/2010	9:44:48 PM	H2 MFC set to  0.000000
12/9/2010	9:44:48 PM	BCl3 MFC set to  0.000000
12/9/2010	9:44:48 PM	PHl3 MFC set to  0.000000
12/9/2010	9:44:48 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:44:48 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:44:48 PM	Tube furnace set to 0
12/9/2010	9:44:48 PM	Run finished at 9:44 PM
12/9/2010	9:44:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/9/2010	9:45:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/9/2010	9:45:42 PM	Recipe started at 9:45 PM
12/9/2010	9:45:43 PM	Helium valve closed
12/9/2010	9:45:43 PM	H2 valve closed
12/9/2010	9:45:43 PM	BCl3 valve closed
12/9/2010	9:45:43 PM	PH3 valve closed
12/9/2010	9:45:43 PM	SiCl4 pre valve closed
12/9/2010	9:45:43 PM	SiCl4 post valve closed
12/9/2010	9:45:43 PM	Main Vac valve closed
12/9/2010	9:45:43 PM	Bubbler valve closed
12/9/2010	9:45:43 PM	Bypass valve opened
12/9/2010	9:45:43 PM	Helium MFC set to  0.000000
12/9/2010	9:45:43 PM	H2 MFC set to  0.000000
12/9/2010	9:45:43 PM	BCl3 MFC set to  0.000000
12/9/2010	9:45:43 PM	PHl3 MFC set to  0.000000
12/9/2010	9:45:43 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:45:43 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:45:43 PM	Tube furnace set to 0
12/9/2010	9:45:43 PM	Helium valve closed
12/9/2010	9:45:43 PM	H2 valve closed
12/9/2010	9:45:43 PM	BCl3 valve closed
12/9/2010	9:45:43 PM	PH3 valve closed
12/9/2010	9:45:43 PM	SiCl4 pre valve closed
12/9/2010	9:45:43 PM	SiCl4 post valve closed
12/9/2010	9:45:43 PM	Bubbler valve closed
12/9/2010	9:45:43 PM	Main Vac valve opened
12/9/2010	9:45:43 PM	Bypass valve opened
12/9/2010	9:45:43 PM	Helium MFC set to  0.000000
12/9/2010	9:45:43 PM	H2 MFC set to  0.000000
12/9/2010	9:45:43 PM	BCl3 MFC set to  0.000000
12/9/2010	9:45:43 PM	PHl3 MFC set to  0.000000
12/9/2010	9:45:43 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:45:43 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:45:43 PM	Tube furnace set to 0
12/9/2010	9:46:43 PM	H2 valve closed
12/9/2010	9:46:43 PM	BCl3 valve closed
12/9/2010	9:46:43 PM	PH3 valve closed
12/9/2010	9:46:43 PM	SiCl4 pre valve closed
12/9/2010	9:46:43 PM	SiCl4 post valve closed
12/9/2010	9:46:43 PM	Bubbler valve closed
12/9/2010	9:46:43 PM	Helium valve opened
12/9/2010	9:46:43 PM	Main Vac valve opened
12/9/2010	9:46:43 PM	Bypass valve opened
12/9/2010	9:46:43 PM	Helium MFC set to  100.000000
12/9/2010	9:46:43 PM	H2 MFC set to  0.000000
12/9/2010	9:46:43 PM	BCl3 MFC set to  0.000000
12/9/2010	9:46:43 PM	PHl3 MFC set to  0.000000
12/9/2010	9:46:43 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:46:43 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:46:43 PM	Tube furnace set to 0
12/9/2010	9:47:43 PM	Helium valve closed
12/9/2010	9:47:43 PM	H2 valve closed
12/9/2010	9:47:43 PM	BCl3 valve closed
12/9/2010	9:47:43 PM	PH3 valve closed
12/9/2010	9:47:43 PM	SiCl4 pre valve closed
12/9/2010	9:47:43 PM	SiCl4 post valve closed
12/9/2010	9:47:43 PM	Bubbler valve closed
12/9/2010	9:47:43 PM	Main Vac valve opened
12/9/2010	9:47:43 PM	Bypass valve opened
12/9/2010	9:47:43 PM	Helium MFC set to  0.000000
12/9/2010	9:47:43 PM	H2 MFC set to  0.000000
12/9/2010	9:47:43 PM	BCl3 MFC set to  0.000000
12/9/2010	9:47:43 PM	PHl3 MFC set to  0.000000
12/9/2010	9:47:43 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:47:43 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:47:44 PM	Tube furnace set to 0
12/9/2010	9:48:44 PM	H2 valve closed
12/9/2010	9:48:44 PM	BCl3 valve closed
12/9/2010	9:48:44 PM	PH3 valve closed
12/9/2010	9:48:44 PM	SiCl4 pre valve closed
12/9/2010	9:48:44 PM	SiCl4 post valve closed
12/9/2010	9:48:44 PM	Bubbler valve closed
12/9/2010	9:48:44 PM	Helium valve opened
12/9/2010	9:48:44 PM	Main Vac valve opened
12/9/2010	9:48:44 PM	Bypass valve opened
12/9/2010	9:48:44 PM	Helium MFC set to  100.000000
12/9/2010	9:48:44 PM	H2 MFC set to  0.000000
12/9/2010	9:48:44 PM	BCl3 MFC set to  0.000000
12/9/2010	9:48:44 PM	PHl3 MFC set to  0.000000
12/9/2010	9:48:44 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:48:44 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:48:44 PM	Tube furnace set to 0
12/9/2010	9:49:44 PM	Helium valve closed
12/9/2010	9:49:44 PM	H2 valve closed
12/9/2010	9:49:44 PM	BCl3 valve closed
12/9/2010	9:49:44 PM	PH3 valve closed
12/9/2010	9:49:44 PM	SiCl4 pre valve closed
12/9/2010	9:49:44 PM	SiCl4 post valve closed
12/9/2010	9:49:44 PM	Bubbler valve closed
12/9/2010	9:49:44 PM	Main Vac valve opened
12/9/2010	9:49:44 PM	Bypass valve opened
12/9/2010	9:49:44 PM	Helium MFC set to  0.000000
12/9/2010	9:49:44 PM	H2 MFC set to  0.000000
12/9/2010	9:49:44 PM	BCl3 MFC set to  0.000000
12/9/2010	9:49:44 PM	PHl3 MFC set to  0.000000
12/9/2010	9:49:44 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:49:44 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:49:44 PM	Tube furnace set to 0
12/9/2010	9:50:44 PM	H2 valve closed
12/9/2010	9:50:44 PM	BCl3 valve closed
12/9/2010	9:50:44 PM	PH3 valve closed
12/9/2010	9:50:44 PM	SiCl4 pre valve closed
12/9/2010	9:50:44 PM	SiCl4 post valve closed
12/9/2010	9:50:44 PM	Bubbler valve closed
12/9/2010	9:50:44 PM	Helium valve opened
12/9/2010	9:50:44 PM	Main Vac valve opened
12/9/2010	9:50:44 PM	Bypass valve opened
12/9/2010	9:50:44 PM	Helium MFC set to  100.000000
12/9/2010	9:50:44 PM	H2 MFC set to  0.000000
12/9/2010	9:50:44 PM	BCl3 MFC set to  0.000000
12/9/2010	9:50:44 PM	PHl3 MFC set to  0.000000
12/9/2010	9:50:44 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:50:44 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:50:44 PM	Tube furnace set to 0
12/9/2010	9:51:44 PM	Helium valve closed
12/9/2010	9:51:44 PM	H2 valve closed
12/9/2010	9:51:44 PM	BCl3 valve closed
12/9/2010	9:51:44 PM	PH3 valve closed
12/9/2010	9:51:44 PM	SiCl4 pre valve closed
12/9/2010	9:51:44 PM	SiCl4 post valve closed
12/9/2010	9:51:44 PM	Bubbler valve closed
12/9/2010	9:51:44 PM	Main Vac valve opened
12/9/2010	9:51:44 PM	Bypass valve opened
12/9/2010	9:51:44 PM	Helium MFC set to  0.000000
12/9/2010	9:51:44 PM	H2 MFC set to  0.000000
12/9/2010	9:51:44 PM	BCl3 MFC set to  0.000000
12/9/2010	9:51:44 PM	PHl3 MFC set to  0.000000
12/9/2010	9:51:44 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:51:44 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:51:44 PM	Tube furnace set to 0
12/9/2010	9:52:44 PM	H2 valve closed
12/9/2010	9:52:44 PM	BCl3 valve closed
12/9/2010	9:52:44 PM	PH3 valve closed
12/9/2010	9:52:44 PM	SiCl4 pre valve closed
12/9/2010	9:52:44 PM	SiCl4 post valve closed
12/9/2010	9:52:44 PM	Bubbler valve closed
12/9/2010	9:52:44 PM	Helium valve opened
12/9/2010	9:52:44 PM	Main Vac valve opened
12/9/2010	9:52:44 PM	Bypass valve opened
12/9/2010	9:52:44 PM	Helium MFC set to  100.000000
12/9/2010	9:52:44 PM	H2 MFC set to  0.000000
12/9/2010	9:52:44 PM	BCl3 MFC set to  0.000000
12/9/2010	9:52:44 PM	PHl3 MFC set to  0.000000
12/9/2010	9:52:44 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:52:44 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:52:45 PM	Tube furnace set to 0
12/9/2010	9:53:45 PM	Helium valve closed
12/9/2010	9:53:45 PM	H2 valve closed
12/9/2010	9:53:45 PM	BCl3 valve closed
12/9/2010	9:53:45 PM	PH3 valve closed
12/9/2010	9:53:45 PM	SiCl4 pre valve closed
12/9/2010	9:53:45 PM	SiCl4 post valve closed
12/9/2010	9:53:45 PM	Bubbler valve closed
12/9/2010	9:53:45 PM	Main Vac valve opened
12/9/2010	9:53:45 PM	Bypass valve opened
12/9/2010	9:53:45 PM	Helium MFC set to  0.000000
12/9/2010	9:53:45 PM	H2 MFC set to  0.000000
12/9/2010	9:53:45 PM	BCl3 MFC set to  0.000000
12/9/2010	9:53:45 PM	PHl3 MFC set to  0.000000
12/9/2010	9:53:45 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:53:45 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:53:45 PM	Tube furnace set to 0
12/9/2010	9:54:45 PM	H2 valve closed
12/9/2010	9:54:45 PM	BCl3 valve closed
12/9/2010	9:54:45 PM	PH3 valve closed
12/9/2010	9:54:45 PM	SiCl4 pre valve closed
12/9/2010	9:54:45 PM	SiCl4 post valve closed
12/9/2010	9:54:45 PM	Bubbler valve closed
12/9/2010	9:54:45 PM	Helium valve opened
12/9/2010	9:54:45 PM	Main Vac valve opened
12/9/2010	9:54:45 PM	Bypass valve opened
12/9/2010	9:54:45 PM	Helium MFC set to  100.000000
12/9/2010	9:54:45 PM	H2 MFC set to  0.000000
12/9/2010	9:54:45 PM	BCl3 MFC set to  0.000000
12/9/2010	9:54:45 PM	PHl3 MFC set to  0.000000
12/9/2010	9:54:45 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:54:45 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:54:45 PM	Tube furnace set to 0
12/9/2010	9:55:45 PM	Helium valve closed
12/9/2010	9:55:45 PM	H2 valve closed
12/9/2010	9:55:45 PM	BCl3 valve closed
12/9/2010	9:55:45 PM	PH3 valve closed
12/9/2010	9:55:45 PM	SiCl4 pre valve closed
12/9/2010	9:55:45 PM	SiCl4 post valve closed
12/9/2010	9:55:45 PM	Bubbler valve closed
12/9/2010	9:55:45 PM	Main Vac valve opened
12/9/2010	9:55:45 PM	Bypass valve opened
12/9/2010	9:55:45 PM	Helium MFC set to  0.000000
12/9/2010	9:55:45 PM	H2 MFC set to  0.000000
12/9/2010	9:55:45 PM	BCl3 MFC set to  0.000000
12/9/2010	9:55:45 PM	PHl3 MFC set to  0.000000
12/9/2010	9:55:45 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:55:45 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:55:45 PM	Tube furnace set to 0
12/9/2010	9:56:45 PM	H2 valve closed
12/9/2010	9:56:45 PM	BCl3 valve closed
12/9/2010	9:56:45 PM	PH3 valve closed
12/9/2010	9:56:45 PM	SiCl4 pre valve closed
12/9/2010	9:56:45 PM	SiCl4 post valve closed
12/9/2010	9:56:45 PM	Bubbler valve closed
12/9/2010	9:56:45 PM	Helium valve opened
12/9/2010	9:56:45 PM	Main Vac valve opened
12/9/2010	9:56:45 PM	Bypass valve opened
12/9/2010	9:56:45 PM	Helium MFC set to  100.000000
12/9/2010	9:56:45 PM	H2 MFC set to  0.000000
12/9/2010	9:56:45 PM	BCl3 MFC set to  0.000000
12/9/2010	9:56:45 PM	PHl3 MFC set to  0.000000
12/9/2010	9:56:45 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:56:45 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:56:45 PM	Tube furnace set to 0
12/9/2010	9:57:45 PM	Helium valve closed
12/9/2010	9:57:45 PM	H2 valve closed
12/9/2010	9:57:45 PM	BCl3 valve closed
12/9/2010	9:57:45 PM	PH3 valve closed
12/9/2010	9:57:45 PM	SiCl4 pre valve closed
12/9/2010	9:57:45 PM	SiCl4 post valve closed
12/9/2010	9:57:45 PM	Bubbler valve closed
12/9/2010	9:57:45 PM	Main Vac valve opened
12/9/2010	9:57:45 PM	Bypass valve opened
12/9/2010	9:57:45 PM	Helium MFC set to  0.000000
12/9/2010	9:57:45 PM	H2 MFC set to  0.000000
12/9/2010	9:57:45 PM	BCl3 MFC set to  0.000000
12/9/2010	9:57:45 PM	PHl3 MFC set to  0.000000
12/9/2010	9:57:45 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:57:45 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:57:46 PM	Tube furnace set to 0
12/9/2010	9:58:46 PM	H2 valve closed
12/9/2010	9:58:46 PM	BCl3 valve closed
12/9/2010	9:58:46 PM	PH3 valve closed
12/9/2010	9:58:46 PM	SiCl4 pre valve closed
12/9/2010	9:58:46 PM	SiCl4 post valve closed
12/9/2010	9:58:46 PM	Bubbler valve closed
12/9/2010	9:58:46 PM	Helium valve opened
12/9/2010	9:58:46 PM	Main Vac valve opened
12/9/2010	9:58:46 PM	Bypass valve opened
12/9/2010	9:58:46 PM	Helium MFC set to  100.000000
12/9/2010	9:58:46 PM	H2 MFC set to  0.000000
12/9/2010	9:58:46 PM	BCl3 MFC set to  0.000000
12/9/2010	9:58:46 PM	PHl3 MFC set to  0.000000
12/9/2010	9:58:46 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:58:46 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:58:46 PM	Tube furnace set to 0
12/9/2010	9:59:46 PM	Helium valve closed
12/9/2010	9:59:46 PM	H2 valve closed
12/9/2010	9:59:46 PM	BCl3 valve closed
12/9/2010	9:59:46 PM	PH3 valve closed
12/9/2010	9:59:46 PM	SiCl4 pre valve closed
12/9/2010	9:59:46 PM	SiCl4 post valve closed
12/9/2010	9:59:46 PM	Bubbler valve closed
12/9/2010	9:59:46 PM	Main Vac valve opened
12/9/2010	9:59:46 PM	Bypass valve opened
12/9/2010	9:59:46 PM	Helium MFC set to  0.000000
12/9/2010	9:59:46 PM	H2 MFC set to  0.000000
12/9/2010	9:59:46 PM	BCl3 MFC set to  0.000000
12/9/2010	9:59:46 PM	PHl3 MFC set to  0.000000
12/9/2010	9:59:46 PM	SiCl4 MFC set to  0.000000
12/9/2010	9:59:46 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	9:59:46 PM	Tube furnace set to 0
12/9/2010	10:00:46 PM	H2 valve closed
12/9/2010	10:00:46 PM	BCl3 valve closed
12/9/2010	10:00:46 PM	PH3 valve closed
12/9/2010	10:00:46 PM	SiCl4 pre valve closed
12/9/2010	10:00:46 PM	SiCl4 post valve closed
12/9/2010	10:00:46 PM	Bubbler valve closed
12/9/2010	10:00:46 PM	Helium valve opened
12/9/2010	10:00:46 PM	Main Vac valve opened
12/9/2010	10:00:46 PM	Bypass valve opened
12/9/2010	10:00:46 PM	Helium MFC set to  100.000000
12/9/2010	10:00:46 PM	H2 MFC set to  0.000000
12/9/2010	10:00:46 PM	BCl3 MFC set to  0.000000
12/9/2010	10:00:46 PM	PHl3 MFC set to  0.000000
12/9/2010	10:00:46 PM	SiCl4 MFC set to  0.000000
12/9/2010	10:00:46 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	10:00:46 PM	Tube furnace set to 0
12/9/2010	10:01:46 PM	Helium valve closed
12/9/2010	10:01:46 PM	H2 valve closed
12/9/2010	10:01:46 PM	BCl3 valve closed
12/9/2010	10:01:46 PM	PH3 valve closed
12/9/2010	10:01:46 PM	SiCl4 pre valve closed
12/9/2010	10:01:46 PM	SiCl4 post valve closed
12/9/2010	10:01:46 PM	Bubbler valve closed
12/9/2010	10:01:46 PM	Main Vac valve opened
12/9/2010	10:01:46 PM	Bypass valve opened
12/9/2010	10:01:46 PM	Helium MFC set to  0.000000
12/9/2010	10:01:46 PM	H2 MFC set to  0.000000
12/9/2010	10:01:46 PM	BCl3 MFC set to  0.000000
12/9/2010	10:01:46 PM	PHl3 MFC set to  0.000000
12/9/2010	10:01:46 PM	SiCl4 MFC set to  0.000000
12/9/2010	10:01:46 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	10:01:46 PM	Tube furnace set to 0
12/9/2010	10:02:46 PM	H2 valve closed
12/9/2010	10:02:46 PM	BCl3 valve closed
12/9/2010	10:02:46 PM	PH3 valve closed
12/9/2010	10:02:46 PM	SiCl4 pre valve closed
12/9/2010	10:02:46 PM	SiCl4 post valve closed
12/9/2010	10:02:46 PM	Bubbler valve closed
12/9/2010	10:02:46 PM	Helium valve opened
12/9/2010	10:02:46 PM	Main Vac valve opened
12/9/2010	10:02:46 PM	Bypass valve opened
12/9/2010	10:02:46 PM	Helium MFC set to  100.000000
12/9/2010	10:02:46 PM	H2 MFC set to  0.000000
12/9/2010	10:02:46 PM	BCl3 MFC set to  0.000000
12/9/2010	10:02:46 PM	PHl3 MFC set to  0.000000
12/9/2010	10:02:46 PM	SiCl4 MFC set to  0.000000
12/9/2010	10:02:46 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	10:02:46 PM	Tube furnace set to 0
12/9/2010	10:03:12 PM	Run aborted at 10:03 PM
12/9/2010	10:03:12 PM	Helium valve closed
12/9/2010	10:03:12 PM	H2 valve closed
12/9/2010	10:03:12 PM	BCl3 valve closed
12/9/2010	10:03:12 PM	PH3 valve closed
12/9/2010	10:03:12 PM	SiCl4 pre valve closed
12/9/2010	10:03:12 PM	SiCl4 post valve closed
12/9/2010	10:03:12 PM	Bypass valve closed
12/9/2010	10:03:12 PM	Main Vac valve closed
12/9/2010	10:03:12 PM	Bubbler valve closed
12/9/2010	10:03:12 PM	Helium MFC set to  0.000000
12/9/2010	10:03:12 PM	H2 MFC set to  0.000000
12/9/2010	10:03:12 PM	BCl3 MFC set to  0.000000
12/9/2010	10:03:12 PM	PHl3 MFC set to  0.000000
12/9/2010	10:03:12 PM	SiCl4 MFC set to  0.000000
12/9/2010	10:03:12 PM	Tube furnace set to 0
12/9/2010	10:03:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/9/2010	10:03:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/9/2010	10:03:16 PM	Recipe started at 10:03 PM
12/9/2010	10:03:16 PM	Helium valve closed
12/9/2010	10:03:16 PM	H2 valve closed
12/9/2010	10:03:16 PM	BCl3 valve closed
12/9/2010	10:03:16 PM	PH3 valve closed
12/9/2010	10:03:16 PM	SiCl4 pre valve closed
12/9/2010	10:03:16 PM	SiCl4 post valve closed
12/9/2010	10:03:16 PM	Main Vac valve closed
12/9/2010	10:03:16 PM	Bubbler valve closed
12/9/2010	10:03:16 PM	Bypass valve opened
12/9/2010	10:03:16 PM	Helium MFC set to  0.000000
12/9/2010	10:03:16 PM	H2 MFC set to  0.000000
12/9/2010	10:03:16 PM	BCl3 MFC set to  0.000000
12/9/2010	10:03:16 PM	PHl3 MFC set to  0.000000
12/9/2010	10:03:16 PM	SiCl4 MFC set to  0.000000
12/9/2010	10:03:16 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	10:03:16 PM	Tube furnace set to 0
12/9/2010	10:03:16 PM	Helium valve closed
12/9/2010	10:03:16 PM	H2 valve closed
12/9/2010	10:03:16 PM	BCl3 valve closed
12/9/2010	10:03:16 PM	PH3 valve closed
12/9/2010	10:03:16 PM	SiCl4 pre valve closed
12/9/2010	10:03:16 PM	SiCl4 post valve closed
12/9/2010	10:03:16 PM	Bubbler valve closed
12/9/2010	10:03:16 PM	Main Vac valve opened
12/9/2010	10:03:16 PM	Bypass valve opened
12/9/2010	10:03:16 PM	Helium MFC set to  0.000000
12/9/2010	10:03:16 PM	H2 MFC set to  0.000000
12/9/2010	10:03:16 PM	BCl3 MFC set to  0.000000
12/9/2010	10:03:16 PM	PHl3 MFC set to  0.000000
12/9/2010	10:03:16 PM	SiCl4 MFC set to  0.000000
12/9/2010	10:03:16 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	10:03:17 PM	Tube furnace set to 0
12/9/2010	10:03:17 PM	Run finished at 10:03 PM
12/9/2010	10:03:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/9/2010	10:04:12 PM	Bypass valve closed
12/9/2010	10:04:13 PM	Main Vac valve closed
12/9/2010	10:04:23 PM	Bypass valve opened
12/9/2010	10:04:24 PM	Main Vac valve opened
12/9/2010	10:04:54 PM	Recipe started at 10:04 PM
12/9/2010	10:04:54 PM	Helium valve closed
12/9/2010	10:04:54 PM	BCl3 valve closed
12/9/2010	10:04:54 PM	PH3 valve closed
12/9/2010	10:04:54 PM	SiCl4 pre valve closed
12/9/2010	10:04:54 PM	SiCl4 post valve closed
12/9/2010	10:04:54 PM	Main Vac valve closed
12/9/2010	10:04:54 PM	Bypass valve closed
12/9/2010	10:04:54 PM	Bubbler valve closed
12/9/2010	10:04:54 PM	H2 valve opened
12/9/2010	10:04:54 PM	Helium MFC set to  0.000000
12/9/2010	10:04:54 PM	H2 MFC set to  500.000000
12/9/2010	10:04:54 PM	BCl3 MFC set to  0.000000
12/9/2010	10:04:54 PM	PHl3 MFC set to  0.000000
12/9/2010	10:04:54 PM	SiCl4 MFC set to  0.000000
12/9/2010	10:04:54 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	10:04:54 PM	Tube furnace set to 0
12/9/2010	10:06:15 PM	Helium valve closed
12/9/2010	10:06:15 PM	BCl3 valve closed
12/9/2010	10:06:15 PM	PH3 valve closed
12/9/2010	10:06:15 PM	SiCl4 pre valve closed
12/9/2010	10:06:15 PM	SiCl4 post valve closed
12/9/2010	10:06:15 PM	Main Vac valve closed
12/9/2010	10:06:15 PM	Bypass valve closed
12/9/2010	10:06:15 PM	H2 valve opened
12/9/2010	10:06:15 PM	Bubbler valve opened
12/9/2010	10:06:15 PM	Helium MFC set to  0.000000
12/9/2010	10:06:15 PM	H2 MFC set to  500.000000
12/9/2010	10:06:15 PM	BCl3 MFC set to  0.000000
12/9/2010	10:06:15 PM	PHl3 MFC set to  0.000000
12/9/2010	10:06:15 PM	SiCl4 MFC set to  0.000000
12/9/2010	10:06:15 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	10:06:15 PM	Tube furnace set to 1000
12/9/2010	10:26:15 PM	Helium valve closed
12/9/2010	10:26:15 PM	BCl3 valve closed
12/9/2010	10:26:15 PM	Main Vac valve closed
12/9/2010	10:26:15 PM	Bypass valve closed
12/9/2010	10:26:15 PM	H2 valve opened
12/9/2010	10:26:15 PM	PH3 valve opened
12/9/2010	10:26:15 PM	SiCl4 pre valve opened
12/9/2010	10:26:15 PM	SiCl4 post valve opened
12/9/2010	10:26:15 PM	Bubbler valve opened
12/9/2010	10:26:15 PM	Helium MFC set to  0.000000
12/9/2010	10:26:15 PM	H2 MFC set to  500.000000
12/9/2010	10:26:15 PM	BCl3 MFC set to  0.000000
12/9/2010	10:26:15 PM	PHl3 MFC set to  1.000000
12/9/2010	10:26:15 PM	SiCl4 MFC set to  50.000000
12/9/2010	10:26:15 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	10:26:15 PM	Tube furnace set to 1000
12/9/2010	10:56:15 PM	H2 valve closed
12/9/2010	10:56:15 PM	BCl3 valve closed
12/9/2010	10:56:15 PM	PH3 valve closed
12/9/2010	10:56:15 PM	SiCl4 pre valve closed
12/9/2010	10:56:15 PM	SiCl4 post valve closed
12/9/2010	10:56:15 PM	Main Vac valve closed
12/9/2010	10:56:15 PM	Bypass valve closed
12/9/2010	10:56:15 PM	Helium valve opened
12/9/2010	10:56:15 PM	Bubbler valve opened
12/9/2010	10:56:15 PM	Helium MFC set to  500.000000
12/9/2010	10:56:15 PM	H2 MFC set to  0.000000
12/9/2010	10:56:15 PM	BCl3 MFC set to  0.000000
12/9/2010	10:56:15 PM	PHl3 MFC set to  0.000000
12/9/2010	10:56:15 PM	SiCl4 MFC set to  0.000000
12/9/2010	10:56:15 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	10:56:15 PM	Tube furnace set to 0
12/9/2010	11:11:58 PM	Run aborted at 11:11 PM
12/9/2010	11:11:58 PM	Helium valve closed
12/9/2010	11:11:58 PM	H2 valve closed
12/9/2010	11:11:58 PM	BCl3 valve closed
12/9/2010	11:11:58 PM	PH3 valve closed
12/9/2010	11:11:58 PM	SiCl4 pre valve closed
12/9/2010	11:11:58 PM	SiCl4 post valve closed
12/9/2010	11:11:58 PM	Bypass valve closed
12/9/2010	11:11:58 PM	Main Vac valve closed
12/9/2010	11:11:58 PM	Bubbler valve closed
12/9/2010	11:11:58 PM	Helium MFC set to  0.000000
12/9/2010	11:11:58 PM	H2 MFC set to  0.000000
12/9/2010	11:11:58 PM	BCl3 MFC set to  0.000000
12/9/2010	11:11:58 PM	PHl3 MFC set to  0.000000
12/9/2010	11:11:58 PM	SiCl4 MFC set to  0.000000
12/9/2010	11:11:58 PM	Tube furnace set to 0
12/9/2010	11:12:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/9/2010	11:12:00 PM	Recipe started at 11:12 PM
12/9/2010	11:12:00 PM	H2 valve closed
12/9/2010	11:12:00 PM	BCl3 valve closed
12/9/2010	11:12:00 PM	PH3 valve closed
12/9/2010	11:12:00 PM	SiCl4 pre valve closed
12/9/2010	11:12:00 PM	SiCl4 post valve closed
12/9/2010	11:12:00 PM	Main Vac valve closed
12/9/2010	11:12:00 PM	Bypass valve closed
12/9/2010	11:12:00 PM	Bubbler valve closed
12/9/2010	11:12:00 PM	Helium valve opened
12/9/2010	11:12:00 PM	Helium MFC set to  500.000000
12/9/2010	11:12:00 PM	H2 MFC set to  0.000000
12/9/2010	11:12:00 PM	BCl3 MFC set to  0.000000
12/9/2010	11:12:00 PM	PHl3 MFC set to  0.000000
12/9/2010	11:12:00 PM	SiCl4 MFC set to  0.000000
12/9/2010	11:12:00 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	11:12:00 PM	Tube furnace set to 0
12/9/2010	11:12:01 PM	Helium valve closed
12/9/2010	11:12:01 PM	H2 valve closed
12/9/2010	11:12:01 PM	BCl3 valve closed
12/9/2010	11:12:01 PM	PH3 valve closed
12/9/2010	11:12:01 PM	SiCl4 pre valve closed
12/9/2010	11:12:01 PM	SiCl4 post valve closed
12/9/2010	11:12:01 PM	Main Vac valve closed
12/9/2010	11:12:01 PM	Bypass valve closed
12/9/2010	11:12:01 PM	Bubbler valve closed
12/9/2010	11:12:01 PM	Helium MFC set to  0.000000
12/9/2010	11:12:01 PM	H2 MFC set to  0.000000
12/9/2010	11:12:01 PM	BCl3 MFC set to  0.000000
12/9/2010	11:12:01 PM	PHl3 MFC set to  0.000000
12/9/2010	11:12:01 PM	SiCl4 MFC set to  0.000000
12/9/2010	11:12:01 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	11:12:01 PM	Tube furnace set to 0
12/9/2010	11:12:01 PM	Run finished at 11:12 PM
12/9/2010	11:12:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/9/2010	11:17:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/9/2010	11:17:06 PM	Recipe started at 11:17 PM
12/9/2010	11:17:06 PM	Helium valve closed
12/9/2010	11:17:06 PM	H2 valve closed
12/9/2010	11:17:06 PM	BCl3 valve closed
12/9/2010	11:17:06 PM	PH3 valve closed
12/9/2010	11:17:06 PM	SiCl4 pre valve closed
12/9/2010	11:17:06 PM	SiCl4 post valve closed
12/9/2010	11:17:06 PM	Main Vac valve closed
12/9/2010	11:17:06 PM	Bubbler valve closed
12/9/2010	11:17:06 PM	Bypass valve opened
12/9/2010	11:17:06 PM	Helium MFC set to  0.000000
12/9/2010	11:17:06 PM	H2 MFC set to  0.000000
12/9/2010	11:17:06 PM	BCl3 MFC set to  0.000000
12/9/2010	11:17:06 PM	PHl3 MFC set to  0.000000
12/9/2010	11:17:06 PM	SiCl4 MFC set to  0.000000
12/9/2010	11:17:06 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	11:17:06 PM	Tube furnace set to 0
12/9/2010	11:18:01 PM	Helium valve closed
12/9/2010	11:18:01 PM	H2 valve closed
12/9/2010	11:18:01 PM	BCl3 valve closed
12/9/2010	11:18:01 PM	PH3 valve closed
12/9/2010	11:18:01 PM	SiCl4 pre valve closed
12/9/2010	11:18:01 PM	SiCl4 post valve closed
12/9/2010	11:18:01 PM	Bubbler valve closed
12/9/2010	11:18:01 PM	Main Vac valve opened
12/9/2010	11:18:01 PM	Bypass valve opened
12/9/2010	11:18:01 PM	Helium MFC set to  0.000000
12/9/2010	11:18:01 PM	H2 MFC set to  0.000000
12/9/2010	11:18:01 PM	BCl3 MFC set to  0.000000
12/9/2010	11:18:01 PM	PHl3 MFC set to  0.000000
12/9/2010	11:18:01 PM	SiCl4 MFC set to  0.000000
12/9/2010	11:18:01 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	11:18:01 PM	Tube furnace set to 0
12/9/2010	11:18:02 PM	Run finished at 11:18 PM
12/9/2010	11:18:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/9/2010	11:18:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/9/2010	11:18:42 PM	Recipe started at 11:18 PM
12/9/2010	11:18:42 PM	Helium valve closed
12/9/2010	11:18:42 PM	H2 valve closed
12/9/2010	11:18:42 PM	BCl3 valve closed
12/9/2010	11:18:42 PM	PH3 valve closed
12/9/2010	11:18:42 PM	SiCl4 pre valve closed
12/9/2010	11:18:42 PM	SiCl4 post valve closed
12/9/2010	11:18:42 PM	Main Vac valve closed
12/9/2010	11:18:42 PM	Bubbler valve closed
12/9/2010	11:18:42 PM	Bypass valve opened
12/9/2010	11:18:42 PM	Helium MFC set to  0.000000
12/9/2010	11:18:42 PM	H2 MFC set to  0.000000
12/9/2010	11:18:42 PM	BCl3 MFC set to  0.000000
12/9/2010	11:18:42 PM	PHl3 MFC set to  0.000000
12/9/2010	11:18:42 PM	SiCl4 MFC set to  0.000000
12/9/2010	11:18:42 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	11:18:42 PM	Tube furnace set to 0
12/9/2010	11:18:42 PM	Helium valve closed
12/9/2010	11:18:42 PM	H2 valve closed
12/9/2010	11:18:42 PM	BCl3 valve closed
12/9/2010	11:18:42 PM	PH3 valve closed
12/9/2010	11:18:42 PM	SiCl4 pre valve closed
12/9/2010	11:18:42 PM	SiCl4 post valve closed
12/9/2010	11:18:42 PM	Bubbler valve closed
12/9/2010	11:18:42 PM	Main Vac valve opened
12/9/2010	11:18:42 PM	Bypass valve opened
12/9/2010	11:18:42 PM	Helium MFC set to  0.000000
12/9/2010	11:18:42 PM	H2 MFC set to  0.000000
12/9/2010	11:18:42 PM	BCl3 MFC set to  0.000000
12/9/2010	11:18:42 PM	PHl3 MFC set to  0.000000
12/9/2010	11:18:42 PM	SiCl4 MFC set to  0.000000
12/9/2010	11:18:42 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	11:18:42 PM	Tube furnace set to 0
12/9/2010	11:19:42 PM	H2 valve closed
12/9/2010	11:19:42 PM	BCl3 valve closed
12/9/2010	11:19:42 PM	PH3 valve closed
12/9/2010	11:19:42 PM	SiCl4 pre valve closed
12/9/2010	11:19:42 PM	SiCl4 post valve closed
12/9/2010	11:19:42 PM	Bubbler valve closed
12/9/2010	11:19:42 PM	Helium valve opened
12/9/2010	11:19:42 PM	Main Vac valve opened
12/9/2010	11:19:42 PM	Bypass valve opened
12/9/2010	11:19:42 PM	Helium MFC set to  100.000000
12/9/2010	11:19:42 PM	H2 MFC set to  0.000000
12/9/2010	11:19:42 PM	BCl3 MFC set to  0.000000
12/9/2010	11:19:42 PM	PHl3 MFC set to  0.000000
12/9/2010	11:19:42 PM	SiCl4 MFC set to  0.000000
12/9/2010	11:19:42 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	11:19:43 PM	Tube furnace set to 0
12/9/2010	11:20:43 PM	Helium valve closed
12/9/2010	11:20:43 PM	H2 valve closed
12/9/2010	11:20:43 PM	BCl3 valve closed
12/9/2010	11:20:43 PM	PH3 valve closed
12/9/2010	11:20:43 PM	SiCl4 pre valve closed
12/9/2010	11:20:43 PM	SiCl4 post valve closed
12/9/2010	11:20:43 PM	Bubbler valve closed
12/9/2010	11:20:43 PM	Main Vac valve opened
12/9/2010	11:20:43 PM	Bypass valve opened
12/9/2010	11:20:43 PM	Helium MFC set to  0.000000
12/9/2010	11:20:43 PM	H2 MFC set to  0.000000
12/9/2010	11:20:43 PM	BCl3 MFC set to  0.000000
12/9/2010	11:20:43 PM	PHl3 MFC set to  0.000000
12/9/2010	11:20:43 PM	SiCl4 MFC set to  0.000000
12/9/2010	11:20:43 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	11:20:43 PM	Tube furnace set to 0
12/9/2010	11:21:43 PM	H2 valve closed
12/9/2010	11:21:43 PM	BCl3 valve closed
12/9/2010	11:21:43 PM	PH3 valve closed
12/9/2010	11:21:43 PM	SiCl4 pre valve closed
12/9/2010	11:21:43 PM	SiCl4 post valve closed
12/9/2010	11:21:43 PM	Bubbler valve closed
12/9/2010	11:21:43 PM	Helium valve opened
12/9/2010	11:21:43 PM	Main Vac valve opened
12/9/2010	11:21:43 PM	Bypass valve opened
12/9/2010	11:21:43 PM	Helium MFC set to  100.000000
12/9/2010	11:21:43 PM	H2 MFC set to  0.000000
12/9/2010	11:21:43 PM	BCl3 MFC set to  0.000000
12/9/2010	11:21:43 PM	PHl3 MFC set to  0.000000
12/9/2010	11:21:43 PM	SiCl4 MFC set to  0.000000
12/9/2010	11:21:43 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	11:21:43 PM	Tube furnace set to 0
12/9/2010	11:22:43 PM	Helium valve closed
12/9/2010	11:22:43 PM	H2 valve closed
12/9/2010	11:22:43 PM	BCl3 valve closed
12/9/2010	11:22:43 PM	PH3 valve closed
12/9/2010	11:22:43 PM	SiCl4 pre valve closed
12/9/2010	11:22:43 PM	SiCl4 post valve closed
12/9/2010	11:22:43 PM	Bubbler valve closed
12/9/2010	11:22:43 PM	Main Vac valve opened
12/9/2010	11:22:43 PM	Bypass valve opened
12/9/2010	11:22:43 PM	Helium MFC set to  0.000000
12/9/2010	11:22:43 PM	H2 MFC set to  0.000000
12/9/2010	11:22:43 PM	BCl3 MFC set to  0.000000
12/9/2010	11:22:43 PM	PHl3 MFC set to  0.000000
12/9/2010	11:22:43 PM	SiCl4 MFC set to  0.000000
12/9/2010	11:22:43 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	11:22:43 PM	Tube furnace set to 0
12/9/2010	11:23:43 PM	H2 valve closed
12/9/2010	11:23:43 PM	BCl3 valve closed
12/9/2010	11:23:43 PM	PH3 valve closed
12/9/2010	11:23:43 PM	SiCl4 pre valve closed
12/9/2010	11:23:43 PM	SiCl4 post valve closed
12/9/2010	11:23:43 PM	Bubbler valve closed
12/9/2010	11:23:43 PM	Helium valve opened
12/9/2010	11:23:43 PM	Main Vac valve opened
12/9/2010	11:23:43 PM	Bypass valve opened
12/9/2010	11:23:43 PM	Helium MFC set to  100.000000
12/9/2010	11:23:43 PM	H2 MFC set to  0.000000
12/9/2010	11:23:43 PM	BCl3 MFC set to  0.000000
12/9/2010	11:23:43 PM	PHl3 MFC set to  0.000000
12/9/2010	11:23:43 PM	SiCl4 MFC set to  0.000000
12/9/2010	11:23:43 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	11:23:43 PM	Tube furnace set to 0
12/9/2010	11:24:43 PM	Helium valve closed
12/9/2010	11:24:43 PM	H2 valve closed
12/9/2010	11:24:43 PM	BCl3 valve closed
12/9/2010	11:24:43 PM	PH3 valve closed
12/9/2010	11:24:43 PM	SiCl4 pre valve closed
12/9/2010	11:24:43 PM	SiCl4 post valve closed
12/9/2010	11:24:43 PM	Bubbler valve closed
12/9/2010	11:24:43 PM	Main Vac valve opened
12/9/2010	11:24:43 PM	Bypass valve opened
12/9/2010	11:24:43 PM	Helium MFC set to  0.000000
12/9/2010	11:24:43 PM	H2 MFC set to  0.000000
12/9/2010	11:24:43 PM	BCl3 MFC set to  0.000000
12/9/2010	11:24:43 PM	PHl3 MFC set to  0.000000
12/9/2010	11:24:43 PM	SiCl4 MFC set to  0.000000
12/9/2010	11:24:43 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	11:24:43 PM	Tube furnace set to 0
12/9/2010	11:25:43 PM	H2 valve closed
12/9/2010	11:25:43 PM	BCl3 valve closed
12/9/2010	11:25:44 PM	PH3 valve closed
12/9/2010	11:25:44 PM	SiCl4 pre valve closed
12/9/2010	11:25:44 PM	SiCl4 post valve closed
12/9/2010	11:25:44 PM	Bubbler valve closed
12/9/2010	11:25:44 PM	Helium valve opened
12/9/2010	11:25:44 PM	Main Vac valve opened
12/9/2010	11:25:44 PM	Bypass valve opened
12/9/2010	11:25:44 PM	Helium MFC set to  100.000000
12/9/2010	11:25:44 PM	H2 MFC set to  0.000000
12/9/2010	11:25:44 PM	BCl3 MFC set to  0.000000
12/9/2010	11:25:44 PM	PHl3 MFC set to  0.000000
12/9/2010	11:25:44 PM	SiCl4 MFC set to  0.000000
12/9/2010	11:25:44 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	11:25:44 PM	Tube furnace set to 0
12/9/2010	11:26:44 PM	Helium valve closed
12/9/2010	11:26:44 PM	H2 valve closed
12/9/2010	11:26:44 PM	BCl3 valve closed
12/9/2010	11:26:44 PM	PH3 valve closed
12/9/2010	11:26:44 PM	SiCl4 pre valve closed
12/9/2010	11:26:44 PM	SiCl4 post valve closed
12/9/2010	11:26:44 PM	Bubbler valve closed
12/9/2010	11:26:44 PM	Main Vac valve opened
12/9/2010	11:26:44 PM	Bypass valve opened
12/9/2010	11:26:44 PM	Helium MFC set to  0.000000
12/9/2010	11:26:44 PM	H2 MFC set to  0.000000
12/9/2010	11:26:44 PM	BCl3 MFC set to  0.000000
12/9/2010	11:26:44 PM	PHl3 MFC set to  0.000000
12/9/2010	11:26:44 PM	SiCl4 MFC set to  0.000000
12/9/2010	11:26:44 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	11:26:44 PM	Tube furnace set to 0
12/9/2010	11:27:44 PM	H2 valve closed
12/9/2010	11:27:44 PM	BCl3 valve closed
12/9/2010	11:27:44 PM	PH3 valve closed
12/9/2010	11:27:44 PM	SiCl4 pre valve closed
12/9/2010	11:27:44 PM	SiCl4 post valve closed
12/9/2010	11:27:44 PM	Bubbler valve closed
12/9/2010	11:27:44 PM	Helium valve opened
12/9/2010	11:27:44 PM	Main Vac valve opened
12/9/2010	11:27:44 PM	Bypass valve opened
12/9/2010	11:27:44 PM	Helium MFC set to  100.000000
12/9/2010	11:27:44 PM	H2 MFC set to  0.000000
12/9/2010	11:27:44 PM	BCl3 MFC set to  0.000000
12/9/2010	11:27:44 PM	PHl3 MFC set to  0.000000
12/9/2010	11:27:44 PM	SiCl4 MFC set to  0.000000
12/9/2010	11:27:44 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	11:27:44 PM	Tube furnace set to 0
12/9/2010	11:28:44 PM	Helium valve closed
12/9/2010	11:28:44 PM	H2 valve closed
12/9/2010	11:28:44 PM	BCl3 valve closed
12/9/2010	11:28:44 PM	PH3 valve closed
12/9/2010	11:28:44 PM	SiCl4 pre valve closed
12/9/2010	11:28:44 PM	SiCl4 post valve closed
12/9/2010	11:28:44 PM	Bubbler valve closed
12/9/2010	11:28:44 PM	Main Vac valve opened
12/9/2010	11:28:44 PM	Bypass valve opened
12/9/2010	11:28:44 PM	Helium MFC set to  0.000000
12/9/2010	11:28:44 PM	H2 MFC set to  0.000000
12/9/2010	11:28:44 PM	BCl3 MFC set to  0.000000
12/9/2010	11:28:44 PM	PHl3 MFC set to  0.000000
12/9/2010	11:28:44 PM	SiCl4 MFC set to  0.000000
12/9/2010	11:28:44 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	11:28:44 PM	Tube furnace set to 0
12/9/2010	11:29:44 PM	H2 valve closed
12/9/2010	11:29:44 PM	BCl3 valve closed
12/9/2010	11:29:44 PM	PH3 valve closed
12/9/2010	11:29:44 PM	SiCl4 pre valve closed
12/9/2010	11:29:44 PM	SiCl4 post valve closed
12/9/2010	11:29:44 PM	Bubbler valve closed
12/9/2010	11:29:44 PM	Helium valve opened
12/9/2010	11:29:44 PM	Main Vac valve opened
12/9/2010	11:29:44 PM	Bypass valve opened
12/9/2010	11:29:44 PM	Helium MFC set to  100.000000
12/9/2010	11:29:44 PM	H2 MFC set to  0.000000
12/9/2010	11:29:44 PM	BCl3 MFC set to  0.000000
12/9/2010	11:29:44 PM	PHl3 MFC set to  0.000000
12/9/2010	11:29:44 PM	SiCl4 MFC set to  0.000000
12/9/2010	11:29:44 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	11:29:44 PM	Tube furnace set to 0
12/9/2010	11:30:44 PM	Helium valve closed
12/9/2010	11:30:44 PM	H2 valve closed
12/9/2010	11:30:44 PM	BCl3 valve closed
12/9/2010	11:30:44 PM	PH3 valve closed
12/9/2010	11:30:44 PM	SiCl4 pre valve closed
12/9/2010	11:30:44 PM	SiCl4 post valve closed
12/9/2010	11:30:44 PM	Bubbler valve closed
12/9/2010	11:30:44 PM	Main Vac valve opened
12/9/2010	11:30:44 PM	Bypass valve opened
12/9/2010	11:30:44 PM	Helium MFC set to  0.000000
12/9/2010	11:30:44 PM	H2 MFC set to  0.000000
12/9/2010	11:30:44 PM	BCl3 MFC set to  0.000000
12/9/2010	11:30:44 PM	PHl3 MFC set to  0.000000
12/9/2010	11:30:44 PM	SiCl4 MFC set to  0.000000
12/9/2010	11:30:44 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	11:30:45 PM	Tube furnace set to 0
12/9/2010	11:31:45 PM	H2 valve closed
12/9/2010	11:31:45 PM	BCl3 valve closed
12/9/2010	11:31:45 PM	PH3 valve closed
12/9/2010	11:31:45 PM	SiCl4 pre valve closed
12/9/2010	11:31:45 PM	SiCl4 post valve closed
12/9/2010	11:31:45 PM	Bubbler valve closed
12/9/2010	11:31:45 PM	Helium valve opened
12/9/2010	11:31:45 PM	Main Vac valve opened
12/9/2010	11:31:45 PM	Bypass valve opened
12/9/2010	11:31:45 PM	Helium MFC set to  100.000000
12/9/2010	11:31:45 PM	H2 MFC set to  0.000000
12/9/2010	11:31:45 PM	BCl3 MFC set to  0.000000
12/9/2010	11:31:45 PM	PHl3 MFC set to  0.000000
12/9/2010	11:31:45 PM	SiCl4 MFC set to  0.000000
12/9/2010	11:31:45 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	11:31:45 PM	Tube furnace set to 0
12/9/2010	11:32:45 PM	Helium valve closed
12/9/2010	11:32:45 PM	H2 valve closed
12/9/2010	11:32:45 PM	BCl3 valve closed
12/9/2010	11:32:45 PM	PH3 valve closed
12/9/2010	11:32:45 PM	SiCl4 pre valve closed
12/9/2010	11:32:45 PM	SiCl4 post valve closed
12/9/2010	11:32:45 PM	Bubbler valve closed
12/9/2010	11:32:45 PM	Main Vac valve opened
12/9/2010	11:32:45 PM	Bypass valve opened
12/9/2010	11:32:45 PM	Helium MFC set to  0.000000
12/9/2010	11:32:45 PM	H2 MFC set to  0.000000
12/9/2010	11:32:45 PM	BCl3 MFC set to  0.000000
12/9/2010	11:32:45 PM	PHl3 MFC set to  0.000000
12/9/2010	11:32:45 PM	SiCl4 MFC set to  0.000000
12/9/2010	11:32:45 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	11:32:45 PM	Tube furnace set to 0
12/9/2010	11:33:45 PM	H2 valve closed
12/9/2010	11:33:45 PM	BCl3 valve closed
12/9/2010	11:33:45 PM	PH3 valve closed
12/9/2010	11:33:45 PM	SiCl4 pre valve closed
12/9/2010	11:33:45 PM	SiCl4 post valve closed
12/9/2010	11:33:45 PM	Bubbler valve closed
12/9/2010	11:33:45 PM	Helium valve opened
12/9/2010	11:33:45 PM	Main Vac valve opened
12/9/2010	11:33:45 PM	Bypass valve opened
12/9/2010	11:33:45 PM	Helium MFC set to  100.000000
12/9/2010	11:33:45 PM	H2 MFC set to  0.000000
12/9/2010	11:33:45 PM	BCl3 MFC set to  0.000000
12/9/2010	11:33:45 PM	PHl3 MFC set to  0.000000
12/9/2010	11:33:45 PM	SiCl4 MFC set to  0.000000
12/9/2010	11:33:45 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	11:33:45 PM	Tube furnace set to 0
12/9/2010	11:34:45 PM	Helium valve closed
12/9/2010	11:34:45 PM	H2 valve closed
12/9/2010	11:34:45 PM	BCl3 valve closed
12/9/2010	11:34:45 PM	PH3 valve closed
12/9/2010	11:34:45 PM	SiCl4 pre valve closed
12/9/2010	11:34:45 PM	SiCl4 post valve closed
12/9/2010	11:34:45 PM	Bubbler valve closed
12/9/2010	11:34:45 PM	Main Vac valve opened
12/9/2010	11:34:45 PM	Bypass valve opened
12/9/2010	11:34:45 PM	Helium MFC set to  0.000000
12/9/2010	11:34:45 PM	H2 MFC set to  0.000000
12/9/2010	11:34:45 PM	BCl3 MFC set to  0.000000
12/9/2010	11:34:45 PM	PHl3 MFC set to  0.000000
12/9/2010	11:34:45 PM	SiCl4 MFC set to  0.000000
12/9/2010	11:34:45 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	11:34:45 PM	Tube furnace set to 0
12/9/2010	11:35:45 PM	H2 valve closed
12/9/2010	11:35:45 PM	BCl3 valve closed
12/9/2010	11:35:45 PM	PH3 valve closed
12/9/2010	11:35:45 PM	SiCl4 pre valve closed
12/9/2010	11:35:45 PM	SiCl4 post valve closed
12/9/2010	11:35:45 PM	Bubbler valve closed
12/9/2010	11:35:45 PM	Helium valve opened
12/9/2010	11:35:45 PM	Main Vac valve opened
12/9/2010	11:35:45 PM	Bypass valve opened
12/9/2010	11:35:45 PM	Helium MFC set to  100.000000
12/9/2010	11:35:45 PM	H2 MFC set to  0.000000
12/9/2010	11:35:45 PM	BCl3 MFC set to  0.000000
12/9/2010	11:35:45 PM	PHl3 MFC set to  0.000000
12/9/2010	11:35:45 PM	SiCl4 MFC set to  0.000000
12/9/2010	11:35:45 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	11:35:46 PM	Tube furnace set to 0
12/9/2010	11:36:46 PM	Helium valve closed
12/9/2010	11:36:46 PM	H2 valve closed
12/9/2010	11:36:46 PM	BCl3 valve closed
12/9/2010	11:36:46 PM	PH3 valve closed
12/9/2010	11:36:46 PM	SiCl4 pre valve closed
12/9/2010	11:36:46 PM	SiCl4 post valve closed
12/9/2010	11:36:46 PM	Bubbler valve closed
12/9/2010	11:36:46 PM	Main Vac valve opened
12/9/2010	11:36:46 PM	Bypass valve opened
12/9/2010	11:36:46 PM	Helium MFC set to  0.000000
12/9/2010	11:36:46 PM	H2 MFC set to  0.000000
12/9/2010	11:36:46 PM	BCl3 MFC set to  0.000000
12/9/2010	11:36:46 PM	PHl3 MFC set to  0.000000
12/9/2010	11:36:46 PM	SiCl4 MFC set to  0.000000
12/9/2010	11:36:46 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	11:36:46 PM	Tube furnace set to 0
12/9/2010	11:37:46 PM	H2 valve closed
12/9/2010	11:37:46 PM	BCl3 valve closed
12/9/2010	11:37:46 PM	PH3 valve closed
12/9/2010	11:37:46 PM	SiCl4 pre valve closed
12/9/2010	11:37:46 PM	SiCl4 post valve closed
12/9/2010	11:37:46 PM	Bubbler valve closed
12/9/2010	11:37:46 PM	Helium valve opened
12/9/2010	11:37:46 PM	Main Vac valve opened
12/9/2010	11:37:46 PM	Bypass valve opened
12/9/2010	11:37:46 PM	Helium MFC set to  100.000000
12/9/2010	11:37:46 PM	H2 MFC set to  0.000000
12/9/2010	11:37:46 PM	BCl3 MFC set to  0.000000
12/9/2010	11:37:46 PM	PHl3 MFC set to  0.000000
12/9/2010	11:37:46 PM	SiCl4 MFC set to  0.000000
12/9/2010	11:37:46 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	11:37:46 PM	Tube furnace set to 0
12/9/2010	11:38:46 PM	Helium valve closed
12/9/2010	11:38:46 PM	H2 valve closed
12/9/2010	11:38:46 PM	BCl3 valve closed
12/9/2010	11:38:46 PM	PH3 valve closed
12/9/2010	11:38:46 PM	SiCl4 pre valve closed
12/9/2010	11:38:46 PM	SiCl4 post valve closed
12/9/2010	11:38:46 PM	Bubbler valve closed
12/9/2010	11:38:46 PM	Main Vac valve opened
12/9/2010	11:38:46 PM	Bypass valve opened
12/9/2010	11:38:46 PM	Helium MFC set to  0.000000
12/9/2010	11:38:46 PM	H2 MFC set to  0.000000
12/9/2010	11:38:46 PM	BCl3 MFC set to  0.000000
12/9/2010	11:38:46 PM	PHl3 MFC set to  0.000000
12/9/2010	11:38:46 PM	SiCl4 MFC set to  0.000000
12/9/2010	11:38:46 PM	Bypass solenoid MFC set to  0.000000
12/9/2010	11:38:46 PM	Tube furnace set to 0
12/9/2010	11:38:47 PM	Run finished at 11:38 PM
12/9/2010	11:38:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
